Micro-Epsilon Group

The white light interferoMETERs are optimized for industrial use and offer accuracy that creates an unprecedented level of nanometer precision in optical distance and thickness measurements. From now on, the interferoMETER series is also available as multi-peak systems, which opens up numerous new potential applications. Read more...

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Zygo Corporation

The Verifire Asphere+ (VFA+) system enables precise asphere
metrology by leveraging Fizeau interferometry — a long-proven
method of high-precision and high-resolution optical metrology. It produces full aperture measurements at very high resolution, enabling polishing feedback of the entire optic surface. Read more...

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Micro-Epsilon Group

With the interferoMETER IMS5400-DS, absolute distance measurements with nanometer resolution can be carried out in industrial applications. The sensors generate a small light spot over the entire measuring range. The light spot diameter is only 10 µm and allows the detection of small details such as structures on semiconductors and miniature electronic components. Read more...

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Micro-Epsilon Group

Optimized for industrial purposes and offering an accuracy that creates an unprecedented level of precision in optical distance and thickness measurements - these are the new white light interferometers from Micro-Epsilon. The interferometers are available in 3 series for different fields of applications and achieve stable measurement results with resolutions in the ... Read more...

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Zygo Corporation

Many ZYGO metrology instruments rely on interferometry combined with imaging systems to measure surface form, waviness, and roughness. Although these instruments have advanced software that performs data interpretation for you, it can be helpful to understand how the imaging process influences interferometric measurements at a fundamental level. Read more...

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Zygo Corporation

The Verifire™ XL interferometer is a stand-alone workstation designed for simplistic and reliable metrology of large flat surfaces up to twelve inches (300 mm) in diameter. Examples include front-surface reflectors, windows, and semiconductor wafers or wafer chucks. Read more...

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Zygo Corporation

UltraHigh Resolution Interferometry for Precise Mid-Spatial Frequency Characterization Read more...

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Renishaw

The size of the XL-80 laser and XC-80 compensator means that a complete linear system can fit into a 'wheelie-case' and weighs only 12 kg. Add the tripod, in its own fabric case and you have a truly portable solution to machine metrology. Both the laser and compensator connect to your PC via USB so there is no separate interface required and no complicated set-up to worry about. Read more...

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