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Supplier: ES Systems S.A.
Description: transmitter integrates a MEMS flow sensor and readout electronics inside a housing with very small form factor made from stainless steel. The duty pressure of the flow transmitter is 11bar. All measurement data are fully calibrated, and temperature compensated on board,
- Mass Flow Rate: 4.13 lbs/min
- Electrical Output: Analog Current
- Flow Meter Type: Mass Flow Meter
- Operating Pressure: 160 psi
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Supplier: Omron Electronic Components – Americas
Description: A Compact, High-Accuracy Flow Sensor with Superior Resistance to Environments.• Anti-dust performance is improved using the Cyclon method.• A full lineup of models with different connector types: bamboo joints, lead terminals for direct mounting on-board, and manifolds.• High accuracy
- Gas Volumetric Flow Rate: 0.0353 SCFM
- Electrical Output: Analog Voltage
- End Fittings: Other
- Mounting Type: In-line
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Supplier: Angst+Pfister Sensors and Power
Description: The PFLOW3000 series of mass flow sensors are made with the micromachined (MEMS) sensing elements that offer an innovative thermal sensing principle with excellent linearity and removal of gas sensitivity of some common gases.
- Gas Volumetric Flow Rate: 7.06E-5 to 1.77 SCFM
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Supplier: Siargo Ltd.
Description: FS4000 series mass flow sensors are designed for general purpose flow monitor and control applications, that are made with Siargo's world leading proprietary MEMS mass flow sensors and the smart electronic control system. The sensors directly measure
- End Fittings: Threaded
- Interface Options: Serial / Digital
- Mounting Type: In-line
- Operating Temperature: 14 to 131 F
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Supplier: Siargo Ltd.
Description: MF5000 series mass flow meters are specially designed for small pipe flow monitor and control. This series can measure gas flow in a pipe diameter as small as 0.5 mm, but not over 19 mm. Thanks to the self-flow conditioning feature of the MEMS
- End Fittings: Threaded
- Interface Options: Serial / Digital
- Mounting Type: In-line
- Operating Pressure: 435 psi
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Supplier: Clippard
Description: Precise, linear flow control within a closed-loop system with ultra high resolution and repeatability. The Cordis flow controller utilizes an extremely fast-reacting mems technology sensor upstream from a proportional valve, with the option of a DR-2 regulator for
- Accuracy: 2 ±% FS
- Control Signal Output: Analog Voltage, Current Loop, Serial / Digital
- Control Technique: PID Control
- Form Factor: Panel / Chassis Mount
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Supplier: Bronkhorst USA
Description: IQ+FLOW Chip-sensor based Mass Flow Meters/Controllers for gases Equipment manufacturers are looking for compact solutions to monitor or control the gas flow or pressure in their system. Previously, conventional mass flow and pressure meters and
- Gas Volumetric Flow Rate: 7.06E-6 to 0.1766 SCFM
- Mass Flow Rate: 5.51E-7 to 0.0138 lbs/min
- Electrical Output: Analog Current, Analog Voltage
- End Fittings: Compression, Threaded
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Supplier: Merit Sensor Systems
Description: The RPD Series is a flexible platform with excellent media compatibility. It was designed for a wide range of pressures. Features Range 15 psi to 500 psi (1 to 34.5 mbar; 103 to 3447 KPa) Temperature -40 to +85 °C Type Gage Media Air, gases and liquids Shipping Tape and reel
- Device Category: Sensor
- Media: Liquid, Gas
- Operating Temperature: -40 to 185 F
- Pressure Reading: Gauge
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Supplier: Siargo Ltd.
Description: The insertion mass flow meter series are manufactured using Siargo's proprietary MEMS mass flow sensors and control electronics. They can be applied for large pipe (DN>100mm) gas monitor and measurement.
- Electrical Output: Analog Current, Analog Voltage, Frequency
- End Fittings: Threaded
- Interface Options: Serial / Digital
- Mounting Type: Insertion Type
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Supplier: Bronkhorst USA
Description: IQ+FLOW Chip-sensor based Mass Flow Meters/Controllers for gases Equipment manufacturers are looking for compact solutions to monitor or control the gas flow or pressure in their system. Previously, conventional mass flow and pressure meters and
- Accuracy: 0.8000 ±% FS
- Control Signal Output: Current Loop
- Control Technique: PID Control
- Controller Inputs: DC Voltage Input
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Supplier: Sierra Instruments, Inc.
Description: large touch-screen and automatic screen adjustment, regulate flow rate with the high-resolution value by dialing in your manual setpoint. Easy to read from a distance, unlike hard to read sight-glass meters. Product Benefits Lifetime no-drift sensor warranty - if drift occurs
- Gas Volumetric Flow Rate: 0.0 to 17.66 SCFM
- Features: Audible or Visual Alarms
- Media Temperature: 32 to 122 F
- Mounting Type: In-line
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Supplier: Brooks Instrument
Description: Multiple gases in one device equals maximum process flexibility and productivity. The GF40 Series elastomer sealed mass flow controllers and meters with Brooks Instrument’s exclusive MultiFlo™ technology provide the perfect choice for systems, processes and facilities that use a
- Mass Flow Rate: 8.26E-6 to 0.1376 lbs/min
- Electrical Output: Analog Current, Analog Voltage
- Features: Controller Functions
- Flow Meter Type: Mass Flow Meter
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Supplier: Merit Sensor Systems
Description: 4.5 V, or digital I²C Media Clean, dry air and non-corrosive gases Shipping Tape and reel Flexibility Custom calibration upon request Typical Applications Industrial Filters (air flow via ?? and air pressure) HVAC systems and control units Sensors and transmitters Medical CPAP
- Device Category: Sensor
- Media: Liquid, Gas
- Operating Temperature: -40 to 185 F
- Pressure Reading: Absolute, Gauge
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Supplier: Merit Sensor Systems
Description: 4.5 V, or digital I²C Media Clean, dry air and non-corrosive gases Shipping Tape and reel Flexibility Custom calibration upon request Typical Applications Industrial Filters (air flow via ?? and air pressure) HVAC systems and control units Sensors and transmitters Medical CPAP
- Device Category: Sensor
- Media: Liquid, Gas
- Operating Temperature: -40 to 185 F
- Pressure Reading: Absolute, Gauge
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Supplier: Merit Sensor Systems
Description: 4.5 V, or digital I²C Media Clean, dry air and non-corrosive gases Shipping Tape and reel Flexibility Custom calibration upon request Typical Applications Industrial Filters (air flow via ?? and air pressure) HVAC systems and control units Sensors and transmitters Medical CPAP
- Device Category: Sensor
- Media: Liquid, Gas
- Operating Temperature: -40 to 185 F
- Pressure Reading: Absolute, Gauge
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Supplier: Brooks Instrument
Description: The faster your thermal mass flow controllers and meters respond, the more efficient and productive your processes can be. That’s the key advantage of the 4800 Series controllers and meters: An advanced MEMS-based thermal sensor, combined with a proprietary PID algorithm to
- Mass Flow Rate: 1.38E-4 to 0.1101 lbs/min
- Electrical Output: Analog Current, Analog Voltage
- Features: Controller Functions
- Flow Meter Type: Mass Flow Meter
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Supplier: Honeywell Sensing & IoT
Description: Honeywell Zephyr™ HAF Series sensors provide a digital interface for reading airflow over specified full-scale flow and compensated temperature ranges. The thermally isolated heater and temperature sensing elements help these sensors provide a fast response to air or gas
- Air Volume Flow Rate Range: 0.0 to 0.5297 SCFM
- Air Volumetric Flow: Yes
- Mounting: Fixtured or Permanent
- Operating Temperature: -4 to 158 F
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Supplier: Honeywell Sensing & IoT
Description: Honeywell Zephyr™ HAF Series sensors provide a digital interface for reading airflow over specified full-scale flow and compensated temperature ranges. The thermally isolated heater and temperature sensing elements help these sensors provide a fast response to air or gas
- Air Volume Flow Rate Range: 0.0 to 0.7062 SCFM
- Air Volumetric Flow: Yes
- Mounting: Fixtured or Permanent
- Operating Temperature: -4 to 158 F
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Supplier: Honeywell Sensing & IoT
Description: Honeywell Zephyr™ HAF Series sensors provide a digital interface for reading airflow over specified full-scale flow and compensated temperature ranges. The thermally isolated heater and temperature sensing elements help these sensors provide a fast response to air or gas
- Air Volume Flow Rate Range: 0.0 to 0.0071 SCFM
- Air Volumetric Flow: Yes
- Mounting: Fixtured or Permanent
- Operating Temperature: -4 to 158 F
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Supplier: Honeywell Sensing & IoT
Description: Honeywell Zephyr™ HAF Series sensors provide a digital interface for reading airflow over specified full-scale flow and compensated temperature ranges. The thermally isolated heater and temperature sensing elements help these sensors provide a fast response to air or gas
- Air Volume Flow Rate Range: 0.0 to 7.06 SCFM
- Air Volumetric Flow: Yes
- Mounting: Fixtured or Permanent
- Operating Temperature: -4 to 158 F
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Supplier: Sierra Instruments, Inc.
Description: RedySmart thermal mass flow meters and mass flow controllers with ultra-stable no-drift CMOS (Complementary Metal Oxide Semiconductor) sensor are ideal for BioPharm OEMs with its modular design, cabling system, compact footprint, easy integration into a multi-unit gas
- Gas Volumetric Flow Rate: 0.0 to 17.66 SCFM
- Electrical Output: Analog Voltage
- End Fittings: Compression, VCO® / VCR®, Other
- Features: Recorder / Totalizer Functions
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Supplier: Brooks Instrument
Description: The faster your thermal mass flow controllers and meters respond, the more efficient and productive your processes can be. That’s the key advantage of the 4800 Series controllers and meters: An advanced MEMS-based thermal sensor, combined with a proprietary PID algorithm to
- Accuracy: 3 ±% FS
- Control Signal Output: Analog Voltage, Current Loop
- Number of Control Outputs: 1 outputs
- Number of Inputs: 1 inputs
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Supplier: TSI Incorporated
Description: ,000 g/hr Max. Liquid Flow* DI Water 300 g/hr System Pressure Limit 120 psig Compressed Air 90 to 110 psi Temperature Range 40°C to 200°C Vaporizer Body Vacuum tight chamber with multi-stage heat exchanger, SS 316 construction Temperature Sensor Type K thermocouple Specifications
- Coating System Type: Other
- Technology / Process: Chemical Vapor Deposition (CVD), Physical Vapor Deposition (PVD)
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Supplier: TSI Incorporated
Description: exchanger, SS 316 construction Temperature Sensor Type K thermocouple Specifications subject to change without notice * Liquid and gas flow ranges are affected by liquid and gas type
- Coating System Type: Other
- Technology / Process: Chemical Vapor Deposition (CVD), Physical Vapor Deposition (PVD)
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Supplier: TSI Incorporated
Description: construction Temperature Sensor Type K thermocouple Specifications subject to change without notice * Liquid and gas flow ranges are affected by liquid and gas type
- Coating System Type: Other
- Technology / Process: Chemical Vapor Deposition (CVD), Physical Vapor Deposition (PVD)
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Supplier: TSI Incorporated
Description: /hr System Pressure Limit 120 psig Compressed Air 90 to 110 psi Temperature Range 40°C to 200°C Vaporizer Body Vacuum tight chamber with multi-stage heat exchanger, SS 316 construction Temperature Sensor Type K thermocouple Specifications subject to change without notice * Liquid and
- Coating System Type: Other
- Technology / Process: Chemical Vapor Deposition (CVD), Physical Vapor Deposition (PVD)
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Supplier: Bronkhorst USA
Description: IQ+FLOW® Chip-sensor based Pressure Meters / Controllers Equipment manufacturers are looking for compact solutions to monitor or control the gas flow or pressure in their system. Previously, conventional Mass Flow and Pressure Meters and Controllers have needed
- Accuracy: 0.5000 ±% FS
- Device Category: Transducer
- Electrical Output: Analog Voltage, Analog Current, RS232 / RS485, Other
- Features: Alarm Indicator
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Supplier: Richardson RFPD
Description: SM9000. SMI ULTRA-LOW PRESSURE DIGITAL SENSOR The SM9000 series are digital, ultra-low pressure sensors offeringstate-of-the -art MEMS pressure transducer technology and CMOSmixed signal processing technology to produce a digital, fullyconditioned, multi-order pressure and
- Device Category: Sensor
- Pressure Reading: Differential, Gauge
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Supplier: RS Components, Ltd.
Description: Honeywell Zephyrâ?¢ HAF Series sensors provide a digital interface for monitoring airflow over specified full-scale flow and compensated temperature ranges. The thermally isolated heater and temperature sensing elements help these sensors provide a fast response to air or
- Gas Volumetric Flow Rate: 0.0 to 0.0265 SCFM
- Operating Pressure: 25 psi
- Operating Temperature: -4 F
- Pipe Diameter: 0.2106 inch
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Supplier: RS Components, Ltd.
Description: Honeywell Zephyrâ?¢ HAF Series sensors provide a digital interface for monitoring airflow over specified full-scale flow and compensated temperature ranges. The thermally isolated heater and temperature sensing elements help these sensors provide a fast response to air or
- Gas Volumetric Flow Rate: 0.0 to 0.0018 SCFM
- Operating Pressure: 25 psi
- Operating Temperature: -4 F
- Pipe Diameter: 0.2106 inch
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Supplier: RS Components, Ltd.
Description: Honeywell Zephyrâ?¢ HAF Series sensors provide a digital interface for monitoring airflow over specified full-scale flow and compensated temperature ranges. The thermally isolated heater and temperature sensing elements help these sensors provide a fast response to air or
- Gas Volumetric Flow Rate: 0.0 to 0.0265 SCFM
- Operating Pressure: 25 psi
- Operating Temperature: -4 F
- Pipe Diameter: 0.2106 inch
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Supplier: RS Components, Ltd.
Description: Honeywell Zephyrâ?¢ HAF Series sensors provide a digital interface for monitoring airflow over specified full-scale flow and compensated temperature ranges. The thermally isolated heater and temperature sensing elements help these sensors provide a fast response to air or
- Gas Volumetric Flow Rate: 0.0 to 0.0071 SCFM
- Operating Pressure: 25 psi
- Operating Temperature: -4 to 158 F
- Process Media Type: Gas
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Supplier: ABB Measurement & Analytics
Description: Precise and dynamic direct mass flow measurement of gases for industrial standard applications. High-grade thermal sensor elements – superior long-term stability – effective sensor element protection frame with flow conditioning properties SmartSensor
- End Fittings: Flanged
- Media Temperature Range: -4 to 572 F
- Operating Pressure: 580 psi
- Operating Temperature: -58 to 158 F
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Supplier: Quantachrome Instruments
Description: gas inputs (nitrogen or krypton as adsorbates and helium as carrier) or, optionally, premixed gases, are automatically mixed to the desired target concentrations using built-in mass flow controllers. The system includes novel MEMS-TCD sensors and all standard
- Display & Special Features: Computer Interface / Networkable, Digital Readout, Laboratory / Batch, SPC Software / Capability
- Property Analyzed: Surface Area - Total
- Test Media / Material: Wood / Wood Product
- Total Surface Area Range: 0.0100 m²
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Supplier: ABB Measurement & Analytics
Description: Precise and dynamic direct mass flow measurement of gases for OEM applications. High-grade thermal sensor elements – superior long-term stability – effective sensor element protection frame with flow conditioning properties SmartSensor solution
- Mass Flow Rate: 0.6615 to 11760 lbs/min
- End Fittings: Socket Weld / Union
- Media Temperature: -13 to 302 F
- Mounting Type: In-line
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Supplier: Siargo Ltd.
Description: The FPX4008 proximity switch with mass flow sensing is manufactured using Siargo's proprietary MEMS sensor process that ensures reliability, performance and low cost. The sensors are specially designed for fast response to the air/oil lubricator applications. The surface
- Electrical Output: Analog Voltage
- End Fittings: Threaded
- Interface Options: Serial / Digital
- Meter Technology: Other True Mass Flow Type
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that are used to properly package the resulting biopharmaceuticals. Combining superior physics, high reliability and unparalleled flexibility, RedySmart stands apart from competitive offerings. The RedySmart thermal mass flow meters & mass controllers are MEMS-based (Micro (read more)
Browse Mass Flow Meters and Controllers Datasheets for Sierra Instruments, Inc. -
The new series from Angst+Pfister Sensors and Power is compact and well-suited for direct integration into a product, e.g. in medical devices. Internally, the sensor is based on a MEMS chip that works according to the calorimetric principle and can therefore detect not only the flow rate but (read more)
Browse Mass Flow Meters and Controllers Datasheets for Angst+Pfister Sensors and Power -
Clippard's Cordis CFC Series delivers precise, stable flow control by combining fast MEMs sensing with integrated proportional valve technology in a compact, easy-to-integrate package. • Fast-response MEMs sensors with <1 minute warm-up for quick startup (read more)
Browse Flow Controllers Datasheets for Clippard -
converter for precise signal conditioning and multiple output protocols (4-20mA, 0-10V, RS232/RS485, I2C). Options for gas-tight flow housing or cable-connected sensor heads make it adaptable for applications from gas safety to high-temp measurements. FCX-ML/MP Series: Compact modules with (read more)
Browse Gas Sensors Datasheets for Angst+Pfister Sensors and Power -
heaters as core elements on the sensors. The sensors are applicable in gas (operating temperature range of -20 °C to +400 °C) and liquid (operating temperature range of -50 °C to +180 °C) and can measure flow rates and direction from 0 m/s to 100 m/s. IST AG (read more)
Browse Flow Meters Datasheets for Innovative Sensor Technology IST USA Division -
IST’s New Micro Flow Sensor for Ultra Low Gas-Flow Applications Innovative Sensor Technology has developed a new MFS02 micro flow sensor that utilizes thin film technology to (read more)
Browse Flow Meters Datasheets for Innovative Sensor Technology IST USA Division -
Engineers in search of a reliable solution for wellhead gas flow measurement will find that the flexible Wafer-Cone® Flow Meter from McCrometer provides good accuracy (read more)
Browse Flow Meters Datasheets for McCrometer, Inc. -
To meet specific application needs, a wide range of flow sensing technologies are now available for use in various industries. Commercially available MEMS flow sensors, for instance, are used for thermal mass flow sensing (calorimetric, energy dissipative, or thermal time-of-flight). In the past (read more)
Browse Mass Flow Meters and Controllers Datasheets for Angst+Pfister Sensors and Power -
The PFLOW5002 / PFLOWC5002 series of gas mass flow controllers can be used for general-purpose gas flow monitor and control applications. They are available in standard or manifold configuration for the mechanical connections. Additionally, it is compatible to Axetris Massflow Controller / Flow (read more)
Browse Mass Flow Meters and Controllers Datasheets for Angst+Pfister Sensors and Power -
flow rate and moisture content in various gases and liquids. This webinar will present the anemometric and calorimetric thermal mass flow measurement principles employed by IST AG's thin-film flow sensors. Viewers will also learn about the importance of selecting the right materials for (read more)
Browse Flow Meters Datasheets for Innovative Sensor Technology IST USA Division
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Micro Fluidic Flow and Pressure
The footprint of mass flow and pressure sensors can be substantially. reduced using MST/MEMS. Equipment manufacturers are looking for compact. solutions to monitor or control the gas flow or pressure. within their systems. As these systems are getting smaller. and smaller, the incorporated flow
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Analytical study of resistive MEM gas flow meters
Therefore, the designers of the MEMS gas flow sensors can decide about the position of the sensing elements depend- ing on the required linearity, gas velocity and sensor sen- sitivity, by employing Eq. (6).
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Humidity micro switch based on humidity-sensitive polymers
[13]Quednau, S., Dassinger, F., Schlaak, H.F., “Growth In-Place Integration of Metallic Nanowires into MEMS Gas Flow Sensors “, Sensors and Measuring Systems 2014, (2014).
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MEMSIC’s New Gas Flow Sensor Module to be Showcased at 2012 Sensors Expo
The MFA1100R design is a full electronic MEMS gas flow sensor module that can be directly equipped to a wired as well as wireless system including the MEMSIC eKo system.
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Scientific.Net: Materials Science
Application of the Streamlined Body for Properties Amplification of Thermoresistive MEMS Gas Flow Sensor .
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Simulation of a membrane-based gas flow sensor
Wang, Yu Hsiang, Chen, Chang Pen, Chang, Chih Ming, et al., MEMS based gas flow sensors , Microfluid Nanofluid, 2009, no. 6, pp. 333–346.
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Table of Contents
N\lon-Silicon MEMS Calorimetric Gas Flow Sensor .
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In-plane capacitive MEMS flow sensor for low-cost metering of flow velocity in natural gas pipelines
[1] Y.H. Wang, C.P. Chen, C.M. Chang, C.P. Lin, C.H. Lin, L.M. Fu, C.Y. Lee, “ MEMS -based gas flow sensors ”, J. Microfluid Nanofluid, Volume 6, pp 333-346, 2009.
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A Microcantilever-based Gas Flow Sensor for Flow Rate and Direction
Detection
Broadly speaking, MEMS -based gas flow sensors can be categorized as either thermal or non-thermal, depending upon their mode of operation.
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Air flow sensing using micro-wire-bonded hair-like hot-wire anemometry
[1] Wang Y-H, Chen C-P, Chang C-M, Lin C-P, Lin C, Fu L-M and Lee C-Y 2009 MEMS -based gas flow sensors Microfluid. Nanofluid.
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Electro-thermal analysis of an embedded boron diffused microheater for thruster applications
(2009) MEMS -based gas flow sensors .