Beta Squared Lithography, Inc., established 1999, offers lithography support and services for the semiconductor industry. The company specializes in leading edge equipment modification, integration, digital motor controllers and high reliability software enhancements.

Services

• Complete Machine Servicing (emergency, on-call, and contract)
• Optical Alignment
• Primary/Secondary Mirror C-of-C Adjustment
• Strong/Weak Shells
• Complete Optical Re-coating for Condenser & Relay Assemblies

Repairs

• Most Electro-mechanical Assemblies (e.g. gearboxes, carousel arms, chucks, etc.)
• Electronic Circuit boards
• Bi-morph boards (V-to-P boards)

New/Replacement Parts

• Stage Assemblies
• Wafer Handling/Pneumatic Parts (e.g. Load Arms, Carousel Arms, etc)
• Optical components (e.g. Secondaries, Toroids, Illuminators)
• Tilting Binocular Heads

Upgrades

• OS2000 - Machine Control System replacement
• Helium Regulator
• Machine Re-hosing
• Size Conversions
• Air Track to Pick & Place
• Multi-thickness Chucks

Machine Sales

• Completely Refurbished to Factory Specs.
• Custom Modifications to alternate substrates (FPD, Thin-Film Heads, MEMS, Pyrex)

Whether you need service, parts or a new machine, Beta Squared Lithography will strive to meet your needs and expectations.