7.1 Introduction

In the previous chapters, we have discussed various routes for the synthesis and fabrication of a variety of nanomaterials; however, the synthesis routes applied have been focused mainly on the chemical methods approaches. In this chapter, we will discuss a different approach: fabrication of nanoscale structures with various physical techniques. Compared to the general chemical fabrication and processing methods, physical fabrication techniques for producing nanostructures are derived mainly from the techniques applied for the fabrication of microstructures in semiconductor industry. Particularly the hndamentals and basic approaches are mostly based on microfabrications. In this chapter, the following techniques for the fabrication of nanostructures and nanopatterns are discussed:

1. Lithographic techniques

   1. Photolithography

   2. Phase shifting optical lithography

   3. Electron beam lithography

   4. X-ray lithography

   5. Focused ion beam lithography

   6. Neutral atomic beam lithography

2. Nanomanipulation and nanolithography

   1. Scanning tunneling microscopy (STM)

   2. Atomic force microscopy (AFM)

   3. Near-field scanning optical microscopy (NSOM)

   4. Nanomanipulation

   5. Nanolithography

3. Soft lithography

   1. Microcontact printing

   2. Molding

   3. Nanoimprint

   4. Dip-pen nanolithography

4. Self-assembly of nanoparticles or nanowires

   1. Capillary force induced assembly

   2. Dispersion interaction assisted assembly

   3. Shear force assisted assembly

   4. Electric-field assisted assembly

   5. Covalently linked assembly

   6. Gravitational field assisted assembly

   7. Template assisted assembly

5. Other methods for microfabrication

   1. LIGA

   2. Laser direct writing

   3. Excimer laser micromachining

Although all the above-mentioned processes are discussed in this chapter, not all methods have the same capability in fabricating nanoscaled structures. In addition, the fundamentals of various fabrication processes differ significantly from each other. Each method offers some advantages over other techniques, but suffers from other limitations and drawbacks. No attempt has been made to...