IST’s New Micro Flow Sensor

Featured Product from Innovative Sensor Technology IST USA Division


IST’s New Micro Flow Sensor for Ultra Low Gas-Flow Applications

Innovative Sensor Technology has developed a new MFS02 micro flow sensor that utilizes thin film technology to layer platinum micro heaters and temperature sensors on an ultra sensitive polymer membrane. The MFS02 is capable of measuring the thermal mass flow of gases in a range from 0.001 to 2m/s (up to 50m/s), and has a temperature range of -40°C to +80°C.

Polymer Membrane Construction

Using the same thin-film construction philosophy as IST’s FS series flow sensors, the MFS02 employs a special glass substrate with an ultra thin polymer membrane to achieve extreme sensitivity. A high performance material, the polymer is characterized by outstanding thermal, mechanical and chemical behaviors. Reduced thermal conductivity of the polymer membrane leads to better thermal contrast and thus better sensitivity. Additionally, the sensor’s glass substrate allows for a much higher operating temperature, making the measurement of larger flow rates possible.

Custom Sensor Applications

IST’s development of the micro flow sensor allows customers to specify dimensions and resistor layouts to fit their own applications. The MFS02 features a rugged design that is well-suited for soldering, conductive gluing, or wire bonding. The sensor element can be mounted as an assembly on an electronic PCB or other carrier, and is ideal for mounting in a bypass flow assembly for differential pressure applications. An EVA Kit is available through IST for performance evaluation of the MFS02 micro flow sensor.

MFS02 Data Sheet (.pdf)

 

Application Services

Need some help with your application development? Our technical teams can offer you consulting, development, and production assistance for your project.

 

 

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Innovative Sensor Technology IST USA Division is a fully owned subsidiary of Innovative Sensor Technology IST AG, based in Switzerland. We are a world-class manufacturer of thin-film platinum and nickel RTD temperature sensors, capacitive humidity sensors, mass flow sensors, conductivity sensors and bio sensors at the component level.

With our state-of-the-art manufacturing technology, we offer both standard and custom sensors to satisfy various applications. Our sensors cover requirements for system integrators in the process control, building automation, test & measurement, medical, automotive, and appliance industries.

IST USA Division offers high flexibility in sourcing and supporting our products. We offer in-house stock and on-site engineering support, which is available during our regular business hours for design, application, and after sales support.

Products:

IST produces five types of thin film measurement technology:  RTD temperature sensors, capacitive relative humidity sensors, mass flow sensors and conductivity.  Manufactured at the component level, these elements are available with a diverse range of standard and custom features. 

The available and ever expanding IST portfolio satisfies the growing application possibilities across multiple industries.

Our wide product range is the choice of many renowned end customers and OEMs in these fields. As a result, our sensors are found in measuring instruments for various applications such as process control, HVAC and building automation, test and measurement, medical, automotive, and appliance. While our products are widely used in these industries, they are by no means limited to them.

  • Process Control
  • Building Automation
  • Test & Measurement
  • Medical
  • Auto
  • Appliance

For your convenience, we have included resources such as technical information, data sheets, application notes, and performance data for our sensors.  If you have any questions regarding our products and their applications, please do not hesitate to contact us.  We have engineers available to support you with all of your technical inquiries.

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