Rack Mount RF Generators

Low-Frequency Power Supply -- PEII
from Advanced Energy Industries, Inc.

The PEII series of power supplies are the trusted standard for dual-magnetron sputtering, as an effective vacuum cleaning tool, and in multiple PECVD applications. Reliable water-cooled design. Delivers tight output regulation on power, voltage, or current, with a measurement accuracy of 1%. [See More]

  • Form Factor: Rack Mount
  • AC Output Voltage: 547.0 to 953.0
  • Applications: Semiconductor/Thin Film
  • AC Output Current: 9 to 32
CB Series - High Frequency RF Power -- CB 5000
from Comdel, Inc.

Comdel's Superior Design and Reliability in a Small, Lightweight Package. Performance: RF generators from the CB product family are available in power ranges from 50 to 5000 Watts with standard fixed frequencies from 13.56 MHz to 60 MHz. The CB 5000 provides 5000 watts of power output in a compact... [See More]

  • Form Factor: Rack Mount
  • Features: Adjustable Frequency (optional feature); HALO, Fixed Match, Master/Slave
  • Applications: High Frequency, Semiconductor/Thin Film, Semiconductor Processing, Etch, RIE ICP
  • DC Output Power: 5000
AMS Series -- AMS-0.6B50
from Matsusada Precision, Inc.

High speed response, all solid state, various output waveforms [See More]

  • Form Factor: Rack Mount
  • DC Output Voltage: -600.0 to 600.0
  • Applications: High Frequency, Instrumentation, Testing Equipment
  • DC Output Current: 50
Mid-Frequency Generator -- LFGS
from Advanced Energy Industries, Inc.

Wide-output frequency range. Compact design. Flexible communication protocol. The versatile, variable-frequency LFGS  generator  (1250 W,  40 to 500 kHz)  suits  a wide variety of semiconductor and  general plasma-processing applications,  including... [See More]

  • Form Factor: Rack Mount
  • DC Output Power: 15 to 1250
  • Applications: Semiconductor/Thin Film
  • Output Frequency: 0.0400 to 0.5000
CDX Series - Dual Frequency Power -- CDX 1000
from Comdel, Inc.

Simplify Operations and Reduce Costs Without Sacrificing Performance. Performance: The CDX 1000 dual frequency RF generator comes in a 1200 watt design. The high frequency (HF) section of the CDX provides 600 watts of power, with optional frequencies from 2 to 60 MHz. The low frequency (LF) section... [See More]

  • Form Factor: Rack Mount
  • Features: Adjustable Frequency; Variable frequency, Power Monitoring
  • Applications: Instrumentation, Semiconductor/Thin Film, Semiconductor, Etch, Deposition
  • DC Output Power: 1200
Mid-Frequency Power Supply, PDX® High-power
from Advanced Energy Industries, Inc.

Need a highly efficient, compact, easy-to-integrate power source? The PDX ® series provides extremely accurate, highly repeatable process control, helping to ensure process uniformity and high throughput. It ’s wide frequency range of operation delivers optimal control across numerous... [See More]

  • Form Factor: Rack Mount
  • AC Output Voltage: 735.0
  • Applications: Semiconductor/Thin Film
  • AC Output Current: 14.9
CLB Series - Low Frequency RF Power -- CLB 12K
from Comdel, Inc.

Comdel's Superior Design and Reliability in a Small, Lightweight Package. Performance: RF generators from the CLB product family are available in power ranges from 2500 to 12,000 Watts at a single frequency in the 20 kHz to 2 MHz band. The CLB 12K provides 12000 watts of power. The Turbotune... [See More]

  • Form Factor: Rack Mount
  • Features: Adjustable Frequency
  • Applications: Semiconductor/Thin Film, Etch, Parallel Plate, RF Sputtering
  • DC Output Voltage: -5.0 to 10.0
RF Generator and Power-Delivery System -- Apex
from Advanced Energy Industries, Inc.

When space is limited, but performance is critical, streamlined APEX RF generators offer various mounting options and power you can rely on. Chamber-, rack-, or frame-mount options for convenience and reduced power losses. Superb performance enhanced with arc management. 1.5 to 10 kW output power... [See More]

  • Form Factor: Rack Mount
  • Operating Temperature: 5 to 40
  • DC Output Power: 750 to 10000
CLF Series - Low Frequency RF Power -- CLF 1000 Full Rack
from Comdel, Inc.

Stable, Reliable, Low Frequency Power for Industrial Heating and Plasma Processing Applications. Performance: The CLF series generators provide stable process power up to 5 kW. The CLF 1000 provides 1000 watts of power. The full- rack models operate at any fixed frequency from 20 to 450 kHz or... [See More]

  • Form Factor: Rack Mount
  • Features: Adjustable Frequency; Cooling by Forced Air
  • Applications: Semiconductor/Thin Film, RIE, ICP, PVD, Semiconductor Processing
  • DC Output Power: 1000
RF Power Supply -- Cesar
from Advanced Energy Industries, Inc.

Robust and versatile, the Cesar platform provides excellent RF power delivery across a wide range of frequencies and power outputs. Customized performance without custom lead times. Reliable design for maximum uptime. Powerful user interface for easy operation. The proven Cesar platform delivers... [See More]

  • Form Factor: Rack Mount
  • DC Output Power: 600 to 5000
  • Applications: Semiconductor/Thin Film
  • Output Frequency: 2 to 40.68
CLF Series - Low Frequency RF Power -- CLF 5000 Full Rack
from Comdel, Inc.

Stable, Reliable, Low Frequency Power for Industrial Heating and Plasma Processing Applications. Performance: The CLF series generators provide stable process power up to 5 kW. The CLF 5000 provides 5000 watts of power. The full- rack models can operate at any fixed frequency from 20 to 450 kHz or... [See More]

  • Form Factor: Rack Mount
  • Features: Adjustable Frequency; Over-Power Protection
  • Applications: Semiconductor/Thin Film, RIE, ICP, PVD, Semiconductor Processing
  • DC Output Power: 5000
RF Power Supply -- Paramount
from Advanced Energy Industries, Inc.

Paramount RF power generators combine frequency tuning, pulsing, and complete digital control. Full digital control for dynamic response to plasma changes. Customizable frequency from 400 kHz to 60 MHz and power from 100 W to 8 kW. Advanced features for control optimization and synchronization. [See More]

  • Form Factor: Rack Mount
  • DC Output Power: 1500 to 8000
  • Applications: Semiconductor/Thin Film
  • Output Frequency: 0.4000 to 60
CLX Series - Low Frequency RF Power -- CLX 1000
from Comdel, Inc.

Proven Reliability in Plasma Vacuum Systems Worldwide. Performance: The CLX series low frequency RF power supplies are available in power ranges from 600 to 10,000 Watts with fixed frequencies from 20 kHz to 2 MHz, and frequency agile capability up to 10% bandwidth. The CLX 1000 provides 1000 watts... [See More]

  • Form Factor: Rack Mount
  • Features: Adjustable Frequency; Cooling by Forced Air
  • Applications: Semiconductor/Thin Film, Semiconductor Processing, RIE, CVD, PVD
  • DC Output Power: 1000
CPS Series - High Frequency RF Power -- CPS 1001
from Comdel, Inc.

Solid, Reliable Engineering that Improves Process Results. Performance: With millions of hours in the field, Comdel ’s CPS series generators have proven their ability to withstand erratic loads. Patented S-Technology provides optimized amplifier performance for ultra-stable output by reducing... [See More]

  • Form Factor: Rack Mount
  • Features: Adjustable Frequency (optional feature); Custom Configured Interface
  • Applications: High Frequency, Semiconductor/Thin Film, Etch, RIE, ICP, RF Sputtering, CVD
  • DC Output Power: 1000
CV Series - Very High Frequency (VHF) Power -- CV 1000
from Comdel, Inc.

Performance: Comdel CV series power supplies offer stable VHF power at frequencies from 30 to 80 MHz. The CV 1000 delivers 1000 watts of power. Configured within Comdel's standard control and monitoring package, the CV series offers exceptional ease of operation. RS-232 and analog controls are... [See More]

  • Form Factor: Rack Mount
  • Features: Adjustable Frequency; Active Front Panel Controls,
  • Applications: High Frequency, Semiconductor/Thin Film, Telecommunications, VHF Plasma, Laser, Induction Heating
  • DC Output Power: 1000
CX Series - High Frequency RF Power -- CX 10K
from Comdel, Inc.

High Power Range of the CX Series Family of Products. Performance: The CX high frequency series is available in power ranges of 5000 and 10,000 Watts with fixed frequencies from 2 to 30 MHz, and frequency agile capability up to 10% bandwidth. The CX series provides precise, repeatable power control... [See More]

  • Form Factor: Rack Mount
  • Features: Adjustable Frequency; Active Front Panel with Full Controls
  • Applications: High Frequency, Instrumentation, Military, Semiconductor/Thin Film, Plastic Welding, Silicon Crystal Growing
  • DC Output Power: 10000
CX Series - High Frequency RF Power -- CX 1250
from Comdel, Inc.

Proven Reliability in Plasma Vacuum Systems Worldwide. Performance: The CX series power supplies start at power ranges from 600 to 2500 Watts with fixed frequencies from 2 MHz to 30 MHz, and frequency agile capability up to 10% bandwidth. The solid-state design provides low cost of ownership with... [See More]

  • Form Factor: Rack Mount
  • Features: Adjustable Frequency; Active Front Panel with Full Controls
  • Applications: High Frequency, Semiconductor/Thin Film, Etch, Parallel Plate, RF Sputtering
  • DC Output Power: 1250
CX Series - High Frequency RF Power -- CX 600/H
from Comdel, Inc.

Proven Reliability in Plasma Vacuum Systems Worldwide. Performance: The CX series power supplies start at power ranges from 600 to 2500 Watts with fixed frequencies from 2 MHz to 30 MHz, and frequency agile capability up to 10% bandwidth. The solid-state design provides low cost of ownership with... [See More]

  • Form Factor: Rack Mount
  • Features: Adjustable Frequency; Active Front Panel with Full Controls
  • Applications: High Frequency, Semiconductor/Thin Film, Etch, Parallel Plate, RF Sputtering
  • DC Output Power: 600
Ultra Compact, 2kW, 60MHz RF Generator
from Comdel, Inc.

Performance: Part of our customized product line, this reliable, unique RF power supply can function effectively in a very small space while still delivering robust, reliable power. Its footprint is 4 ” x 4 ” x 12 ” and it is can be pulsed between multiple levels to 100 kHz. Custom... [See More]

  • Form Factor: Rack Mount
  • DC Output Power: 2000
Virtual-Quad RF Power Supply -- CXV 600S
from Comdel, Inc.

The CXV600S Virtual-Quad series RF generator is the ideal solution for applications requiring RF power to be delivered into one of four different locations. With four complete user interfaces, the Virtual-Quad appears as four separate RF generators to the system controller. This allows for... [See More]

  • Form Factor: Rack Mount
  • DC Output Voltage: 0.0 to 10.0
  • Applications: High Frequency, Semiconductor/Thin Film, Fixed and variable frequency, solar cell
  • DC Output Power: 1000
XDC Series - DC Power Supply -- XDC 1000
from Comdel, Inc.

Reliable DC Power in a Compact, Lightweight Design. Performance: The high-quality design of Comdel's XDC 1000 assures ultra reliability, while the small size fits easily into your system. What's more, with the XDC's flexible options and controls, you don't need to purchase a new power supply every... [See More]

  • Form Factor: Rack Mount
  • Features: Adjustable Frequency
  • Applications: Semiconductor/Thin Film, Etch, Parallel Plate, RF Sputtering
  • DC Output Voltage: -5.0 to 10.0