Three-Phase RF Generators

Low-Frequency Power Supply -- PEII
from Advanced Energy Industries, Inc.

The PEII series of power supplies are the trusted standard for dual-magnetron sputtering, as an effective vacuum cleaning tool, and in multiple PECVD applications. Reliable water-cooled design. Delivers tight output regulation on power, voltage, or current, with a measurement accuracy of 1%. [See More]

  • Form Factor: Rack Mount
  • AC Output Voltage: 547.0 to 953.0
  • Applications: Semiconductor/Thin Film
  • AC Output Current: 9 to 32
CB Series - High Frequency RF Power -- CB 1000
from Comdel, Inc.

Comdel's Superior Design and Reliability in a Small, Lightweight Package. Performance: RF generators from the CB product family are available in power ranges from 50 to 5000 Watts with standard fixed frequencies from 13.56 MHz to 60 MHz. The CB 1000 provides 1000 watts of power output in a... [See More]

  • Applications: High Frequency, Semiconductor/Thin Film, Semiconductor Processing, Etch, RIE ICP
  • DC Output Power: 1000
  • Features: Adjustable Frequency (optional feature); HALO, Fixed Match, Master/Slave
  • Output Frequency: 13.56 to 60
Induction Heating Inverter - Standard Dual Inverter Systems -- IHI2-100K-480-M
from Mesta Electronics, Inc.

Features and Benefits. Provides optimal precision and control with output power control resolution of .00625%. Provides greater control stability by varying output voltage instead of frequency. Increased productivity and decreased maintenance costs compared to water cooled systems. Offers efficiency... [See More]

  • Form Factor: Wall Mount (optional feature)
  • DC Output Power: 25000 to 75000
  • Applications: Crystal Growth
  • Output Frequency: 0.0090 to 0.0110
Mid-Frequency Power Supply, PDX® High-power
from Advanced Energy Industries, Inc.

Need a highly efficient, compact, easy-to-integrate power source? The PDX ® series provides extremely accurate, highly repeatable process control, helping to ensure process uniformity and high throughput. It ’s wide frequency range of operation delivers optimal control across numerous... [See More]

  • Form Factor: Rack Mount
  • AC Output Voltage: 735.0
  • Applications: Semiconductor/Thin Film
  • AC Output Current: 14.9
CB Series - High Frequency RF Power -- CB 1250
from Comdel, Inc.

Comdel's Superior Design and Reliability in a Small, Lightweight Package. Performance: RF generators from the CB product family are available in power ranges from 50 to 5000 Watts with standard fixed frequencies from 13.56 MHz to 60 MHz. The CB 1250 provides 1250 watts of power output in a... [See More]

  • Applications: High Frequency, Semiconductor/Thin Film, Semiconductor Processing, Etch, RIE ICP
  • DC Output Power: 1250
  • Features: Adjustable Frequency (optional feature); HALO, Fixed Match, Master/Slave
  • Output Frequency: 13.56 to 60
RF Power Supply -- Cesar
from Advanced Energy Industries, Inc.

Robust and versatile, the Cesar platform provides excellent RF power delivery across a wide range of frequencies and power outputs. Customized performance without custom lead times. Reliable design for maximum uptime. Powerful user interface for easy operation. The proven Cesar platform delivers... [See More]

  • Form Factor: Rack Mount
  • DC Output Power: 600 to 5000
  • Applications: Semiconductor/Thin Film
  • Output Frequency: 2 to 40.68
CB Series - High Frequency RF Power -- CB 5000
from Comdel, Inc.

Comdel's Superior Design and Reliability in a Small, Lightweight Package. Performance: RF generators from the CB product family are available in power ranges from 50 to 5000 Watts with standard fixed frequencies from 13.56 MHz to 60 MHz. The CB 5000 provides 5000 watts of power output in a compact... [See More]

  • Form Factor: Rack Mount
  • Features: Adjustable Frequency (optional feature); HALO, Fixed Match, Master/Slave
  • Applications: High Frequency, Semiconductor/Thin Film, Semiconductor Processing, Etch, RIE ICP
  • DC Output Power: 5000
CDX Series - Dual Frequency Power -- CDX 1000
from Comdel, Inc.

Simplify Operations and Reduce Costs Without Sacrificing Performance. Performance: The CDX 1000 dual frequency RF generator comes in a 1200 watt design. The high frequency (HF) section of the CDX provides 600 watts of power, with optional frequencies from 2 to 60 MHz. The low frequency (LF) section... [See More]

  • Form Factor: Rack Mount
  • Features: Adjustable Frequency; Variable frequency, Power Monitoring
  • Applications: Instrumentation, Semiconductor/Thin Film, Semiconductor, Etch, Deposition
  • DC Output Power: 1200
CLF Series - Low Frequency RF Power -- CLF 5000 Full Rack
from Comdel, Inc.

Stable, Reliable, Low Frequency Power for Industrial Heating and Plasma Processing Applications. Performance: The CLF series generators provide stable process power up to 5 kW. The CLF 5000 provides 5000 watts of power. The full- rack models can operate at any fixed frequency from 20 to 450 kHz or... [See More]

  • Form Factor: Rack Mount
  • Features: Adjustable Frequency; Over-Power Protection
  • Applications: Semiconductor/Thin Film, RIE, ICP, PVD, Semiconductor Processing
  • DC Output Power: 5000
CLX Series - Low Frequency RF Power -- CLX 1000
from Comdel, Inc.

Proven Reliability in Plasma Vacuum Systems Worldwide. Performance: The CLX series low frequency RF power supplies are available in power ranges from 600 to 10,000 Watts with fixed frequencies from 20 kHz to 2 MHz, and frequency agile capability up to 10% bandwidth. The CLX 1000 provides 1000 watts... [See More]

  • Form Factor: Rack Mount
  • Features: Adjustable Frequency; Cooling by Forced Air
  • Applications: Semiconductor/Thin Film, Semiconductor Processing, RIE, CVD, PVD
  • DC Output Power: 1000
CPS Series - High Frequency RF Power -- CPS 1001
from Comdel, Inc.

Solid, Reliable Engineering that Improves Process Results. Performance: With millions of hours in the field, Comdel ’s CPS series generators have proven their ability to withstand erratic loads. Patented S-Technology provides optimized amplifier performance for ultra-stable output by reducing... [See More]

  • Form Factor: Rack Mount
  • Features: Adjustable Frequency (optional feature); Custom Configured Interface
  • Applications: High Frequency, Semiconductor/Thin Film, Etch, RIE, ICP, RF Sputtering, CVD
  • DC Output Power: 1000
CV Series - Very High Frequency (VHF) Power -- CV 1000
from Comdel, Inc.

Performance: Comdel CV series power supplies offer stable VHF power at frequencies from 30 to 80 MHz. The CV 1000 delivers 1000 watts of power. Configured within Comdel's standard control and monitoring package, the CV series offers exceptional ease of operation. RS-232 and analog controls are... [See More]

  • Form Factor: Rack Mount
  • Features: Adjustable Frequency; Active Front Panel Controls,
  • Applications: High Frequency, Semiconductor/Thin Film, Telecommunications, VHF Plasma, Laser, Induction Heating
  • DC Output Power: 1000
CX Series - High Frequency RF Power -- CX 10K
from Comdel, Inc.

High Power Range of the CX Series Family of Products. Performance: The CX high frequency series is available in power ranges of 5000 and 10,000 Watts with fixed frequencies from 2 to 30 MHz, and frequency agile capability up to 10% bandwidth. The CX series provides precise, repeatable power control... [See More]

  • Form Factor: Rack Mount
  • Features: Adjustable Frequency; Active Front Panel with Full Controls
  • Applications: High Frequency, Instrumentation, Military, Semiconductor/Thin Film, Plastic Welding, Silicon Crystal Growing
  • DC Output Power: 10000
CX Series - High Frequency RF Power -- CX 1250
from Comdel, Inc.

Proven Reliability in Plasma Vacuum Systems Worldwide. Performance: The CX series power supplies start at power ranges from 600 to 2500 Watts with fixed frequencies from 2 MHz to 30 MHz, and frequency agile capability up to 10% bandwidth. The solid-state design provides low cost of ownership with... [See More]

  • Form Factor: Rack Mount
  • Features: Adjustable Frequency; Active Front Panel with Full Controls
  • Applications: High Frequency, Semiconductor/Thin Film, Etch, Parallel Plate, RF Sputtering
  • DC Output Power: 1250
Virtual-Quad RF Power Supply -- CXV 600S
from Comdel, Inc.

The CXV600S Virtual-Quad series RF generator is the ideal solution for applications requiring RF power to be delivered into one of four different locations. With four complete user interfaces, the Virtual-Quad appears as four separate RF generators to the system controller. This allows for... [See More]

  • Form Factor: Rack Mount
  • DC Output Voltage: 0.0 to 10.0
  • Applications: High Frequency, Semiconductor/Thin Film, Fixed and variable frequency, solar cell
  • DC Output Power: 1000