MEMS/MOEMS Packaging: Concepts, Designs, Materials, and Processes

References

1. MIL-STD-883P, 18 June 2004, Superseding, MIL-STD-883E, 31 Department of Defense, Test Method Standard, Microcircuits, AMSC N/A FSC 5962.

2. Tseng, A. A., Tang, W. C., Lee, Y. -C., and Allen, J., "NSF 2000 workshop on manufacturing of microelectromechanical Systems, " J. Mat. Processing & Manufacturing Science, Vol. 8, No. 4, pp. 292 305, 2000.

3. Harper, C., Electronic Packaging and Interconnection Handbook, 3d ed., McGraw-Hill, New York, 2000.

4. Occhionero, M. A., R. W. Adams, K. P. Fennessy, and R. A. Hay, "Aluminum Silicon Carbide (AlSiC) for Thermal Management Solutions and Functional Packaging Designs," Proceedings of the Annual IMAPS Conference, San Diego, CA, October, 1998; Conference (GOMAC), Digest of Papers, Vol. 20, pp. 454 456, November 1994.

5. Novich, B. E., and R. W. Adams, "Aluminum/Silicon Carbide (AlSiC) Metal Matrix Composites for Advanced Packaging Applications, " Proceedings of the 1995 International Electronics Packaging Conference, IEPS, San Diego, CA, September 24 27, 1995, pp. 220 227.

6. Sahakian, V, "Integrated Circuit Chip Sealing Assembly, " U.S. Patent 4, 907, 065, March 6, 1990.

7. Yamamoto, K., et al., "Hermetic Sealing of Wafer Scale Integrated Wafer, " U.S. Patent 5, 150, 196, September 22, 1992.

8. Roberts, Jr, C., et al., "Method for Separating Circuit Dies from a Wafer, " U.S. Patent 5,362, 681, November 8, 1994.

9. Adams, V, et al., "Semiconductor Wafer Level Package," U.S. Patent 5, 323, 051, June 21, 1994.

10. Alfaro, R., "Grid...

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