Quartz Vacuum Chambers

Description: Sapphire windows are used in Semiconductor process chambers as well as many other high vacuum applications. Process environments using aggressive chemistries such as NF3 and CF4 rapidly erode quartz windows with the quartz surface becoming cloudy. Extended exposure can

• Diameter, Square Side, or Rectangular Length: 300 mm
• Materials: Sapphire
• Thickness: 0.5000 to 12.7 mm
• Wavelength Range: 200 to 3500 nm

Description: alumina (Al2O3) and porous silicon carbide (SiC) ceramics specifically engineered for various types and sizes of vacuum chambers: Tube type (for load-lock, transfer, and process chambers) Disk type (for narrow space chambers) Quartz type (for thermal processing and

• Filter Media: Ceramic
• Industry Use: Other

Description: Ever since its introduction in 1989 ATV’s Single Process Chamber approach has built a strong reputation in the R&D and pilot line production market. The SRO-700 table top IR vacuum reflow oven is the essential entry level reflow soldering oven capable of fulfilling all your basic

• Configuration: Bench / Cabinet
• Temperature Range: 450 to 700 F

Description: install (by welding) the viewport into a new or existing vacuum chamber wall. The quartz windows are easily replaced if damaged by dis-assembling the flange set.

• Configuration: All Ports Same Type
• Fitting Connection / Port Type(s): Flange
• Flange OD: 4.47 to 9.97 inch
• Materials of Construction: Steel - Stainless

Description: Add-A-Doors provide a simple, effective method of providing an elastomer sealed access port to an existing chamber fitting or component. These products include a fused silica viewport hinged door and easily bolts to a like CF flange using standard hardware. The door itself is secured with a

• Features: Integral Window
• Fitting Connection / Port Type: Flange
• Flange and Fitting Seal / System: Conflat
• Flange OD: 4.5 to 10 inch

Description: Nor-Cal Products offers a complete line of viewports for vacuum chambers with NW, ISO and CF flanges. CF flanged viewports are available with fully annealed 7056 glass or fused quartz. Special materials and coatings, such as sapphire and anti-reflective (AR) coating, are

• Configuration: All Ports Same Type
• Fitting Connection / Port Type(s): Flange
• Flange and Fitting Seal / System: Conflat
• Flange OD: 2.75 to 10 inch

Description: surface tension or vacuum to the pressure plate. The pressure plate is designed to swivel up from the horizontal working position to just past vertical to facilitate work piece loading and unloading. The LLCD series is also offered in a dual faced configuration, processing both sides

• Coating System Type: Batch System (Single Chamber / Multiple Wafers), Continuous / Web System, Inline System (Semi-continuous)
• Features: Integral Process Controller?, Automated Loading?
• Materials Processed (Deposit or Substrate): Metal, Dielectric / Ceramic, Silicon, Oxides, Other
• Maximum Part Diameter / Width: 780 mm

Description: As in all Plasma Etch systems a capacitive parallel plate design is used for the most effective plasma generation. Competitive units with glass/quartz barrel chambers cannot penetrate the vacuum containment vessel and therefore are restricted to inductive coupling using an RF

• Applications & Materials Processed: Semiconductor Manufacturing, Photovoltaic / Solar, Medical, MEMS, Research / Surface Analysis, Other
• Coating System Type: Laboratory / Benchtop
• Integral Process Controller: Yes
• Materials Processed (Deposit or Substrate): Metal, Compound Semiconductors / GaAs, Tungsten / Refractory Metal, Other

Description: consists of four main subsystems: a vacuum chamber, a temperature control system, internal configuration, and a data acquisition system. A test procedure for collecting data and a test method for processing and presenting the collected data are included.

Description: can be delivered with vacuum pumping configurations to fit process or budgetary requirements. Process chambers are typically designed with turbo pumping packages, but cryo pump options are available. Downstream controls are standard for controlling pressure in the process