Properties of Silicon Germanium and SiGe: Carbon

H. Jorke
September 1999
Injection currents across heterojunctions are influenced by multiple factors such as material properties (bandgap, dielectric constant, effective carrier masses), interface properties (conduction and valence band discontinuities) and electrostatic forces that are related to the specific doping situation and the presence of an external bias.
In Si/Si 1-xGe x heterojunctions material properties are largely determined by the value of the Ge fraction x (0 < x < 1). In contrast, interface properties (conduction and valence band discontinuities) do not solely depend on x but are also strongly or even dominantly influenced by factors such as crystal orientation (the present data are related to (100) oriented interfaces) and the presence of layer strain. The latter is an inherent property of the lattice mismatched Si/Si 1-xGe x heterosystem [1]. To illustrate the specific strain influence on band discontinuities FIGURE 1 shows the energy band diagram for Si and Si 1-xGe x isolated (i.e. without space charges) if (a) Si is unstrained (Si 1-xGe x is under compressive strain) and (b) Si 1-xGe x is unstrained (Si is under tensile strain).