TABLE OF CONTENTS Machining is defined as a process of removing material from a workpiece in the form of chips in order to obtain exact shapes and sizes. It is a well-defined process method in "machine design and tooling". Itincludes several methods, which are usually divided into three main classes such as cutting, abrasive processes, and nontraditional machining. Machining processes design and manufacture macro components and systems. Micromachining processes bear similar meaning but the process handles microsystems. Micromachining has become a new technology, as there has been significant growth in the manufacture of components having dimensions less than a millimeter upon which micro features in the range of 1 200 ?m are built. In particular, micromachining deals with microelectronics, micromechanical systems, micro-opto-electrical systems and micro-optomechanical systems. When these are integrated into one platform, the system is known as a MEM (Microelectromechanical) system, or MEMS. Micromachining is considered to be a process as well as a technology that is utilised to structure wafer materials or thin films in order to fabricate miniature devices such as microsensors, microactuators and passive components. The process is classified under two different process techniques: bulk micromachining and surface micromachining. If structuring is performed on wafer materials the process is called a bulk micromachining process and if it is performed on the thin film the process is called a surface micromachining process.
Bulk micromachining is...
