About
LOT Vacuum provides product solutions for your most difficult vacuum pumping applications.
At LOT Vacuum America we supply product solutions and support the following markets:
- LED, OLED, AMOLED, Semiconductor, Flat Panel Display, Implanter, MEMS
- Nanotechnology, Scientific Instruments, High Energy Physics, Research and Development
- Emerging Technologies: Solar, Thermal Vacuum Tubes, Lithium-Ion battery, Bio-Fuel
- General Industrial
The Dura-Dry and HD Series provide world class performance in the harshest CVD, PVD, Etch and MEMS applications, while the LD line provides world class conservation of operating resources for Load-Lock, Transfer, and Mild Process applications.
The GD Series builds upon the proven Dura-Dry dual screw designand is proven for demanding high flow applications including:Flat Panel Display, AMOLED, OLED, LED, HB LED, Implanter, Solar PV and 450mm Semiconductor manufacturing.
The GHD Series provides large capacity dry pumping for Industrial applications. Single stage GHD pumps provide up to 2,400 M3/Hr with added booster blowers increasing capacities to over 10,000 M3/Hr.
From the R&D Lab to the largest Flat Panel applications, LOT Vacuum provides proven technology to meet your needs.

Our Full Product Range Includes:
Industrial dry pumps and systems, chemical dry pumps and systems, oil-free vacuum pumps, mechanical vacuum boosters, exhaust management systems,and turbo pumps, turbo pump carts, scroll pumps, miniature dry scroll pumps, valves and instumentation through our US Distributor
Our Global Services Include:
Equipment service and repair, product exchange, refurbished equipment and product acquisition programs, field and on-site support services