Product Announcements:
Interferometers

Micro-Epsilon's IMS5400-TH white light interferometer measures thickness with nanometer accuracy from a large distance. Distance-independent measurement delivers reliable results even on moving objects such as thin layers, flat glass and films. Read more...

Micro-Epsilon's IMS5420 white light interferometer measures monocrystalline silicon wafers without contact. One sensor handles undoped, doped and highly doped wafers and achieves signal stability of less than 1 nm. Read more...

Micro-Epsilon's IMS5200-TH white light interferometer measures transparent films inline from 1 µm to 100 µm. Measuring rates up to 24 kHz support fast, nanometer-precise layer control in production processes. Read more...

Micro-Epsilon's interferometer sensor IMP-NIR-TH3/90/IP68 is designed for inline thickness measurement of silicon and silicon carbide wafers. A 90° beam path, IP68 protection and air purge support stable results in demanding production environments. Read more...

The Qualifire™ is our most adaptable interferometer yet. It combines technical advancements and usability improvements with new features to provide top-end, flexible solutions. Read more...

The Verifire Asphere+ (VFA+) system enables precise asphere
metrology by leveraging Fizeau interferometry — a long-proven
method of high-precision and high-resolution optical metrology. It produces full aperture measurements at very high resolution, enabling polishing feedback of the entire optic surface. Read more...

Many ZYGO metrology instruments rely on interferometry combined with imaging systems to measure surface form, waviness, and roughness. Although these instruments have advanced software that performs data interpretation for you, it can be helpful to understand how the imaging process influences interferometric measurements at a fundamental level. Read more...

The Verifire™ XL interferometer is a stand-alone workstation designed for simplistic and reliable metrology of large flat surfaces up to twelve inches (300 mm) in diameter. Examples include front-surface reflectors, windows, and semiconductor wafers or wafer chucks. Read more...

UltraHigh Resolution Interferometry for Precise Mid-Spatial Frequency Characterization Read more...

The size of the XL-80 laser and XC-80 compensator means that a complete linear system can fit into a 'wheelie-case' and weighs only 12 kg. Add the tripod, in its own fabric case and you have a truly portable solution to machine metrology. Both the laser and compensator connect to your PC via USB so there is no separate interface required and no complicated set-up to worry about. Read more...