Area Mapping Ion Milling Systems

Desktop Scanning Electron Microscope -- Phenom Pro
from Phenom-World BV

The Phenom Pro desktop SEM is one of the most advanced imaging models in the Phenom series. With its long-life high-brightness CeB6 electron source, the Phenom Pro creates state-of-the-art images with a minimum of user maintenance intervention. The backscattered-electron detector (BSED) and... [See More]

  • Applications: Wafer; CVD / PVD; Packaged IC or substrate
  • Mounting / Loading: Manual loading
  • Measurements: Composition; Defects, dimples or film residues; Critical dimensions or Trench geometry; Particle contamination; Area mapping
Desktop Scanning Electron Microscope -- Phenom ProX
from Phenom-World BV

The Phenom ProX desktop scanning electron microscope is the ultimate all-in-one imaging and X-ray analysis system. With the Phenom ProX desktop SEM, sample structures can be physically examined and their elemental composition determined. Viewing three-dimensional images of microscopic structures... [See More]

  • Applications: Wafer; CVD / PVD; Packaged IC or substrate
  • Mounting / Loading: Manual loading
  • Measurements: Composition; Defects, dimples or film residues; Critical dimensions or Trench geometry; Particle contamination; Area mapping
Desktop Scanning Electron Microscope -- Phenom Pure
from Phenom-World BV

The Phenom Pure desktop SEM (scanning electron microscope) is an ideal tool for making the transition from working with a light microscope to operating an electron microscope. The Phenom Pure is equipped with the basic fundamentals for meeting imaging needs. The Phenom Pure provides high-quality... [See More]

  • Applications: Wafer; CVD / PVD; Packaged IC or substrate
  • Mounting / Loading: Manual loading
  • Measurements: Composition; Defects, dimples or film residues; Critical dimensions or Trench geometry; Particle contamination; Area mapping