Coated quartz thermocouples last up to 3X longer

Conax Technologies’ patented EtchDefender™ Technology extends the life of quartz thermocouple sheaths in certain reactors. Available exclusively from Conax, quartz thermocouples coated with EtchDefender™ can last up to 3X longer than uncoated TCs.

View our brief demo video here.

EtchDefender™ Technology exclusively from Conax

Conax Technologies’ proven, patented solution provides these unique advantages:

• No particulation – EtchDefender™ coating is well adhered and will not flake from the quartz substrate, which could cause particle contamination to the wafer.
• Durability – The coating does not decompose, out-gas or sublimate under vacuum at high temperature.
• Slower devitrification – The coating greatly slows the devitrification process typical of quartz sheaths used in some reactors by retarding the loss of oxygen from the SiO₂ quartz sheath at temperatures more than 900 °C.
• Slower erosion – The coating greatly retards the erosion process caused by hot corrosive gases flowing at high concentrations and velocities. This is most relevant in extending the life of the Center Thermocouple.
• Significantly longer life – The coating will allow quartz sheaths to last up to three times longer.

Increased yield and decreased cost of ownership

Using TCs coated with EtchDefender™ allows a tool to run continuously and reduces maintenance cycles, resulting in:

• Increased process uptime
• Reduced process variation, so more wafers can be produced per tool with higher consistency
• Reduced labor and increased safety
• Decreased risk of technicians igniting pyrophoric deposits as a result of reduced maintenance requirements
• Decreased exposure of the chamber to oxygen, resulting in less time needed to purge the oxygen from all surfaces

Click here to download our white paper. To find out more about EtchDefender™ Technology, click the Email Supplier button or visit our website.

Click here to learn about our comprehensive solutions for the semiconductor industry, including our LeakDefender™ Brand Thermocouples that enable real-time gas monitoring to minimize wafer loss and maximize thermocouple life.