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Supplier: Evident Scientific
Description: wafer inspection microscopes that provide exceptional image resolution and clarity through a wide range of observation methods including brightfield, darkfield, differential interference contrast (DIC), near-IR (near-infrared) and DUV (deep ultraviolet). The motorized objective turret
- Grade: Benchtop
- Eyepiece Style: Binocular
- Microscope Type: Compound
- Features: Digital Display, Mechanical Stage
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Supplier: Edmund Optics Inc.
Description: glass correction through the means of a moving collar (centration of mirrors should be checked and adjusted if tube length is changed).Each objective is available with any of three coating options: Aluminum with a magnesium fluoride overcoat for the NUV-Visible, DUV Enhanced Aluminum for the
- Magnification: 15 X
- Numerical Aperture: 0.28 NA
- Working Distance: 24.5 mm
- Field of View: 1.2000000000000002 mm
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Supplier: Edmund Optics Inc.
Description: glass correction through the means of a moving collar (centration of mirrors should be checked and adjusted if tube length is changed).Each objective is available with any of three coating options: Aluminum with a magnesium fluoride overcoat for the NUV-Visible, DUV Enhanced Aluminum for the
- Magnification: 15 X
- Numerical Aperture: 0.5 NA
- Working Distance: 23.2 mm
- Field of View: 1.2000000000000002 mm
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Supplier: Edmund Optics Inc.
Description: a broad spectral range. The Schwarzschild-style objective exhibits near-diffraction limited performance over the full reflecting range of the chosen coating. By eliminating the problems of chromatic aberration and material absorption associated with standard microscope objectives, these
- Magnification: 15 X
- Numerical Aperture: 0.28 NA
- Working Distance: 23.75 mm
- Lens Type: Objective Lens
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Supplier: Edmund Optics Inc.
Description: a broad spectral range. The Schwarzschild-style objective exhibits near-diffraction limited performance over the full reflecting range of the chosen coating. By eliminating the problems of chromatic aberration and material absorption associated with standard microscope objectives, these
- Magnification: 15 X
- Numerical Aperture: 0.28 NA
- Working Distance: 23.75 mm
- Lens Type: Objective Lens
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Description: decontamination of air and surfaces, UV lights for dermatological diagnosis, slit lamps for ophthalmology, lights for surgical microscopes and lights for surgical navigation systems; – lights connected to surgical instruments, such as luminous retractors; – luminaires for emergency lighting,
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Far- and Deep-Ultraviolet Spectroscopy
UV-DUV plasmonics will be an important future theme of photonics, as exemplified by DUV microscopes , lithography, sterilization, photocatalysis, and bio-sensing and analysis [88] (Chap. 8).
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A 193nm microscope for CD metrology for the 32nm node and beyond
A deep UV ( DUV ) microscope equipped with a 193 nm laser source and a high numerical aperture objective (0.9 NA) is currently developed at the Physikalisch-Technische Bundesanstalt (PTB).
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ZEDFA0303P01
Fig. 1 shows the resolving power of the DUV microscope on a 0.18 µm polysilicon gate.
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Femtopulse laser-based mask repair in the DUV wavelength regime
The optics for both the DUV microscope and laser are mechanically fixed on a vibration-damped platform.
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A 193nm optical CD metrology tool for the 32nm node
Keywords: CD metrology, line width, optical microscopy, DUV 193 nm, DUV microscope , 32 nm node, 45 nm node .
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Optical microscopy at sub-0.1-&mgr;m resolution for semiconductor applications
DUV microscopes operating at 248 nm wavelength already offer a feature size resolution down to 0.08 tm.
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Denaturing of single electrospun fibrinogen fibers studied by deep ultraviolet fluorescence microscopy
In this study, we constructed a DUV microscope on an inverted optical microscope equipped with a three-axis nanomanipulator.
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Characteristics of CD measurement equipment
As our results, CD result of dUV microscope is most suitable for 0.13 and 0.15 um lithography.
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CCD Image Sensors in Deep-Ultraviolet
31 3.2.5 DUV Microscope . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
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ZEDFA0201P10
As a result. the first DUV microscopes operating at 248 nm ha\e bccn launched to market It's quite a different challenge to design a DUV microscope and its optics compared to VIS microscopes.