UNLIMITED FREE
ACCESS
TO THE WORLD'S BEST IDEAS

SUBMIT
Already a GlobalSpec user? Log in.

This is embarrasing...

An error occurred while processing the form. Please try again in a few minutes.

Customize Your GlobalSpec Experience

Category: Vacuum Pumps and Vacuum Generators
Finish!
Privacy Policy

This is embarrasing...

An error occurred while processing the form. Please try again in a few minutes.

About

LOT Vacuum provides product solutions for your most difficult vacuum pumping applications.

Since 2002 LOT Vacuum Korea has been at the forefront of dry screw vacuum pump technology and design. We offer over 35 vacuum pump models specifically engineered to handle processes from the harshest liquid precursor CVD, Metal, and ALD applications, to simple inert gas pumping.

At LOT Vacuum America we supply product solutions and support the following markets:

The Dura-Dry and HD Series provide world class performance in the harshest CVD, PVD, Etch and MEMS applications, while the LD line provides world class conservation of operating resources for Load-Lock, Transfer, and Mild Process applications.

The GD Series builds upon the proven Dura-Dry dual screw designand is proven for demanding high flow applications including:Flat Panel Display, AMOLED, OLED, LED, HB LED, Implanter, Solar PV and 450mm Semiconductor manufacturing.

The GHD Series provides large capacity dry pumping for Industrial applications.  Single stage GHD pumps provide up to 2,400 M3/Hr with added booster blowers increasing capacities to over 10,000 M3/Hr.

From the R&D Lab to the largest Flat Panel applications, LOT Vacuum provides proven technology to meet your needs.

Our Full Product Range Includes:
Industrial dry pumps and systems, chemical dry pumps and systems, oil-free vacuum pumps, mechanical vacuum boosters, exhaust management systems,and  turbo pumps, turbo pump carts, scroll pumps, miniature dry scroll pumps, valves and instumentation through our US Distributor

Our Global Services Include:
Equipment service and repair, product exchange, refurbished equipment and product acquisition programs, field and on-site support services

Supplier Directory Categories

LOT Vacuum America is also listed in these categories: