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Innovative RLE10 and RLE20 fiber-optic laser encoders convert the laser interferometer from a complex scientific instrument into a simple production solution to ultra-precise process control, enabling picometer resolution, differential measurement, and part-per-billion laser frequency stability. Key to this transformation is the use of fiberoptics to deliver the laser light directly to the measurement axes, eliminating requirements for multiple remote beam splitters, benders and adjustable mounts. The innovative design provides ease of installation comparable to traditional tape- and glass-based encoders, reducing laser alignment to a simple "bolt down and dial-in" process. All RLE laser systems provide positional output signals in differential digital RS422 and/or 1 Vpp sine/cosine formats.

The RLE20 interferometer system provides sub-nanometer non-linearity and resolution capability of 38 picometers, making fiberoptic launch a solution for precision motion system manufacturers and semiconductor equipment OEMs to ever-tightening requirements for wafer inspection, lithography and other yield enhancement tools. A 3 m fiberoptic cable allows the laser unit to be located remotely from the detector head, optimizing application flexibility and minimizing footprint in tight work zones. A new RP120 parallel interface provides resolutions of 0.39 nanometers and 40 picometers respectively. The interface interpolates sinusoidal inputs by a factor of 4096 and produces 36-bit parallel position output data. Used with a double pass interferometers (optical resolution of 158 nm), the RP120 can produce output resolutions down to 38 picomaters at velocities up to 1 m/sec., overcoming the velocity restrictions and bandwidth limitations with conventional methods.

The RLE10 laser interferometer encoder can be applied to axis lengths of up to four meters and configured for laser beam delivery to two axes from a single laser source. Applications include machine tools, coordinate measuring machines, semi-conductor and flat panel display manufacturing equipment, fiber-optic alignment machines, precision gauges, X-Y stages, glass grinding machines, and other precision motion systems. Resolutions to 10nm are available via the real time digital quadrature outputs, with nanometer levels obtainable via external interpolation of the analog signals. Used in combination with an optional real-time compensation system, positional accuracy levels of 1 ppm (1µm/m) can be achieved over a wide range of environmental conditions.

RLE units can be configured for either linear or planar applications. Fiberoptic beam delivery provides key advantages over other laser systems:

• Significantly reduces optical path complexity, simplifying alignment and installation.
• Remote location of laser saves work area space and keeps the heat from the laser away from the measurement axis for reduced thermal drift.
• Eliminates need for beam benders and associated complex beam paths, resulting in minimal installed footprint.