The Busch abatement systems (GABA) are newly launched for treatment of exhaust gases from a vacuum pump used in semiconductor applications.

The GABA AWE 050 AE is a wet scrubber that is specially designed for EPI process applications. In order to maximize the safety, four individual reaction chambers are equipped with a smart inlet clogging preventer and a venturi unit in a system. The GABA AWE 050 AE offers a built-in water recirculation system to reduce running costs and a touch screen control for an easy access for system operation.

The GABA AFC 050 A is a flameless catalytic abatement system designed for CVD application. Integrated system of catalyst and wet treatment abates flammable gasses and water-soluble gasses simultaneously. The GABA AFC 050 A offers high gas removal efficiency without fuel and easy operation and maintenance through its modular system.