Small HV Feedthrough

Featured Product from Xiamen Innovacera Advanced Materials Co., Ltd.

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INOVACERA’s small high-voltage feedthrough is an electrical penetration device specifically designed for high-vacuum environments, primarily used to safely and hermetically transmit high-voltage power or high-voltage electrical signals from the atmospheric side into the interior of a vacuum chamber while maintaining system vacuum integrity and insulation performance. Our feedthroughs utilize 95% alumina ceramic as the insulator, combined with high-performance metal materials such as 304 stainless steel, oxygen-free copper (OFC), and Kovar alloy, ensuring long-term stability under demanding process conditions.

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Small HV Feedthrough is widely used in excimer laser systems, providing a reliable high-voltage feeding solution for the discharge cavity of the laser. Excimer lasers, as important equipment in modern high-end manufacturing, play a significant role in semiconductor lithography, display panel annealing, automotive manufacturing, and optical fiber communication, among others.

Applications of excimer lasers

The excimer laser is widely applied due to its “cold processing” and high precision features:
Semiconductor and optoelectronics industry
Semiconductor lithography, wafer processing, optical component manufacturing, fiber grating writing
Display panel
Low-temperature polycrystalline silicon (LTPS) annealing, flexible screen peeling
Automobile manufacturing
Surface treatment of engine cylinders, weakening of airbags
New energy and research
Photovoltaic cell manufacturing, material surface modification, research experiments

Product structure and materials
Component Material Property
Insulator 95% Alumina ceramic High insulation strength, high temperature resistance, low gas emission rate
Conductor/Pin Kovar alloy / OFC copper Good thermal expansion compatibility and excellent electrical conductivity performance
Shell / Flange 304 stainless steel / kovar alloy Corrosion-resistant, weldable, vacuum-sealed
Technical specification parameters
parameter typical value
insulating material 95% Al?O? ceramics
metal parts 304 stainless steel/Kovar alloy/oxygen-free copper
Pressure resistance range 1kV – 30kV (Higher voltages can be customized)
operating temperature -40°C ~ +300°C

 

?It can be customized according to the structure?
leak rate He Leak Rate ≤1×10?¹? Pa·m³/s
insulation resistance ?10¹² Ω
flange connector CF / KF / customized

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