Door Vacuum Viewports and Access Doors

Add-A-Doors Fitting
from Nor-Cal Products, Inc. - The Vacuum Experts

Nor-Cal Products offers a complete line of viewports for vacuum chambers with NW, ISO and CF flanges. CF flanged viewports are available with fully annealed 7056 glass or fused quartz. Special materials and coatings, such as sapphire and anti-reflective (AR) coating, are available on request. Glass... [See More]

  • Component Type: Viewport; Door
  • Flange System / Seal: Proprietary ConflatTM type flange or fitting
  • Port Type: Flange
  • Vacuum / Pressure Range: (HV, < 10-3, >10-8 torr)
Large Door L-VAT -- Series 078
from VAT, Inc.

Area of application: Transfer door for Flat Panel Display and Thin Film Photovolatic production systems. Transfer doors are designed for use at atmospheric side of the in- or outcoming chamber (load lock) of a system. Description: The key features of the large L-VAT door technology are the real... [See More]

  • Component Type: Door
  • Materials: Aluminum
  • Vacuum / Pressure Range: Low or roughing vacuum level (> 1 torr)