Ultra-Precise Air Bearing Linear Motion
Featured Product from PI (Physik Instrumente) L.P.
Air Bearing Linear Slide Delivers Nanometer-Precision Motion Control
Frictionless motion with excellent velocity constancy for high-end test and manufacturing
PI, a global leader in precision motion control and air bearing positioning systems, offers the A-123 air bearing linear slide, a high-performance air bearing linear translation stage designed for ultra-precise scanning, metrology, inspection, and nanopositioning applications.
Motorized air bearings linear slides, such as the A-123, combine long travel ranges with nanometer precision and excellent geometric performance (straightness, flatness, pitch, yaw, roll).
The A-123 combines a 3-phase linear motor, preloaded air bearings, and an integrated linear encoder to create a fully noncontact motion platform.
Air Bearings vs Mechanical Bearings
Unlike mechanical bearing linear stages that rely on rolling or sliding contact, air bearing stages float on a thin, pressurized film of air. This eliminates mechanical friction, wear, stiction, vibration, and particle generation, while improving straightness, flatness, velocity stability, and long-term repeatability.
The result is a precision linear slide engineered for demanding 24/7 applications in semiconductor manufacturing, flat-panel display production, photonics, metrology, optics, precision scanning, and advanced automation.
Key specifications include:
•Travel ranges from 50 mm to 750 mm
•Resolution to 1 nm
•Motion platform size of 210 mm × 210 mm
•Maximum velocity up to 1000 mm/sec
•Acceleration up to 30 m/sec² unloaded
•Payload capacity up to 40 kg
•Cleanroom-compatible, friction-free motion
•Straightness and flatness errors as low as ±0.25 µm, depending on travel range
The A-123’s high-force linear motor can accelerate this nanopositioning stage at 3 g’s and achieve a maximum speed of 1 m/s, while its high-capacity, actively preloaded air bearings support smooth motion with minimal velocity fluctuations. The laterally opposed bearing design also allows flexible mounting orientations, and options include encoder configurations, air preparation kits, single- and multi-axis controllers, pneumatic locks, XY, XY-Theta and XYZ assemblies, cable-track variations, granite base plates, vibration-reduction systems, and custom configurations.
For manufacturers and research teams that need longer travel without sacrificing nanometer-class positioning performance, the A-123 provides the speed of a direct-drive stage with the smoothness and geometric performance of an air bearing guide. By eliminating mechanical contact, PI’s air bearing technology enables cleaner, smoother, and more durable precision motion than conventional mechanical bearing systems.
Controllers
PI’s A-800 series ACS-based motion controllers provide high-performance control for A-123 PIglide air bearing linear slides, combining EtherCAT® connectivity, advanced servo algorithms, precision encoder feedback, and coordinated multi-axis control. They are well suited for high-speed scanning, smooth velocity control, and demanding air-bearing motion applications.
» More information on PI Linear Air Bearing Slides / Stages
About PI
PI is a leading manufacturer of air bearing stages, piezoelectric solutions, precision motion control equipment, and hexapod parallel-kinematics for semiconductor applications, photonics, bio-nano-technology and medical engineering. PI has been developing and manufacturing standard & custom precision products with piezoceramic and electromagnetic drives for 4 decades. The company has been ISO 9001 certified since 1994 and provides innovative, high-quality solutions for OEM and research. The PI group employs more than 1,000 people worldwide in 15 subsidiaries and R&D / engineering centers on 3 continents.
About PI
PI is a leading manufacturer of precision motion control and nanopositioning automation solutions, including gantry robots, air-bearing stages, piezo motors, and hexapod parallel-kinematic systems for applications in semiconductors, photonics, aerospace, bio-nanotechnology, and medical engineering. PI has been developing and manufacturing standard and custom precision motion products with piezoelectric and electromagnetic drives for over five decades. ISO 9001–certified since 1994, PI provides innovative, high-quality solutions for industrial OEMs and research applications. The PI Group employs more than 1,900 people worldwide, with 15 subsidiaries and R&D and engineering centers across three continents.