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  • Description: These sputter ion pumps are sold cleaned-tested or rebuilt. The Varian VacIon includes Diode, Triode, Noble Diode and StarCell pumps. Also included are non-evaporable getter (NEG) or titanium sublimation combination pumps (TSP). We also offer repair service.

  • Description: The CombiTSP 300 integrates the VacIon 300 L/s pump, TSP cartridge, and TSP cryopanel to increase pumping speed in the same footprint. The gettering properties of the TSP cartridge deliver faster pump down to ultra high and extreme high vacuum (UHV/XHV) enabling lower ultimate base

    • Ultimate Operating Vacuum: 0.0000000000750283824473074 torr
    • Pumping Speed: 635.664000986796 CFM
    • Application: Analytical / Scientific, Medical / Laboratory, Semiconductor Manufacturing
    • Configuration: Individual Vacuum Pump

  • Description: The CombiTSP 150 integrates the VacIon 150 L/s pump, TSP cartridge, and TSP cryopanel to increase pumping speed in the same footprint. The gettering properties of the TSP cartridge deliver faster pump down to ultrahigh and extreme high vacuum (UHV/XHV) enabling lower ultimate base

    • Ultimate Operating Vacuum: 0.0000000000750283824473074 torr
    • Pumping Speed: 1,292.5168020064852 to 2,924.0544045392617 CFM
    • Application: Analytical / Scientific, Medical / Laboratory, Semiconductor Manufacturing
    • Configuration: Combination / Multi-Technology Pump, Individual Vacuum Pump

  • Description: The CombiTSP 500 integrates the VacIon 500 L/s pump, TSP cartridge, and TSP cryopanel to increase pumping speed in the same footprint. The gettering properties of the TSP cartridge deliver faster pump down to ultra high and extreme high vacuum (UHV/XHV) enabling lower ultimate base

    • Ultimate Operating Vacuum: 0.0000000000750283824473074 torr
    • Pumping Speed: 1,864.6144028946017 to 4,089.4384063483876 CFM
    • Application: Analytical / Scientific, Medical / Laboratory, Semiconductor Manufacturing
    • Configuration: Combination / Multi-Technology Pump, Individual Vacuum Pump

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