ZYGO's Optics business segment manufactures precision optical mirrors to exacting standards.

Applications

ZYGO has a long tradition of manufacturing custom-made optical mirrors for a wide variety of applications, including, but not limited to:

• EUV mirrors
• Lightweighted mirrors
• Space mirrors
• Stage components for lithographic steppers
• X-ray mirrors
• Defense/Aerospace
• Medical/Life sciences
• Industrial OEM
• Intelligence, surveillance & reconnaissance (ISR)

Key Features

• Geometry (flats, spheres, aspheres) to better than λ/50 PV.
• Full aperture interferometry up to 32" for flats, and up to 12" for spheres/aspheres (larger with stitching).
• Surface Roughness < 1 nm rms.

Materials

ZYGO has the capability to process a wide range of materials for optical mirrors. Our product capabilities include:

• CLEARCERAM® mirrors
• Cordierite mirrors
• Silicon Carbide mirrors
• Silicon mirrors
• ULE® mirrors
• Zerodur® mirrors

Types

ZYGO produces a variety of types high quality custom optical mirrors, including:

• Aspheric mirrors
• EUV Mirrors
• Flat mirrors
• Light-Weighted Mirrors
• Monolithic Mirrors
• Off-axis mirrors
• Parabolic mirrors
• Spherical mirrors