Products/Services for MEMS Torque Sensor
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Torque Sensors - (200 companies)Torque sensors and torque instruments are used to measure torque in a variety of applications. Torque sensors are categorized into two main types, reaction and rotary. Reaction torque sensors measure static and dynamic torque with a stationary...Temperature CompensationTorque Sensor TypeTechnology -
Tilt Sensors - (154 companies)They are generally force balance sensors, solid-state MEMS device, or fluid-filled sensor. Each type is described below. Selection Criteria. The GlobalSpec SpecSearch database allows industrial buyers to search for tilt sensors by type of senor, type... -
Sensor Chips - (302 companies)Description. Sensor chips are dies incorporating semiconductor circuit elements that are used to convert changes to some physical parameter to an electrical signal. Like other semiconductors, a sensor chip can be flexible, and can be manufactured... -
Force and Load Sensors - (562 companies)Force and load sensors covers electrical sensing devices used to measure tension, compression, and shear forces. How to Select Force and Load Sensors. Image Credit: ABB Measurement Products. Force and load sensors are electrical sensing devices... -
Load Cells - (403 companies)Load cells are force sensors that often incorporate mechanical packaging to fit into testing and monitoring systems. They can be used for tension, compression, and/or shear measurement, and can be configured to measure force or load along one... -
Gyroscopes - (79 companies)...nearly-frictionless bearings which isolate the central disc from outside torque. When the gyroscope is spun on its axis at high speeds it resists movements in certain directions and demonstrates extraordinary stability of balance as seen in the video below...
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Gears - (647 companies)Gears are rotating mechanical devices employing 'teeth' in order to transmit torque between separate axes. Two or more cooperating gears are called a transmission and can produce a mechanical advantage by changing speed, torque or rotation direction...
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Motion Reference Units (MRU) - (15 companies)...of reference or another body. To control this data output, referred to as attitude, MRUs integrate sensors for orientation measurements, as well as actuators for applying torque to position an object to the desired attitude. Algorithms supply...
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Six-axis Force and Torque Sensors - (16 companies)Six-axis force and torque sensors measure the full six components of force and torque: vertical, lateral, and longitudinal forces as well as camber, steer, and torque movements. Six-axis force and torque sensors provide electrical outputs as analog...
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Strain Gauges - (123 companies)...elastic sensor whose resistance is a function of applied strain (unit deformation). Many types of strain gauges depend on the electrical resistance to strain. These types include: piezoresistive or semiconductor, carbon-resistive, bonded metallic wire...
Product News
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Tronics Microsystems
High performance MEMS inertial sensors Tronics is the only provider of both closed-loop MEMS Accelerometers and Gyros, taking MEMS inertial sensors to an unrivalled level of performance. Closed-loop electronics, also called force-feedback, brings several key advantages to inertial sensors, including superior linearity, increased signal to noise ratio and improved behavior under harsh vibrations, shocks and temperature environments. Over the last 15 years, Tronics has produced more than 1 million high performance MEMS inertial... (read more)Browse Inertial Measurement Units (IMU) Datasheets for Tronics Microsystems -
Tronics Microsystems
MEMS inertial sensors for UAV & VTOL A new generation of digital MEMS inertial sensors designed for AHRS and flight control to unlock precise navigation in new air mobility systems like VTOL and UAV. High-performance MEMS inertial sensors are an affordable and low-SWaP replacement for large and expensive quartz accelerometers and FOG gyros. They significantly demonstrate excellent performances under severe temperature and vibrations conditions at a fraction of their size, weight, and power consumption. To optimize the UAV's... (read more)Browse Accelerometers Datasheets for Tronics Microsystems -
All Sensors Corp.
Understanding Accuracy For MEMS Pressure Sensors All Sensors Pressure Points are application tips to simplify designing with microelectromechanical (MEMS) pressure sensors and avoiding common pitfalls. In most applications, accuracy is one of the more critical specifications that a product needs to meet. However, accuracy is also one of the more, if not the most, confusing parameter for any product including MEMS pressure sensors. This application tip provides system designers with insight to deal with the numerous sources of confusion... (read more) -
Dytran by HBK
Technical Article: VC MEMS Sensors This technical article provides an overview of variable capacitance (VC) accelerometers utilizing Micro-Electro-Mechanical Systems (MEMS) technology. It focuses on the design parameters that enable these sensors to perform reliably in harsh test environments and compares their performance to that of piezoelectric and piezoresistive sensors. The article also reviews various types of VC MEMS accelerometers, including 6 Degrees of Freedom (6DoF), uniaxial, and triaxial models. These sensors... (read more)Browse Accelerometers Datasheets for Dytran by HBK -
Dytran by HBK
Variable Capacitance MEMS Sensors Brochure Dytran VC MEMS accelerometers offer exceptional measurement accuracy and robust packaging for reliable operation in harsh environments. Sensor offerings include single-axis a triaxial configurations in true differential mode as well as innovative 6DoF configurations in single-ended mode. Our sensors are used in dynamic applications including flight testing, transportation environment replication/simulation, modal structural analysis, ride quality, road load, tilt, and inclination measurements... (read more)Browse Accelerometers Datasheets for Dytran by HBK -
Silicon Designs, Inc.
Enhanced temperature performance MEMS Sensor The Model 1522 is an industrial-grade surface mount MEMS DC accelerometer with enhanced temperature performance and a low-cost design. Like the SDI Model 1521, it is designed for use between -55 C and +125 C, however, the Model 1522 has only half the bias and scale-factor temperature coefficients of the Model 1521. Each nitrogen-damped, hermetically sealed Model 1522 accelerometer undergoes individual temperature testing, programming, calibration, and verification within a climate chamber... (read more)Browse Sensor Chips Datasheets for Silicon Designs, Inc. -
Transducer Techniques, LLC
TRS Series Torque Sensor The TRS Series reaction torque sensors offer long term reliability due to non moving parts and state of the art bonded foil strain gages. The anodized aluminum TRS Series is also available as a two axis sensor, torque and thrust, on special request. Whenever possible, the best approach for precision torque measurements isvia reaction torque sensing, eliminating high maintenance and high cost of slip rings, bearings, and brushes. (read more)Browse Torque Sensors Datasheets for Transducer Techniques, LLC -
Mark-10 Corporation
Interchangeable Remote Force and Torque sensors The Plug & Test (R) family includes a series of interchangeable indicators and remote force and torque sensors. Indicators are sensors are sold separately. Mark-10 indicators feature graphic displays, blazing fast sampling rates, and a host of other features. For special applications, customer-supplied sensors can be easily field-adapted to our indicators via the uniquely flexible PTA configurable adapter. (read more)Browse Torque Sensors Datasheets for Mark-10 Corporation -
S. Himmelstein & Company
Reaction torque sensors with ultimate accuracy is twice the rated torque. Additional strengths are: Combined error of +/- 0.05%. Straightforward installation, in less axial length than needed for a rotary torque sensor. Simple mounting -- no keyed shafts or couplings. Durable -- little-to-no maintenance required. No bearings or speed limits. Typical Applications: Torque measurement via reaction torque sensor is widely used in process control and testing. It can yield valuable information about how a process is running and enable torque control... (read more)Browse Torque Sensors Datasheets for S. Himmelstein & Company -
S. Himmelstein & Company
SOFTWARE DOWNLOADS-Torque Sensors&Instrumentation BLT Interface Software (v1.554) for MCRT (R) 81008V/84000V/84700V/85000V/86000V/87000V/88700V Bearingless Digital Torque Transducers DOWNLOAD RESOURCE NGT, Interface Software (v1.158) for MCRT (R) 48800V/49800V/59800V/79800V Series Ultra Precision Digital Torque Transducers DOWNLOAD RESOURCE DT482 Interface Software (v3.346) for MCRT 48200V Compact Digital Torque Transducers DOWNLOAD RESOURCE NGRTM, Interface Software (v1.50) for Digital Reaction Torque Sensors, CF2800V, RTM2270V, RTM2280V... (read more)Browse Torque Sensors Datasheets for S. Himmelstein & Company
More Information
Indicates content that may require registration and/or purchase.
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A Six-Axis MEMS Force–Torque Sensor With Micro-Newton and Nano-Newtonmeter Resolution
A piezoresisitve MEMS torque sensor has been presented in [15].
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Design and calibration of a microfabricated 6-axis force-torque sensor for microrobotic applications
A piezoresisitve MEMS torque sensor has been described in [12].
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Six-axis force–torque sensor with a large range for biomechanical applications
[18] Handwerker J, Gieschke P, Baumann M and Paul O 2012 CMOS integrated silicon/glass-bonded 3D force/ torque sensor MEMS ’12: 25th IEEE Int. Conf. on Micro Electro Mechanical Systems (Paris, France) pp 136–9 [19] ATI Industrial Automation F/T Sensor: Nano17 1999 …
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A Review of Haptic Feedback Teleoperation Systems for Micromanipulation and Microassembly
[28] F. Beyeler, S. Muntwyler, and B. J. Nelson, “A six-axis MEMS force torque sensor with micro-newton and nano-newtonmeter resolution,” J. Microelectromech.
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Design and calibration of a MEMS sensor for measuring the force and torque acting on a magnetic microrobot
This paper presents the design of a multi-axis capacitive MEMS force– torque sensor that provides micro-Newton scale force measurements and nano-Newton-meter torque measurements for characterizing a microrobot propelled by externally applied magnetic fields and field gradients.
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2009 Index Journal of Microelectromechanical Systems Vol. 18
A Six-Axis MEMS Force– Torque Sensor With Micro-Newton and Nano-Newtonmeter Resolution; JMEMS .
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Signal Measurement and Estimation Techniques for Micro and Nanotechnology
F. Beyeler, S. Muntwyler, and B. J. Nelson, “A six-axis MEMS force- torque sensor with micro- newton and nano-newtonmeter resolution,” Journal of Microelectromechanical Systems, 18, 433–441, Apr 2009.
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http://dspace.mit.edu/bitstream/handle/1721.1/61518/703448434-MIT.pdf?sequence=2
3 Reprinted with permission from Beyeler et al “A Six-Axis MEMS Force- Torque Sensor with Micro-Newton and .
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A multi-axis MEMS sensor with integrated carbon nanotube-based piezoresistors for nanonewton level force metrology
… S and Hierold C 2006 Nano-electromechanical displacement sensing based on single-walled carbon nanotubes Nano Lett. 6 1449–53 [3] Beyeler F, Muntwyler S, Nelson B J and Member S 2009 A six-axis MEMS force– torque sensor with micro-Newton and …
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Three-axis micro-force sensor with sub-micro-Newton measurement uncertainty and tunable force range
18 025004 [11] Beyeler F, Muntwyler S and Nelson B J 2009 A six-axis MEMS force- torque sensor with micro-Newton and nano-Newtonmeter resolution J.
