Smart Mems and Sensor Systems

Chapter 6: Case Study Adaptive Optics and Smart VLSI/MEMS Systems

Davies William

Lima Monteiro

This chapter presents the desired characteristics, the operational principles, the capabilities and the limitations of a number of adaptive optical components and systems implemented in the framework of standard silicon technologies. It will be shown how to build reliable smart silicon-based systems with devices based on simple concepts and coupled by means of straightforward control algorithms.

6.1 Introduction

Applications such as turbulence-free astronomical imaging, enhanced human vision, sharp in vivo retinal imaging, quality inspection of automotive parts and reliable free-space optical communications can benefit from the capabilities of Adaptive Optics (AO), which is a relatively novel technology aimed at dynamically sensing and correcting the phase profile of light beams. In order to suit AO systems to the low-cost and high-speed demands common in the industrial and medical scenarios, MEMS devices and VLSI sensor systems are inescapable.

The first AO systems were conceived in order to counteract aberrations introduced by the turbulent atmosphere in astronomical observatories and military systems. The purpose was to compensate dynamic image distortions caused by fast moving atmospheric layers. Over the years, several techniques have been devised for the detection of distortions of phase profiles [*] [1, 2], and devices have been implemented to correct aberrations in real time [3].

AO systems are always used as a complementary part of a more general optical system and a reasonable rule of thumb states that they should at least double the system efficiency, without consuming more than one fourth of the overall system...

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