Zygo Corporation

Many ZYGO metrology instruments rely on interferometry combined with imaging systems to measure surface form, waviness, and roughness. Although these instruments have advanced software that performs data interpretation for you, it can be helpful to understand how the imaging process influences interferometric measurements at a fundamental level. Read more...

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Zygo Corporation

The Verifire™ XL interferometer is a stand-alone workstation designed for simplistic and reliable metrology of large flat surfaces up to twelve inches (300 mm) in diameter. Examples include front-surface reflectors, windows, and semiconductor wafers or wafer chucks. Read more...

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Zygo Corporation

UltraHigh Resolution Interferometry for Precise Mid-Spatial Frequency Characterization Read more...

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Renishaw

The size of the XL-80 laser and XC-80 compensator means that a complete linear system can fit into a 'wheelie-case' and weighs only 12 kg. Add the tripod, in its own fabric case and you have a truly portable solution to machine metrology. Both the laser and compensator connect to your PC via USB so there is no separate interface required and no complicated set-up to worry about. Read more...

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