Help with Vacuum Flanges and Fittings specifications:
Vacuum Component Type
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Vacuum Component Type: | |||
Your choices are... | |||
Access Cap / Port Cover | Caps or covers are vacuum component that seal a port or distribution pipe of a vacuum chamber. | ||
Adapter | A fitting designed to connect different types of hose, tubing, or pipe together. The tubing may consist of utilize different systems- ISO, ASA, NPT, etc. | ||
Adapter - Ball Socket / Spherical Joint | Ball and socket joints are made with a ball and socket, an O-ring, and a clamp. These joints are used in the to the semiconductor industry for difficult curves or adjustable angular connections. The connections can be brazed or welded to components or manifolds. | ||
Adapter / Isolator - Ceramic-to-Metal | Ceramic to metal adapters or isolators are used to provide electrical insulation between components in high voltage, vacuum applications. | ||
Adapter - Glass-to-Metal | Ceramic to metal adapters are used to provide a transition between metal and glass component in a vacuum system. Glass adapters are available in a sealed off or open configuration. | ||
Coupling - Flexible / Expansion | Coupling with some amount of flexibility such as flexible metal hose section with flanged ends or bellows. | ||
Coupling - Union | Three-part fitting that connects two pieces of tube and allows for disconnection without cutting. | ||
Cross - 4-Way | Fitting with four connection ports, typically in the shape of a cross. | ||
Cross - 5-Way | Fitting with five connection ports, typically in the shape of a modified cross. | ||
Cross - Cube / 6-Way | Fitting with six connection ports, typically in the shape of a child's jack or in the shape of a cube. | ||
Flange | Flanges are flat fittings that form a connection by aligning and pulling two vacuum tube sections or components together against an o-ring or metal gasket sealing element. | ||
Flange Assembly |
A flange assembly consists of:
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Flange Clamp | Flange clamps are used to hold the flange assembly together forming a tight seal between the gaskets and flanges. Many different types of flange clamps are available such as double claw clamps, single claw clamps, band or lever clamps, chain clamps, and bulkhead clamps. | ||
Flange Centering Ring | Sleeve-type fitting that slips over two ends to join them; ferrules can be compressible and used as the sealing component of a compression fitting. They are also used as weldable connection fittings. | ||
Flange - Bulkhead | Fitting designed to be mounted in a wall or bulkhead and to allow tube connection on either side of the wall or barrier. | ||
Elbow - 45° | Elbow configured for a 45° change in direction. | ||
Elbow - 90° | Allows for a 90° change in direction, frequently includes a curve or radius. Elbows are also called "Ells". | ||
End Cap / Plug | Designed to attach on over the outside of a tube end to dead-end the flow. Attachment techniques include welding, brazing, adhesives, flange and threads, depending on application and material. | ||
Nipple - Full | Nipples are rigid fittings designed to join two pieces of tubing or pipe. Nipples are available in various configurations reducing-straight, reducing-conical, half and full. | ||
Nipple - Half | Fitting with different size ends to mate hose or tubing of different diameter. Concentric reducers join tube sections on the same axis. | ||
Return / "U" - 180o | Most commonly in a 180° "U" shape. These fittings can be used to reverse tube flow direction or combined as a trap for gas or odors. | ||
Stub | Stubs have a flanged end with an extended section or stub for attachment by welding, brazing or with a threaded fitting. | ||
Tee | Three-port fitting in the shape of a "T". Standard configuration ("Equal") indicates that the straight-through path (typically called the "run") and the perpendicular section ("branch") all have the same size ports. | ||
Viewport | Components for viewing or optically sensing samples or process devices in a vacuum chamber or system. | ||
Other | Any unlisted vacuum component, flange or fitting type. | ||
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Blank / Blanking-off? | Fittings, flanges or stubs provided in the form of a solid blank. Blanks can be machined to form a customized fitting. Blanks are also used to blank-off the end of a section of tube or cap a port on a chamber. | ||
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Flange System / Fitting Port Type
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Configuration: | |||
Your choices are... | |||
All Ports Same Type | All fitting ports are of the same style. Note: this includes reducers that change in size but have consistent port type, e.g. 1/4" x 1/4" x 3/8" Male NPT Tee. | ||
Multiple Port Type / Adapter | Fitting has ports of different styles, as in male and female threads, different thread types, push-on-to-barb adapter, etc. | ||
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Flange and Fitting Seal / System: | |||
Your choices are... | |||
Metal Seal (Wire / Copper Gasket) | A flange or fitting type using a metal seal such as a copper gasket. Metal seals are suitable for extremely high vacuum levels since they do not contain volatile compounds. Examples of flanges or fittings using an all-metal seal are ISO-CF (copper ring seal), VSRTM (Swagelok fitting) or wire sealed flanges. | ||
Elastomeric Face Seal / O-ring | A flange or fitting type using an elastomeric face seal such as an o-ring or gasket. Elastomeric seals are not typically suitable for extremely high vacuum levels due to outgassing of volatile compounds from the seal. O-ring seals can be useful where movement of the joint is required. Face seals typically incorporate o-rings that mate against the face of the opposite connector to form a seal. Depending on the standard, the o-ring may be on the nose of the male threaded connector, or behind the male thread on the face of the backing nut. | ||
ISO-BF (Bolted) | A bolted flange connection. ISO-BF is a bolted flange connection with interface dimensions made to ISO (International Standards Organizations) specifications. The bolts in the flange pull the flanged ends together and forming a seal between the central o-ring and flange faces. The o-ring is held in place by a central retainer or center ring. ConflatTM connections are a proprietary bolted connection of Varian Associates. | ||
ISO-CF (Metal Seal) | Flange connection using an all-metal copper ring seal. The connection uses knife edged flanges with a raised nib or edge that digs into a central copper ring forming a seal suitable for high vacuum. ISO-CF is a copper seal flange connection with interface dimensions made to ISO (International Standards Organizations) specifications. OFHC copper is typically used, although other soft, low vapor pressure metals can be substituted. | ||
ISO-KF / ISO-QF (Small Clamped, <2") | ISO-KF, ISO-QF (quick flange), ISO-Pneurop and ISO-NW are designations for a small, clamped connection with interface dimensions made to ISO (International Standards Organizations) specifications. ISO-KF connections are less than 2" in diameter. The clamp or clamping ring fits around the joint pulling the flanged ends together and forming a seal between the central o-ring and flange faces. The o-ring is held in place by a central retainer or center ring. KF is a German acronym for Kleinflansch or small flange. | ||
ISO-LF (Large Flange) | The ISO-MF or ISO-Universal flanging system is a bolted or clamped connection with interface dimensions made to ISO (International Standards Organizations) specifications. The single or double claw clamps or band clamps pull the flanged ends together and forming a seal between the central o-ring and flange faces. The o-ring is held in place by a central retainer or center ring. The single claw clamp is used to connect join an MF flange to a BF or bolted flange. ISO-Pneurop, ISO-PF, ISO-LF and ISO-K are also designations used for the ISO Universal flanges. | ||
ISO-MF (Multi-fastener / Universal) | The ISO-MF or ISO-Universal flanging system is a bolted or clamped connection with interface dimensions made to ISO (International Standards Organizations) specifications. The single or double claw clamps or band clamps pull the flanged ends together and forming a seal between the central o-ring and flange faces. The o-ring is held in place by a central retainer or center ring. The single claw clamp is used to connect join an MF flange to a BF or bolted flange. ISO-Pneurop, ISO-PF, ISO-LF and ISO-K are also designations used for the ISO Universal flanges. | ||
ANSI ASA | ANSI ASA is a bolted flange connection with interface dimensions made to ANSI (American National Standards Institute) specifications. The bolts in the flange pull the flanged ends together and forming a seal between the o-ring and flange faces. ASA flanges are used in pairs with one smooth, flat faced flange and flange with a groove face for retaining the o-ring. | ||
VCRTM / VCOTM |
VCO![]() ![]() ![]() ![]() | ||
Conflat![]() |
Conflat![]() | ||
Tri-SealTM | Tri-SealTM connections are a proprietary bolted connection of A&N Corporation. Tri-SealTM connections have a unique flange system which functions like ISO-KF but accommodates metal gaskets for ultra-high vacuum applications. The bolts in the flange pull the flanged ends together and forming a seal between the central copper or elastomeric gasket and the flange faces. The o-ring is held in place by a central retainer or center ring. Tri-Seal flanges with copper gaskets can provide leak tightness down to 10-13 torr or up to 300 psi. Tri-Seal flanges with elastomeric seals can provide leak tightness down to 10-9 std. cc/ sec or up to 300 psi. | ||
Del-SealTM |
Del-Seal connections are a proprietary bolted connection of MDC Vacuum Products Corporation. The bolts in the flange pull the flanged ends together and forming a seal between the central metal gasket and flange faces. Pyraflat flanges with copper gaskets can provide leak tightness to 10-13 torr at temperature up to 450°C. Del-Seal flanges are compatible with Conflat![]() | ||
PyraflatTM | PyraflatTM connections are a proprietary bolted connection of Thermionics Laboratory, Inc. PyraflatTM connections provide a ConflatTM-like seal in rectangular, triangular, trapezoidal or irregular shaped flanges. The bolts in the flange pull the flanged ends together and forming a seal between the central copper or elastomeric gasket and the flange faces. The o-ring is held in place by a central retainer or center ring. Pyraflat flanges with copper gaskets can provide leak tightness to 10-13 torr at temperature from -196°C to 500°C. | ||
RL | RL fittings are a specialized fitting type developed by the Lawrence Radiation Laboratory in the 1940's. | ||
NPT Male | One or more male NPT thread ports. | ||
NPT Female | One or more female NPT thread ports. | ||
Other | Other flange or fitting type not listed such as SwagelokTM. | ||
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Fitting Connection / Port Type(s): | |||
Your choices are... | |||
Compression Fitting | Connects to mating tubing or hose with a compression fitting, typically involving a compression nut and ferrule. | ||
Hose Barb / Rib | Fitting end has barbs or ridges; includes both single and multiple barb types. Some configurations may be for manually pushing on over the barb, or sometimes for use with a clamp over the tube or hose end. | ||
Quick Disconnect | A quick-disconnects fitting provides a fast and convenient method for coupling and uncoupling metal and glass tubing to a vacuum system. Quick-disconnects use an internal o-ring that is compressed against a tube to form a seal. Quick-disconnects fittings can be welded, brazed, or soldered to flanges, manifolds, chambers, and other vacuum components. Ion gauges, thermocouple gauges, special test ports, and feedthroughs can be quickly mounted to a vacuum system with these fittings. | ||
Threaded | A fitting type using male and female threaded pipe, tubing or fittings such as NPT, NPTF or BSPT fittings. Threaded metal connection are not suitable for high vacuum levels since the small spaces between the threads and blind holes can cause virtual leaks and they joint may contain volatile compounds or elastomeric sealants. Threaded connections with venting slot and TeflonTM tape seal may be suitable down to 10-6 torr at low temperatures (bakeout <260oC). For very high vacuum (10-9 torr), a clamped or bolted connection with a metal seal should be chosen. NPT is the designation for American Standard Taper Pipe Threads for General Use. NPTF stands for Dryseal American Standard Taper Pipe Threads. | ||
Tube - Flare / Fitting | Flare end for tube fitting or other specialized fitting for small tubing. Flares are typically designed to mate with a connection nut or ferrule with complementary geometry. | ||
Other | Other unlisted, specialized or proprietary port type. | ||
Flange | One or more flange-mount ports. | ||
Weld / Braze Stub | Fitting designed for connection by a welding or brazing process. | ||
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Flange Size Specifications
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ISO Nominal Size: | Nominal bore size. | ||
Your choices are... | |||
NW 10 | ISO or NW 10 defines a standardized flange geometry (12 mm face seat ID, 30 mm OD) for vacuum components so that elbows, tees, crosses and valves of a given size are compatible and can be interchanged in a system. NW 10 is used in the smaller clamped flange components and some manufacturers will list their products as QF10, KF10 or ISO 10. | ||
NW 16 | ISO or NW 16 defines a standardized flange geometry (17 mm face seat ID, 30 mm OD) for vacuum components so that elbows, tees, crosses and valves of a given size are compatible and can be interchanged in a system. NW 16 is used in the smaller clamped flange components and some manufacturers will list their products as QF16, KF16 or ISO 16. | ||
NW 20 | ISO or NW 20 defines a standardized flange geometry for vacuum components so that elbows, tees, crosses and valves of a given size are compatible and can be interchanged in a system. NW 20 is used in the smaller clamped flange components and some manufacturers will list their products as QF20, KF20 or ISO 20. | ||
NW 25 | ISO or NW 25 defines a standardized flange geometry (26 mm face seat ID, 40 mm OD) for vacuum components so that elbows, tees, crosses and valves of a given size are compatible and can be interchanged in a system. NW 25 is used in the smaller clamped flange components and some manufacturers will list their products as QF25, KF25 or ISO 25. | ||
NW 32 | ISO or NW 32 defines a standardized flange geometry for vacuum components so that elbows, tees, crosses and valves of a given size are compatible and can be interchanged in a system. NW 32 is used in the smaller clamped flange components and some manufacturers will list their products as QF32, KF32 or ISO 32. | ||
NW 40 | ISO or NW 40 defines a standardized flange geometry (41 mm face seat ID, 55 mm OD) for vacuum components so that elbows, tees, crosses and valves of a given size are compatible and can be interchanged in a system. NW 40 is used in the smaller clamped flange components and some manufacturers will list their products as QF40, KF40 or ISO 40. | ||
NW 50 | ISO or NW 50 defines a standardized flange geometry (41 mm face seat ID, 55 mm OD) for vacuum components so that elbows, tees, crosses and valves of a given size are compatible and can be interchanged in a system. NW 50 is used in the smaller clamped flange components and some manufacturers will list their products as QF50, KF50 or ISO 50. | ||
NW 63 | Nominal flange bore size (or for tube ODs) of 63 mm or 2.5". | ||
NW 80 | Nominal flange bore size (or for tube ODs) of 80 mm or 3". | ||
NW 100 | Nominal flange bore size (or for tube ODs) of 100 mm or 4". | ||
NW 120 | Nominal flange bore size (or for tube ODs) of 120 mm or 4.75". | ||
NW 160 | Nominal flange bore size (or for tube ODs) of 160 mm or 6". | ||
NW 200 | Nominal flange bore size (or for tube ODs) of 200 mm or 8". | ||
NW 250 | Nominal flange bore size (or for tube ODs) of 250 mm or 10". | ||
NW 320 | Nominal flange bore size (or for tube ODs) of 320 mm or 14". | ||
NW 400 | Nominal flange bore size (or for tube ODs) of 400 mm or 16". | ||
NW 500 | Nominal flange bore size (or for tube ODs) of 500 mm or 20". | ||
NW 630 | Nominal flange bore size (or for tube ODs) of 630 mm or 24". | ||
NW 800 | Nominal flange bore size (or for tube ODs) of 800 mm or 32". | ||
NW 1000 | Nominal flange bore size (or for tube ODs) of 1000 mm or 40". | ||
Other | |||
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Flange OD: | The outer diameter of the flange or flanged fitting. | ||
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Flange Bore / ID: | The bore or inner diameter of the flange or flanged fitting. Typically, the flange bore is similar in size to the tube OD. | ||
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Ratings & Features
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Vacuum / Pressure Range: | |||
Your choices are... | |||
Rough / Low (< 760, > 1 torr) | Vacuum components suitable for use under low vacuum (less than 760 torr and greater than 1 torr). Low or rough vacuum components are suitable for use on chambers or systems for outgassing organic / biological samples, vacuum drying and certain welding and processing applications. | ||
Medium (< 1, >10-3 torr) | Vacuum components suitable for use under medium vacuum (less than 1 torr and greater than 10-3 torr). Medium vacuum components are used on chambers and system for certain welding and processing applications. | ||
High Vacuum (< 10-3, >10-8 torr) | Vacuum components suitable for use under high vacuum (less than 10-3 torr and greater than 10-8 torr). High vacuum components may require heating to bakeout surface contamination. | ||
Ultra-high Vacuum (< 10-8 torr) | Vacuum components suitable for use under ultra-high vacuum (less than 10-8 torr). UHV vacuum components typically require heating to bakeout surface contamination. | ||
Elevated Pressures (> 760 torr) | Vacuum components suitable for processing or analysis with gases or internal atmospheres at positive pressures or above atmospheric pressure. Some vacuum valves require a special over pressure rings to enable elevated pressure use. | ||
Other | Other vacuum or pressure level range not listed. | ||
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Operating / Bake-out Temperature: | The maximum operating or bake-out temperature that the fitting, flange or vacuum component can be exposed to. | ||
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Features: | |||
Your choices are... | |||
Non-magnetic | Vacuum component constructed from non-magnetic materials for applications where magnetic fields are employed to guide electron and ion beams or focus plasma. | ||
Polished / Electro-polished | The internal surfaces of the chamber have been polished or electro-polished to a mirror or high surface finish level. | ||
Integral Window | Door or access cap with an integral window to allow viewing, spectroscopy or optical measurement of internal processes. | ||
Low Profile | Low profile viewports have a window that protrudes only slightly above the supporting metal collar or flange. Low profile viewports typically have the smaller overall height compared to tophat viewports. | ||
Mitered / High Conductance | Mitered vacuum fittings such as elbows or tees with a bend formed by series of abrupt angled transitions resulting in a higher conductance compared to a continuously transitioning radius. Conductance is the gas flow per sec per unit of pressure differential. Obstructions or restrictions interfere with molecular gas flow and reduce conductance. | ||
Reducing | A fitting with different size ends to mate tubes or pipes of different diameters. | ||
Rotatable | Feature allowing one or more fitting ends to rotate or swivel. | ||
Square / Custom Shape | Flange, fitting, door or viewport fabricated with a square, rectangular or custom shape. | ||
Zero Profile | Zero profile viewports have a window that is recessed or flush with the supporting metal collar or flange. Zero profile viewports typically have the shallowest overall height. | ||
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Materials of Construction: | |||
Your choices are... | |||
Ceramic | Industrial ceramic materials consist of oxides, carbides, nitrides, carbon and other non-metals with high melting points. | ||
Copper | A common reddish metallic element that is ductile and malleable and is one of the best conductors of heat and electricity; copper tube and fittings are frequently used in plumbing applications. | ||
Glass | Glass is an amorphous solid usually based on pure fused silica or a modified silicate such as borosilicate or aluminosilicate. | ||
Steel - Carbon & Alloy | Generic classification for general purpose carbon steel, mild steel or steel alloys containing additions of chrome, nickel, molybdenum, vanadium or other elements to alter hardenability characteristics, toughness, hardness, corrosion resistance, and/or strength. "Black pipe" is typically made of carbon steel. | ||
Steel - Stainless | Stainless steel is chemical and corrosion resistant and can have relatively high pressure ratings; this selection includes all grades of stainless steel. | ||
Plastic / PVC | Includes all grades of thermoplastic materials, such as ABS, nylon, fluoropolymer, etc. | ||
Other | Any unlisted, proprietary or specialized material. | ||
Aluminum | A bluish silver-white malleable ductile light trivalent metallic element that has good electrical and thermal conductivity, high reflectivity, and resistance to oxidation. | ||
Brass / Bronze | Brass is an alloy of copper and zinc often with additional elements such as lead or tin; it is characterized by good strength, excellent high temperature ductility and reasonable cold ductility, good conductivity, excellent corrosion resistance, good bearing properties and low magnetic permeability. Bronze is an alloy of copper with other elements such as aluminum, silicon or tin (aluminum bronze, silicon bronze, tin bronze, etc.) | ||
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