This dry screw pump is designed for semiconductor applications such as Etch, CVD, Diffusion, and ALD processes that require a high gas temperature, excellent powder handling, corrosive gas tolerance, and high pumping speed. The pump temperature and nitrogen dilution can both be adjusted to optimize the pump performance, economy, and service interval.

Fit-in-place design, directly mounted canned motor, backing pump, and vacuum booster combined on a compact base frame, low vibration level