Wafer Carrier / Holder Carbon, Graphite, and Diamond Materials

Susceptors hold and heat semiconductor wafers during thermal processing. A susceptor is made of a material which absorbs energy by induction, conduction, and/or radiation and heats the wafer. Its thermal shock resistance, thermal conductivity, and purity are critical to rapid thermal processing... [See More]

• Shape / Form: WaferCarrier; Custom Shape
• Composition or ASTM/EN Cement Type : Silicon Carbide: UltraClean™ Recrystallized & PureSiC® CVD; PlasmaPure™ UC Ultra-Pure Alumina, Clear Carbon™ SiC coated graphite

• Material Type: Graphite
• Applications: Wear resistant parts or tooling