MEMS and Nanotechnology-Based Sensors and Devices for Communications, Medical and Aerospace Applications

Chapter 9: Materials for MEMS and Nanotechnology-Based Sensors and Devices

9.1 Introduction

This chapter identifies potential materials and their important properties best suited for the design and development of nanotechnology (NT) sensors and devices, photonic components, and for a new generation of microelectromechanical systems (MEMS) devices. In addition, properties and applications of smart materials are summarized with emphasis on their unique capabilities, which will accelerate the design and development of macro-NT-based sensors critical in monitoring weapon health and battlefield environment. Carbon nanotube (CNT) arrays represent a new class of NT material with multifunctional capabilities and their potential applications are identified. The CNT arrays are best suited for a variety of military, aerospace, and commercial applications in high-efficiency photovoltaic cells. Potential applications of CNT/polymer arrays are investigated in the design of high-current density field emitters, flat displays with high resolution capability, and carbon MEMS electrodes for lithium (Li)-ion microbatteries (MBs). Electrodes made from CNT technology offer high aspect ratio leading to significant increase in surface areas. In addition, the CNTs are best suited for electrode applications in MBs. Potential applications of photonic crystals are also identified. Applications of quantum dots dye-doped silica nanoparticles are discussed with emphasis on commercial and military sensors. Cadmium selenium (CdSe) and zinc selenium (ZnSe) nanocrystals are investigated for potential applications in LEDs and nanolasers. Fluorescent nanoparticles capable of yielding high-resolution images superior to those obtained using current magnetic resonance imaging (MRI) and computerized tomography (CT) technologies are evaluated for cancer imaging [1]. These nanoparticles are most suitable for conducting clinical studies of molecular dynamics...

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