Single-Phase RF Generators

CB Series - High Frequency RF -- CB 200
from Comdel, Inc.

Comdel's Superior Design and Reliability in a Small, Lightweight Package. Performance: RF generators from the CB product family are available in power ranges from 50 to 5000 Watts with standard fixed frequencies from 13.56 MHz to 60 MHz. The CB 200 provides 200 watts of power output in a lightweight... [See More]

  • Applications: High Frequency, Semiconductor/Thin Film, Semiconductor Processing, Etch, RIE ICP
  • DC Output Power: 200
  • Features: Adjustable Frequency (optional feature); HALO, Fixed Match, Master/Slave
  • Output Frequency: 13.56 to 60
Mid-Frequency Generator -- LFGS
from Advanced Energy Industries, Inc.

Wide-output frequency range. Compact design. Flexible communication protocol. The versatile, variable-frequency LFGS  generator  (1250 W,  40 to 500 kHz)  suits  a wide variety of semiconductor and  general plasma-processing applications,  including... [See More]

  • Form Factor: Rack Mount
  • DC Output Power: 15 to 1250
  • Applications: Semiconductor/Thin Film
  • Output Frequency: 0.0400 to 0.5000
AMS Series -- AMS-0.6B50
from Matsusada Precision, Inc.

High speed response, all solid state, various output waveforms [See More]

  • Form Factor: Rack Mount
  • DC Output Voltage: -600.0 to 600.0
  • Applications: High Frequency, Instrumentation, Testing Equipment
  • DC Output Current: 50
CB Series - High Frequency RF Power -- CB 300
from Comdel, Inc.

Comdel's Superior Design and Reliability in a Small, Lightweight Package. Performance: RF generators from the CB product family are available in power ranges from 50 to 5000 Watts with standard fixed frequencies from 13.56 MHz to 60 MHz. The CB 300 provides 300 watts of power output in a lightweight... [See More]

  • Applications: High Frequency, Semiconductor/Thin Film, Semiconductor Processing, Etch, RIE ICP
  • DC Output Power: 300
  • Features: Adjustable Frequency (optional feature); HALO, Fixed Match, Master/Slave
  • Output Frequency: 13.56 to 60
RF Power Supply -- Paramount
from Advanced Energy Industries, Inc.

Paramount RF power generators combine frequency tuning, pulsing, and complete digital control. Full digital control for dynamic response to plasma changes. Customizable frequency from 400 kHz to 60 MHz and power from 100 W to 8 kW. Advanced features for control optimization and synchronization. [See More]

  • Form Factor: Rack Mount
  • DC Output Power: 1500 to 8000
  • Applications: Semiconductor/Thin Film
  • Output Frequency: 0.4000 to 60
CB Series - High Frequency RF Power -- CB 50
from Comdel, Inc.

Comdel's Superior Design and Reliability in a Small, Lightweight Package. Performance: RF generators from the CB product family are available in power ranges from 50 to 5000 Watts with standard fixed frequencies from 13.56 MHz to 60 MHz. The CB 50 provides 50 watts of power output in a lightweight... [See More]

  • Applications: High Frequency, Semiconductor/Thin Film, Semiconductor Processing, Etch, RIE ICP
  • DC Output Power: 50
  • Features: Adjustable Frequency (optional feature); HALO, Fixed Match, Master/Slave
  • Output Frequency: 13.56 to 60
CLF Series - Low Frequency RF Power -- CLF 1000 Full Rack
from Comdel, Inc.

Stable, Reliable, Low Frequency Power for Industrial Heating and Plasma Processing Applications. Performance: The CLF series generators provide stable process power up to 5 kW. The CLF 1000 provides 1000 watts of power. The full- rack models operate at any fixed frequency from 20 to 450 kHz or... [See More]

  • Form Factor: Rack Mount
  • Features: Adjustable Frequency; Cooling by Forced Air
  • Applications: Semiconductor/Thin Film, RIE, ICP, PVD, Semiconductor Processing
  • DC Output Power: 1000
CLX Series - Low Frequency RF Power -- CLX 1000
from Comdel, Inc.

Proven Reliability in Plasma Vacuum Systems Worldwide. Performance: The CLX series low frequency RF power supplies are available in power ranges from 600 to 10,000 Watts with fixed frequencies from 20 kHz to 2 MHz, and frequency agile capability up to 10% bandwidth. The CLX 1000 provides 1000 watts... [See More]

  • Form Factor: Rack Mount
  • Features: Adjustable Frequency; Cooling by Forced Air
  • Applications: Semiconductor/Thin Film, Semiconductor Processing, RIE, CVD, PVD
  • DC Output Power: 1000
CPS Series - High Frequency RF Power -- CPS 500
from Comdel, Inc.

Solid, Reliable Engineering that Improves Process Results. Performance: With millions of hours in the field, Comdel ’s CPS series generators have proven their ability to withstand erratic loads. Patented S-Technology provides optimized amplifier performance for ultra-stable output by reducing... [See More]

  • Form Factor: Rack Mount
  • Features: Adjustable Frequency (optional feature); Custom Configured Interface
  • Applications: High Frequency, Semiconductor/Thin Film, Etch, RIE, ICP, RF Sputtering, CVD
  • DC Output Power: 500
CV Series - Very High Frequency (VHF) Power -- CV 500
from Comdel, Inc.

Performance: Comdel CV series power supplies offer stable VHF power at frequencies from 30 to 80 MHz. The CV 500 delivers 500 watts of power. Configured within Comdel's standard control and monitoring package, the CV series offers exceptional ease of operation. RS-232 and analog controls are... [See More]

  • Form Factor: Rack Mount
  • Features: Adjustable Frequency; Active Front Panel with Full Controls
  • Applications: High Frequency, Semiconductor/Thin Film, Telecommunications, VHF Plasma, Laser, Induction Heating
  • DC Output Power: 500
CX Series - High Frequency RF Power -- CX 1250A
from Comdel, Inc.

Proven Reliability in Plasma Vacuum Systems Worldwide. Performance: The CX series power supplies start at power ranges from 600 to 2500 Watts with fixed frequencies from 2 MHz to 30 MHz, and frequency agile capability up to 10% bandwidth. The solid-state design provides low cost of ownership with... [See More]

  • Form Factor: Rack Mount
  • Features: Adjustable Frequency; Active Front Panel with Full Controls
  • Applications: High Frequency, Semiconductor/Thin Film, Etch, Parallel Plate, RF Sputtering
  • DC Output Power: 1250
CX Series - High Frequency RF Power -- CX 600/H
from Comdel, Inc.

Proven Reliability in Plasma Vacuum Systems Worldwide. Performance: The CX series power supplies start at power ranges from 600 to 2500 Watts with fixed frequencies from 2 MHz to 30 MHz, and frequency agile capability up to 10% bandwidth. The solid-state design provides low cost of ownership with... [See More]

  • Form Factor: Rack Mount
  • Features: Adjustable Frequency; Active Front Panel with Full Controls
  • Applications: High Frequency, Semiconductor/Thin Film, Etch, Parallel Plate, RF Sputtering
  • DC Output Power: 600