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VULCANO XYZ3TH motion system - a three-piece-design allowing a compact and cost engineered solution, coupled to mechanical bearings and high-end optical encoders. This platform can easily be coupled with a rotary module RTTB or the brand new Z3TH combined module. This latter provides a Tip and Tilt correction, a double Z-axes, 364° Theta rotation and 4 degrees of freedom.
CHARON2 design extends CHARON use cases into the space of higher dynamics and larger payloads, with further improvement on accuracy and repeatability. Exceeding 1g acceleration and 1 m/s speed at doubled payload, while delivering an absolute positioning accuracy below 1 µm, CHARON2 represents a turnkey motion solution for state of the art new semiconductor applications and lifetime extension initiatives.
Use of ETEL renowned iron-core motors, along with innovative design principles, allows reaching high dynamics at much improved geometrical and motion performance levels. With focus on easing semiconductor applications, the platform remains a match to all diverse markets and needs requiring solutions for higher dynamics; in fact even its best in class footprint excels to maximize its overall Cost of Ownership value proposition. Customers, aiming to reach higher throughput, duty cycles or to serve heavier payloads with no loss of repeatability or of accuracy, can confidently adopt a standard VULCANO2 or a derived customized solution.