Products/Services for MEMS Torque Sensor
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Torque Sensors - (200 companies)Torque sensors and torque instruments are used to measure torque in a variety of applications. Torque sensors are categorized into two main types, reaction and rotary. Reaction torque sensors measure static and dynamic torque with a stationary...Temperature CompensationTorque Sensor TypeTechnology -
Tilt Sensors - (153 companies)They are generally force balance sensors, solid-state MEMS device, or fluid-filled sensor. Each type is described below. Selection Criteria. The GlobalSpec SpecSearch database allows industrial buyers to search for tilt sensors by type of senor, type... -
Sensor Chips - (301 companies)Description. Sensor chips are dies incorporating semiconductor circuit elements that are used to convert changes to some physical parameter to an electrical signal. Like other semiconductors, a sensor chip can be flexible, and can be manufactured... -
Force and Load Sensors - (564 companies)Force and load sensors covers electrical sensing devices used to measure tension, compression, and shear forces. How to Select Force and Load Sensors. Image Credit: ABB Measurement Products. Force and load sensors are electrical sensing devices... -
Load Cells - (404 companies)Load cells are force sensors that often incorporate mechanical packaging to fit into testing and monitoring systems. They can be used for tension, compression, and/or shear measurement, and can be configured to measure force or load along one... -
Gyroscopes - (79 companies)...nearly-frictionless bearings which isolate the central disc from outside torque. When the gyroscope is spun on its axis at high speeds it resists movements in certain directions and demonstrates extraordinary stability of balance as seen in the video below...
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Gears - (647 companies)Gears are rotating mechanical devices employing 'teeth' in order to transmit torque between separate axes. Two or more cooperating gears are called a transmission and can produce a mechanical advantage by changing speed, torque or rotation direction...
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Motion Reference Units (MRU) - (15 companies)...of reference or another body. To control this data output, referred to as attitude, MRUs integrate sensors for orientation measurements, as well as actuators for applying torque to position an object to the desired attitude. Algorithms supply...
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Six-axis Force and Torque Sensors - (16 companies)Six-axis force and torque sensors measure the full six components of force and torque: vertical, lateral, and longitudinal forces as well as camber, steer, and torque movements. Six-axis force and torque sensors provide electrical outputs as analog...
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Strain Gauges - (123 companies)...elastic sensor whose resistance is a function of applied strain (unit deformation). Many types of strain gauges depend on the electrical resistance to strain. These types include: piezoresistive or semiconductor, carbon-resistive, bonded metallic wire...
Product News
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Tronics Microsystems
High performance MEMS inertial sensors Tronics is the only provider of both closed-loop MEMS Accelerometers and Gyros, taking MEMS inertial sensors to an unrivalled level of performance. Closed-loop electronics, also called force-feedback, brings several key advantages to inertial sensors, including superior linearity, increased signal to noise ratio and improved behavior under harsh vibrations, shocks and temperature environments. Over the last 15 years, Tronics has produced more than 1 million high performance MEMS inertial... (read more)Browse Inertial Measurement Units (IMU) Datasheets for Tronics Microsystems -
Tronics Microsystems
MEMS inertial sensors for UAV & VTOL A new generation of digital MEMS inertial sensors designed for AHRS and flight control to unlock precise navigation in new air mobility systems like VTOL and UAV. High-performance MEMS inertial sensors are an affordable and low-SWaP replacement for large and expensive quartz accelerometers and FOG gyros. They significantly demonstrate excellent performances under severe temperature and vibrations conditions at a fraction of their size, weight, and power consumption. To optimize the UAV's... (read more)Browse Accelerometers Datasheets for Tronics Microsystems -
All Sensors Corp.
Understanding Accuracy For MEMS Pressure Sensors All Sensors Pressure Points are application tips to simplify designing with microelectromechanical (MEMS) pressure sensors and avoiding common pitfalls. In most applications, accuracy is one of the more critical specifications that a product needs to meet. However, accuracy is also one of the more, if not the most, confusing parameter for any product including MEMS pressure sensors. This application tip provides system designers with insight to deal with the numerous sources of confusion... (read more) -
Dytran by HBK
Technical Article: VC MEMS Sensors This technical article provides an overview of variable capacitance (VC) accelerometers utilizing Micro-Electro-Mechanical Systems (MEMS) technology. It focuses on the design parameters that enable these sensors to perform reliably in harsh test environments and compares their performance to that of piezoelectric and piezoresistive sensors. The article also reviews various types of VC MEMS accelerometers, including 6 Degrees of Freedom (6DoF), uniaxial, and triaxial models. These sensors... (read more)Browse Accelerometers Datasheets for Dytran by HBK -
Dytran by HBK
Variable Capacitance MEMS Sensors Brochure Dytran VC MEMS accelerometers offer exceptional measurement accuracy and robust packaging for reliable operation in harsh environments. Sensor offerings include single-axis a triaxial configurations in true differential mode as well as innovative 6DoF configurations in single-ended mode. Our sensors are used in dynamic applications including flight testing, transportation environment replication/simulation, modal structural analysis, ride quality, road load, tilt, and inclination measurements... (read more)Browse Accelerometers Datasheets for Dytran by HBK -
Tronics Microsystems
MEMS Sensors for Train Localization and Navigation Are you involved in the design of trainborne positioning and navigation systems ?. Discover AXO (R)305, a +- 5 g high precision digital MEMS accelerometer and GYPRO (R)4300, a +- 300 /s high stability digital MEMS gyro that demonstrate excellent stability and repeatability for precise train localization and GNSS-assisted navigation. Our sensors are low-SWaP and performance-equivalent alternatives to analog quartz accelerometers and FOG. Perfect candidate for integration into IMU/INS for train... (read more)Browse Accelerometers Datasheets for Tronics Microsystems -
Silicon Designs, Inc.
MEMS Sensor with Enhanced Temperature Performance The Model 1522 is an industrial-grade surface mount MEMS DC accelerometer with enhanced temperature performance and a low-cost design. Like the SDI Model 1521, it is designed for use between -55 C and +125 C, however, the Model 1522 has only half the bias and scale-factor temperature coefficients of the Model 1521. Each nitrogen-damped, hermetically sealed Model 1522 accelerometer undergoes individual temperature testing, programming, calibration, and verification within a climate chamber... (read more)Browse Sensor Chips Datasheets for Silicon Designs, Inc. -
Silicon Designs, Inc.
Enhanced temperature performance MEMS Sensor The Model 1522 is an industrial-grade surface mount MEMS DC accelerometer with enhanced temperature performance and a low-cost design. Like the SDI Model 1521, it is designed for use between -55 C and +125 C, however, the Model 1522 has only half the bias and scale-factor temperature coefficients of the Model 1521. Each nitrogen-damped, hermetically sealed Model 1522 accelerometer undergoes individual temperature testing, programming, calibration, and verification within a climate chamber... (read more)Browse Sensor Chips Datasheets for Silicon Designs, Inc. -
Transducer Techniques, LLC
TRS Series Torque Sensor The TRS Series reaction torque sensors offer long term reliability due to non moving parts and state of the art bonded foil strain gages. The anodized aluminum TRS Series is also available as a two axis sensor, torque and thrust, on special request. Whenever possible, the best approach for precision torque measurements isvia reaction torque sensing, eliminating high maintenance and high cost of slip rings, bearings, and brushes. (read more)Browse Torque Sensors Datasheets for Transducer Techniques, LLC -
Tronics Microsystems
eVTOL/helicopters: MEMS inertial sensors for AHRS Meet the ideal candidates for integration into AHRS for eVTOL and helicopters! Tronics designs and manufactures low-SWaP, digital high performance MEMS accelerometers and gyros that feature high stability and repeatability with excellent rejection of shock and vibrations, making them perfectly suited for integration into AHRS for eVTOL and helicopters. Get in touch to learn more! (read more)Browse Inertial Measurement Units (IMU) Datasheets for Tronics Microsystems
More Information
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A Six-Axis MEMS Force–Torque Sensor With Micro-Newton and Nano-Newtonmeter Resolution
A piezoresisitve MEMS torque sensor has been presented in [15].
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Design and calibration of a microfabricated 6-axis force-torque sensor for microrobotic applications
A piezoresisitve MEMS torque sensor has been described in [12].
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Six-axis force–torque sensor with a large range for biomechanical applications
[18] Handwerker J, Gieschke P, Baumann M and Paul O 2012 CMOS integrated silicon/glass-bonded 3D force/ torque sensor MEMS ’12: 25th IEEE Int. Conf. on Micro Electro Mechanical Systems (Paris, France) pp 136–9 [19] ATI Industrial Automation F/T Sensor: Nano17 1999 …
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A Review of Haptic Feedback Teleoperation Systems for Micromanipulation and Microassembly
[28] F. Beyeler, S. Muntwyler, and B. J. Nelson, “A six-axis MEMS force torque sensor with micro-newton and nano-newtonmeter resolution,” J. Microelectromech.
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Design and calibration of a MEMS sensor for measuring the force and torque acting on a magnetic microrobot
This paper presents the design of a multi-axis capacitive MEMS force– torque sensor that provides micro-Newton scale force measurements and nano-Newton-meter torque measurements for characterizing a microrobot propelled by externally applied magnetic fields and field gradients.
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2009 Index Journal of Microelectromechanical Systems Vol. 18
A Six-Axis MEMS Force– Torque Sensor With Micro-Newton and Nano-Newtonmeter Resolution; JMEMS .
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Signal Measurement and Estimation Techniques for Micro and Nanotechnology
F. Beyeler, S. Muntwyler, and B. J. Nelson, “A six-axis MEMS force- torque sensor with micro- newton and nano-newtonmeter resolution,” Journal of Microelectromechanical Systems, 18, 433–441, Apr 2009.
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http://dspace.mit.edu/bitstream/handle/1721.1/61518/703448434-MIT.pdf?sequence=2
3 Reprinted with permission from Beyeler et al “A Six-Axis MEMS Force- Torque Sensor with Micro-Newton and .
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A multi-axis MEMS sensor with integrated carbon nanotube-based piezoresistors for nanonewton level force metrology
… S and Hierold C 2006 Nano-electromechanical displacement sensing based on single-walled carbon nanotubes Nano Lett. 6 1449–53 [3] Beyeler F, Muntwyler S, Nelson B J and Member S 2009 A six-axis MEMS force– torque sensor with micro-Newton and …
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Three-axis micro-force sensor with sub-micro-Newton measurement uncertainty and tunable force range
18 025004 [11] Beyeler F, Muntwyler S and Nelson B J 2009 A six-axis MEMS force- torque sensor with micro-Newton and nano-Newtonmeter resolution J.
