About



PHI manufactures a broad range of high performance surface analysis instruments to provide detailed surface chemical characterization, nano-scale feature analysis and thin film characterization. PHI's innovative X-ray Photoelectron Spectroscopy (XPS), Auger Electron Spectroscopy (AES), and Time-of-Flight Secondary Ion Mass Spectrometry (TOF-SIMS) technologies provide our customers with powerful tools to solve challenging materials problems and accelerate the development of new processes and products. As the only supplier that provides a full range of high performance XPS, AES, and SIMS instruments, PHI is in a unique position to provide complete surface analysis solutions for our customers.
Products
• VersaProbe III: A multi-technique XPS instrument optimized for flexibility
• Quantera II: A dedicated XPS instrument optimized for throughput
• X-Tool: A dedicated XPS instrument optimized for ease-of-use
• 710: A scanning Auger instrument optimized for high magnification chemical imaging
• nanoTOF II: A TOF-SIMS instrument optimized for the highest sensitivity elemental and molecular analysis
Applications
• Energy
• Medical
• Polymers
• Thin Films
• Metallurgy
• Magentic Media
• Microelectronics
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