Zygo Corporation

The Verifire™ XL interferometer is a stand-alone workstation designed for simplistic and reliable metrology of large flat surfaces up to twelve inches (300 mm) in diameter. Examples include front-surface reflectors, windows, and semiconductor wafers or wafer chucks. Read more...

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Zygo Corporation

UltraHigh Resolution Interferometry for Precise Mid-Spatial Frequency Characterization Read more...

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Zygo Corporation

High Definition Interferometer System with QPSI™ Vibration Tolerant Technology Read more...

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Zygo Corporation

ZYGO is the technology and application support leader in heterodyne displacement interferometry, offering complete solutions and support for your OEM metrology application. ZYGO's technologies and OEM products have been field proven over many years of use in leading-edge production facilities. Read more...

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Renishaw

The size of the XL-80 laser and XC-80 compensator means that a complete linear system can fit into a 'wheelie-case' and weighs only 12 kg. Add the tripod, in its own fabric case and you have a truly portable solution to machine metrology. Both the laser and compensator connect to your PC via USB so there is no separate interface required and no complicated set-up to worry about. Read more...

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