Rack Mount Plasma Power Supplies

AC Constant Voltage Source -- AL-1000-CV/S
from Amp-Line Corp.

Constant Voltage Source (Linear AC Power Source / Power Supply): 0-130 V rms. (or 0-260 V rms.) ; 1000 watts; 47 - 10K Hz (up to 20K Hz if low bound frequency starts from 2K Hz or higher). Custom output range available upon request. [See More]

  • Form Factor: Rack Mount
  • Technology: Linear Power Supply
  • Type: Programmable Power Supply
  • Applications: High Frequency, Instrumentation, Magnetic, Testing Equipment
Plasma Power Supply Systems -- AL-1000-HF-A & AI-T1000.2
from Amp-Line Corp.

Plasma Power Supply System (input signal from Function Generator needed): Provides high frequency high voltage signal for plasma generation; 600 Hz - 2.5K Hz, 0 - 5K V rms. [See More]

  • Form Factor: Rack Mount
  • Applications: High Frequency, Instrumentation, Magnetic, Military, Testing Equipment
  • Technology: Linear Power Supply
  • AC Output Current: 0.0 to 0.2000
Low-Frequency Power Supply -- PEII
from Advanced Energy Industries, Inc.

The PEII series of power supplies are the trusted standard for dual-magnetron sputtering, as an effective vacuum cleaning tool, and in multiple PECVD applications. Reliable water-cooled design. Delivers tight output regulation on power, voltage, or current, with a measurement accuracy of 1%. [See More]

  • Form Factor: Rack Mount
  • Applications: Semiconductor/Thin Film
  • Type: AC Power Source
  • AC Output Voltage: 547.0 to 953.0
MicroFocus X-Ray Power Supply -- P12506
from Thermo Scientific - Checkweighing, Metal Detection and X-Ray Systems

The P12506 is a continuous duty power supply designed to drive and monitor the KM125 series of x-ray tubes. Front panel controls and indicators allow the operator full function control of the x-ray tube, while monitoring the status of the system. Remote control and monitoring of both the target... [See More]

  • Form Factor: Rack Mount
  • Technology: Linear Power Supply
  • Type: High Voltage; DC Power Supply
  • DC Output Voltage: 125000.0
CB Series - High Frequency RF Power -- CB 5000
from Comdel, Inc.

Comdel's Superior Design and Reliability in a Small, Lightweight Package. Performance: RF generators from the CB product family are available in power ranges from 50 to 5000 Watts with standard fixed frequencies from 13.56 MHz to 60 MHz. The CB 5000 provides 5000 watts of power output in a compact... [See More]

  • Form Factor: Rack Mount
  • DC Output Power: 5000
  • Applications: High Frequency, Semiconductor/Thin Film, Semiconductor Processing, Etch, RIE ICP
  • Output Frequency: 13.56 to 60
Plasma Power Supply -- 250S-HF
from Actioncraft Products, Inc. / Industrial Test Equipment Co., Inc.

Plasma Power Supplies. Features. Output Voltage: 0-130V or 0-260V with internal output transformer. 0-22.5 rms. into primary of external output transformer. Frequency Response: 40Hz to 20KHz with internal output transformer. 20KHz to 200KHz with external output transformers (at additional cost). [See More]

  • Form Factor: Rack Mount
  • Applications: Testing Equipment
  • Type: High Voltage; AC Power Source
  • AC Output Voltage: 0.0 to 260.0
Mid-Frequency Generator -- LFGS
from Advanced Energy Industries, Inc.

Wide-output frequency range. Compact design. Flexible communication protocol. The versatile, variable-frequency LFGS  generator  (1250 W,  40 to 500 kHz)  suits  a wide variety of semiconductor and  general plasma-processing applications,  including... [See More]

  • Form Factor: Rack Mount
  • Applications: Semiconductor/Thin Film
  • Type: AC Power Source
  • DC Output Power: 15 to 1250
CDX Series - Dual Frequency Power -- CDX 1000
from Comdel, Inc.

Simplify Operations and Reduce Costs Without Sacrificing Performance. Performance: The CDX 1000 dual frequency RF generator comes in a 1200 watt design. The high frequency (HF) section of the CDX provides 600 watts of power, with optional frequencies from 2 to 60 MHz. The low frequency (LF) section... [See More]

  • Form Factor: Rack Mount
  • DC Output Power: 1200
  • Applications: Instrumentation, Semiconductor/Thin Film, Semiconductor, Etch, Deposition
  • Output Frequency: 2 to 13.56
RF Generator and Power-Delivery System -- Apex
from Advanced Energy Industries, Inc.

When space is limited, but performance is critical, streamlined APEX RF generators offer various mounting options and power you can rely on. Chamber-, rack-, or frame-mount options for convenience and reduced power losses. Superb performance enhanced with arc management. 1.5 to 10 kW output power... [See More]

  • Form Factor: Rack Mount
  • DC Output Power: 750 to 10000
  • Type: DC-DC Converter
  • Operating Temperature: 5 to 40
CLB Series - Low Frequency RF Power -- CLB 12K
from Comdel, Inc.

Comdel's Superior Design and Reliability in a Small, Lightweight Package. Performance: RF generators from the CLB product family are available in power ranges from 2500 to 12,000 Watts at a single frequency in the 20 kHz to 2 MHz band. The CLB 12K provides 12000 watts of power. The Turbotune... [See More]

  • Form Factor: Rack Mount
  • DC Output Voltage: -5.0 to 10.0
  • Applications: Semiconductor/Thin Film, Etch, Parallel Plate, RF Sputtering
  • DC Output Power: 3000
RF Power Supply -- Cesar
from Advanced Energy Industries, Inc.

Robust and versatile, the Cesar platform provides excellent RF power delivery across a wide range of frequencies and power outputs. Customized performance without custom lead times. Reliable design for maximum uptime. Powerful user interface for easy operation. The proven Cesar platform delivers... [See More]

  • Form Factor: Rack Mount
  • Applications: Semiconductor/Thin Film
  • Type: AC Power Source
  • DC Output Power: 600 to 5000
CLF Series - Low Frequency RF Power -- CLF 1000 Full Rack
from Comdel, Inc.

Stable, Reliable, Low Frequency Power for Industrial Heating and Plasma Processing Applications. Performance: The CLF series generators provide stable process power up to 5 kW. The CLF 1000 provides 1000 watts of power. The full- rack models operate at any fixed frequency from 20 to 450 kHz or... [See More]

  • Form Factor: Rack Mount
  • DC Output Power: 1000
  • Applications: Semiconductor/Thin Film, RIE, ICP, PVD, Semiconductor Processing
  • Output Frequency: 0.0200 to 0.4500
RF Power Supply -- Paramount
from Advanced Energy Industries, Inc.

Paramount RF power generators combine frequency tuning, pulsing, and complete digital control. Full digital control for dynamic response to plasma changes. Customizable frequency from 400 kHz to 60 MHz and power from 100 W to 8 kW. Advanced features for control optimization and synchronization. [See More]

  • Form Factor: Rack Mount
  • Applications: Semiconductor/Thin Film
  • Type: AC Power Source
  • DC Output Power: 1500 to 8000
CLF Series - Low Frequency RF Power -- CLF 5000 Full Rack
from Comdel, Inc.

Stable, Reliable, Low Frequency Power for Industrial Heating and Plasma Processing Applications. Performance: The CLF series generators provide stable process power up to 5 kW. The CLF 5000 provides 5000 watts of power. The full- rack models can operate at any fixed frequency from 20 to 450 kHz or... [See More]

  • Form Factor: Rack Mount
  • DC Output Power: 5000
  • Applications: Semiconductor/Thin Film, RIE, ICP, PVD, Semiconductor Processing
  • Output Frequency: 0.0200 to 0.4500
Series DC Magnetron Power Supply -- Pinnacle® Diamond
from Advanced Energy Industries, Inc.

In both process and bias applications, the Advanced Energy (AE) Pinnacle ® Diamond DC power supply provides the highest efficiency and power factor available, resulting in the lowest operating and installed cost in the industry. Remarkable Pinnacle process consistency and control deliver the... [See More]

  • Form Factor: Rack Mount
  • Applications: Instrumentation
  • Type: DC Power Supply
  • DC Output Power: 30000
CLX Series - Low Frequency RF Power -- CLX 1000
from Comdel, Inc.

Proven Reliability in Plasma Vacuum Systems Worldwide. Performance: The CLX series low frequency RF power supplies are available in power ranges from 600 to 10,000 Watts with fixed frequencies from 20 kHz to 2 MHz, and frequency agile capability up to 10% bandwidth. The CLX 1000 provides 1000 watts... [See More]

  • Form Factor: Rack Mount
  • DC Output Power: 1000
  • Applications: Semiconductor/Thin Film, Semiconductor Processing, RIE, CVD, PVD
  • Output Frequency: 0.0200 to 2
CPS Series - High Frequency RF Power -- CPS 1001
from Comdel, Inc.

Solid, Reliable Engineering that Improves Process Results. Performance: With millions of hours in the field, Comdel ’s CPS series generators have proven their ability to withstand erratic loads. Patented S-Technology provides optimized amplifier performance for ultra-stable output by reducing... [See More]

  • Form Factor: Rack Mount
  • DC Output Power: 1000
  • Applications: High Frequency, Semiconductor/Thin Film, Etch, RIE, ICP, RF Sputtering, CVD
  • Output Frequency: 2 to 80
CV Series - Very High Frequency (VHF) Power -- CV 1000
from Comdel, Inc.

Performance: Comdel CV series power supplies offer stable VHF power at frequencies from 30 to 80 MHz. The CV 1000 delivers 1000 watts of power. Configured within Comdel's standard control and monitoring package, the CV series offers exceptional ease of operation. RS-232 and analog controls are... [See More]

  • Form Factor: Rack Mount
  • DC Output Power: 1000
  • Applications: High Frequency, Semiconductor/Thin Film, Telecommunications, VHF Plasma, Laser, Induction Heating
  • Output Frequency: 30 to 80
CX Series - High Frequency RF Power -- CX 10K
from Comdel, Inc.

High Power Range of the CX Series Family of Products. Performance: The CX high frequency series is available in power ranges of 5000 and 10,000 Watts with fixed frequencies from 2 to 30 MHz, and frequency agile capability up to 10% bandwidth. The CX series provides precise, repeatable power control... [See More]

  • Form Factor: Rack Mount
  • DC Output Power: 10000
  • Applications: High Frequency, Instrumentation, Military, Semiconductor/Thin Film, Plastic Welding, Silicon Crystal Growing
  • Output Frequency: 2 to 30
CX Series - High Frequency RF Power -- CX 1250
from Comdel, Inc.

Proven Reliability in Plasma Vacuum Systems Worldwide. Performance: The CX series power supplies start at power ranges from 600 to 2500 Watts with fixed frequencies from 2 MHz to 30 MHz, and frequency agile capability up to 10% bandwidth. The solid-state design provides low cost of ownership with... [See More]

  • Form Factor: Rack Mount
  • DC Output Power: 1250
  • Applications: High Frequency, Semiconductor/Thin Film, Etch, Parallel Plate, RF Sputtering
  • Output Frequency: 2 to 30
CX Series - High Frequency RF Power -- CX 600/H
from Comdel, Inc.

Proven Reliability in Plasma Vacuum Systems Worldwide. Performance: The CX series power supplies start at power ranges from 600 to 2500 Watts with fixed frequencies from 2 MHz to 30 MHz, and frequency agile capability up to 10% bandwidth. The solid-state design provides low cost of ownership with... [See More]

  • Form Factor: Rack Mount
  • DC Output Power: 600
  • Applications: High Frequency, Semiconductor/Thin Film, Etch, Parallel Plate, RF Sputtering
  • Output Frequency: 2 to 30
Ultra Compact, 2kW, 60MHz RF Generator
from Comdel, Inc.

Performance: Part of our customized product line, this reliable, unique RF power supply can function effectively in a very small space while still delivering robust, reliable power. Its footprint is 4 ” x 4 ” x 12 ” and it is can be pulsed between multiple levels to 100 kHz. Custom... [See More]

  • Form Factor: Rack Mount
  • DC Output Power: 2000