Products/Services for MEMS Torque Sensor
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Torque Sensors - (200 companies)Torque sensors and torque instruments are used to measure torque in a variety of applications. Torque sensors are categorized into two main types, reaction and rotary. Reaction torque sensors measure static and dynamic torque with a stationary...Temperature CompensationTorque Sensor TypeTechnology -
Tilt Sensors - (154 companies)They are generally force balance sensors, solid-state MEMS device, or fluid-filled sensor. Each type is described below. Selection Criteria. The GlobalSpec SpecSearch database allows industrial buyers to search for tilt sensors by type of senor, type... -
Sensor Chips - (296 companies)Description. Sensor chips are dies incorporating semiconductor circuit elements that are used to convert changes to some physical parameter to an electrical signal. Like other semiconductors, a sensor chip can be flexible, and can be manufactured... -
Force and Load Sensors - (562 companies)Force and load sensors covers electrical sensing devices used to measure tension, compression, and shear forces. How to Select Force and Load Sensors. Image Credit: ABB Measurement Products. Force and load sensors are electrical sensing devices... -
Load Cells - (403 companies)Load cells are force sensors that often incorporate mechanical packaging to fit into testing and monitoring systems. They can be used for tension, compression, and/or shear measurement, and can be configured to measure force or load along one... -
Gyroscopes - (75 companies)...nearly-frictionless bearings which isolate the central disc from outside torque. When the gyroscope is spun on its axis at high speeds it resists movements in certain directions and demonstrates extraordinary stability of balance as seen in the video below...
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Gears - (647 companies)Gears are rotating mechanical devices employing 'teeth' in order to transmit torque between separate axes. Two or more cooperating gears are called a transmission and can produce a mechanical advantage by changing speed, torque or rotation direction...
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Motion Reference Units (MRU) - (15 companies)...of reference or another body. To control this data output, referred to as attitude, MRUs integrate sensors for orientation measurements, as well as actuators for applying torque to position an object to the desired attitude. Algorithms supply...
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Six-axis Force and Torque Sensors - (16 companies)Six-axis force and torque sensors measure the full six components of force and torque: vertical, lateral, and longitudinal forces as well as camber, steer, and torque movements. Six-axis force and torque sensors provide electrical outputs as analog...
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Strain Gauges - (123 companies)...elastic sensor whose resistance is a function of applied strain (unit deformation). Many types of strain gauges depend on the electrical resistance to strain. These types include: piezoresistive or semiconductor, carbon-resistive, bonded metallic wire...
Product News
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Tronics Microsystems
High performance MEMS inertial sensors Tronics is the only provider of both closed-loop MEMS Accelerometers and Gyros, taking MEMS inertial sensors to an unrivalled level of performance. Closed-loop electronics, also called force-feedback, brings several key advantages to inertial sensors, including superior linearity, increased signal to noise ratio and improved behavior under harsh vibrations, shocks and temperature environments. Over the last 15 years, Tronics has produced more than 1 million high performance MEMS inertial... (read more)Browse Inertial Measurement Units (IMU) Datasheets for Tronics Microsystems -
Dytran Instruments, Inc.
Technical Article: VC MEMS Sensors This technical article provides an overview of variable capacitance (VC) accelerometers utilizing Micro-Electro-Mechanical Systems (MEMS) technology. It focuses on the design parameters that enable these sensors to perform reliably in harsh test environments and compares their performance to that of piezoelectric and piezoresistive sensors. The article also reviews various types of VC MEMS accelerometers, including 6 Degrees of Freedom (6DoF), uniaxial, and triaxial models. These sensors... (read more)Browse Accelerometers Datasheets for Dytran Instruments, Inc. -
Dytran Instruments, Inc.
Variable Capacitance MEMS Sensors Brochure Dytran VC MEMS accelerometers offer exceptional measurement accuracy and robust packaging for reliable operation in harsh environments. Sensor offerings include single-axis a triaxial configurations in true differential mode as well as innovative 6DoF configurations in single-ended mode. Our sensors are used in dynamic applications including flight testing, transportation environment replication/simulation, modal structural analysis, ride quality, road load, tilt, and inclination measurements... (read more)Browse Accelerometers Datasheets for Dytran Instruments, Inc. -
Servoflo Corporation
MEMS Mass Flow Sensor - FS4001 The FS4001 mass flow sensors are manufactured using Siargo's proprietary MEMS flow sensor and packaging technology. The sensors are specially designed for low flow rates from 0-30 sccm up to 0-1000 sccm. With a high overpressure of 5 bar (73 psi), the FS4001 can be used in a wide range of applications including instrumentation (such as mass spectrometry), leak detection, process control, gas flow metrology and medical applications. The FS4001 requires a power supply of 8-18 VDC and provides... (read more)Browse Mass Flow Meters and Controllers Datasheets for Servoflo Corporation -
Transducer Techniques, LLC
TRS Series Torque Sensor The TRS Series reaction torque sensors offer long term reliability due to non moving parts and state of the art bonded foil strain gages. The anodized aluminum TRS Series is also available as a two axis sensor, torque and thrust, on special request. Whenever possible, the best approach for precision torque measurements isvia reaction torque sensing, eliminating high maintenance and high cost of slip rings, bearings, and brushes. (read more)Browse Torque Sensors Datasheets for Transducer Techniques, LLC -
S. Himmelstein & Company
Reaction torque sensors with ultimate accuracy construction. Exceptional fatigue properties. Compact mechanical package. Solid Flanges Transducers handle torques from 10 ozf-in to 750,000 lbf-in. Overload capacity is twice the rated torque. Additional strengths are: Combined error of +/- 0.05%. Straightforward installation, in less axial length than needed for a rotary torque sensor. Simple mounting -- no keyed shafts or couplings. Durable -- little-to-no maintenance required. No bearings or speed limits. Typical Applications: Torque measurement... (read more)Browse Torque Sensors Datasheets for S. Himmelstein & Company -
S. Himmelstein & Company
High Capacity Bearingless Torque Sensors Bearingless Digital Torque Sensors with Very High Capacities. S. Himmelstein and Company announces the MCRT (R) 86011V Series Bearingless Digital Torquemeter. These large capacity models are available with 500, 750, and 1,000 kNm torque ranges and offer best protection with significant mechanical overloads. These large capacity models are available with 500, 750, and 1,000 kNm torque ranges. Available outputs include analog, digital and FM Data. The MCRT (R) 86011V has the industry's highest... (read more)Browse Torque Sensors Datasheets for S. Himmelstein & Company -
Hypersen Technologies Co., Ltd.
Force Torque Sensor for Robots Assembly Hypersen 6-Axis Force Torque Sensor (HPS-FT Series) can measure the force and torque values in real time in 3 axes: X, Y and Z. The high-precision strain gauge and structural design help it achieve higher SNR and sensitivity. In addition, the embedded temperature compensation algorithm highly reduces the temperature drift. There are totally 4 models based on different force and torque measuring range. One of the best-selling model is HPS-FT060S with the following measuring range: Fxy: +-1000N... (read more)Browse Six-axis Force and Torque Sensors Datasheets for Hypersen Technologies Co., Ltd. -
Hypersen Technologies Co., Ltd.
Cobots' force torque measurement sensor Hypersen 6-Axis Force Torque Sensor (HPS-FT Series) can measure the force and torque values in real time in 3 axes: X, Y and Z. The high-precision strain gauge and structural design help it achieve higher SNR and sensitivity. In addition, the embedded temperature compensation algorithm highly reduces the temperature drift. There are totally 4 models based on different force and torque measuring range. One of the best-selling model is HPS-FT060E with the following measuring range: Fxy: +-600N... (read more)Browse Six-axis Force and Torque Sensors Datasheets for Hypersen Technologies Co., Ltd. -
Hypersen Technologies Co., Ltd.
6-axis force torque sensor Product description. Measuring force and torque on three spatial axes of XYZ. Equipped with high performance processor and 24bit ADC. High SNR digital output. High static overload protection. 2000Hz output data rate. Low zero drift & cross-axis effect, low temperature drift. Available with Ethernet, EtherCAT and RS-485 communication. Suitable for industrial robots, collaborative robots, factory automation and so on. Applications. Robot Hand Guiding. Surface Polishing. Force Controlled Assembly... (read more)Browse Torque Sensors Datasheets for Hypersen Technologies Co., Ltd.
More Information
Indicates content that may require registration and/or purchase.
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A Six-Axis MEMS Force–Torque Sensor With Micro-Newton and Nano-Newtonmeter Resolution
A piezoresisitve MEMS torque sensor has been presented in [15].
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Design and calibration of a microfabricated 6-axis force-torque sensor for microrobotic applications
A piezoresisitve MEMS torque sensor has been described in [12].
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Six-axis force–torque sensor with a large range for biomechanical applications
[18] Handwerker J, Gieschke P, Baumann M and Paul O 2012 CMOS integrated silicon/glass-bonded 3D force/ torque sensor MEMS ’12: 25th IEEE Int. Conf. on Micro Electro Mechanical Systems (Paris, France) pp 136–9 [19] ATI Industrial Automation F/T Sensor: Nano17 1999 …
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A Review of Haptic Feedback Teleoperation Systems for Micromanipulation and Microassembly
[28] F. Beyeler, S. Muntwyler, and B. J. Nelson, “A six-axis MEMS force torque sensor with micro-newton and nano-newtonmeter resolution,” J. Microelectromech.
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Design and calibration of a MEMS sensor for measuring the force and torque acting on a magnetic microrobot
This paper presents the design of a multi-axis capacitive MEMS force– torque sensor that provides micro-Newton scale force measurements and nano-Newton-meter torque measurements for characterizing a microrobot propelled by externally applied magnetic fields and field gradients.
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2009 Index Journal of Microelectromechanical Systems Vol. 18
A Six-Axis MEMS Force– Torque Sensor With Micro-Newton and Nano-Newtonmeter Resolution; JMEMS .
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Signal Measurement and Estimation Techniques for Micro and Nanotechnology
F. Beyeler, S. Muntwyler, and B. J. Nelson, “A six-axis MEMS force- torque sensor with micro- newton and nano-newtonmeter resolution,” Journal of Microelectromechanical Systems, 18, 433–441, Apr 2009.
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http://dspace.mit.edu/bitstream/handle/1721.1/61518/703448434-MIT.pdf?sequence=2
3 Reprinted with permission from Beyeler et al “A Six-Axis MEMS Force- Torque Sensor with Micro-Newton and .
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A multi-axis MEMS sensor with integrated carbon nanotube-based piezoresistors for nanonewton level force metrology
… S and Hierold C 2006 Nano-electromechanical displacement sensing based on single-walled carbon nanotubes Nano Lett. 6 1449–53 [3] Beyeler F, Muntwyler S, Nelson B J and Member S 2009 A six-axis MEMS force– torque sensor with micro-Newton and …
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Three-axis micro-force sensor with sub-micro-Newton measurement uncertainty and tunable force range
18 025004 [11] Beyeler F, Muntwyler S and Nelson B J 2009 A six-axis MEMS force- torque sensor with micro-Newton and nano-Newtonmeter resolution J.
