The Vistec Electron Beam Lithography Group is a world leader in the design and manufacture of electron beam lithography systems and provides leading edge technology solutions for a wide range of applications.

The Group provides systems to both key semiconductor manufacturers as well as to Universities and Centres of Excellence. The application areas span a wide range of existing and emerging semiconductor and nanotechnology applications including silicon direct write, compound semiconductor, mask making, advanced research, integrated optics and several new emerging markets. 

In addition to production facilities in Germany and the US, the Group also maintains service and support centers in the USA, Europe, China, Japan, Taiwan and Korea. The company headquarters is located in Fremont, CA, USA.

The Vistec Electron Beam Lithography Group consists of two companies / business units: Vistec Electron Beam GmbH, which produces Variable Shaped Beam Lithography systems - located in Jena, Germany and Vistec Lithography Inc., manufacturing Gaussian Beam Lithography systems - located in Watervliet, NY, USA.

The two companies in Jena, Germany and Watervliet, USA, benefit from the synergies between leading edge researchers, small and midsized equipment and supplier companies and key semiconductor manufacturers in their neighboring areas. They have a excellent record as experienced developers and manufacturers of electron beam lithography systems.