TABLE OF CONTENTS This chapter concentrates on micropumps (MPs) and microfluidics, and their applications involving microelectromechanical systems (MEMS) as well as nanotechnology (NT). Microfluidics is an important branch of MEMS technology involving potential applications in chemical detection, microbiology, biological detection, clinical analysis, pressure transducers, microfluidic-integrated circuits, self-contained microfluidic system. Active research and development activities have and heat transfer in microelectronic devices. An MP is the critical component of a been targeted toward the design of MPs for various applications. Most MP designs, such as floating-wall check valves or cantilever-beam flapper-valves known as pneumatic valves, are passive. MPs using fixed valves or having no moving parts can be fabricated with minimum cost and complexity and are highly reliable due to their simplicity. Fixed valves have no ability to close and therefore, MPs with fixed valves need to operate in resonant modes to achieve flow rates and pressure compared to other pump designs. Optimum resonant response requires specific design parameters, which are possible with a low-order linear model capable of predicting the resonant behavior. In addition, an independent determination of the optimum valve shape can be achieved for maximum valve action over a specific Reynolds number range. A linear model will be able to identify all design parameters for the valves. This model shall be capable of making reliable investigation and optimization of several geometrical and material models, such as the electrical-equivalent model and the fixed-valve low-order model.
Potential applications of various MPs can be summarized as...
