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Supplier: Safeguard Analytics
Description: Model SA2-CH4-MEMS smart sensor modules are designed to detect and monitor methane in ambient air. The modules consist of a microelectromechanic al systems (MEMS) gas detection sensor and a micro-processor-base d signal conditioning circuit. Both are housed
- General Gas Types: Combustible Gas
- Measurement Type: Trace
- Number of Gases Sensed: Single Gas
- Operating Humidity: 0.0 to 99 %
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Supplier: ES Systems S.A.
Description: steel. The module can be fitted on a larger housing with a pressure port either by welding or by fitting and O-ring sealing. The ESCP-MIS2 sensor incorporates the ES Systems capacitive MEMS sensor which is based on ES’ proprietary SOI micro-fabrication TM30 process for
- Accuracy: 0.5000 ±% FS
- Device Category: Sensor
- Electrical Output: Other
- Features: Temperature Compensation
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Supplier: ES Systems S.A.
Description: ES Systems has developed a series of board mountable pressure sensors targeting a variety of markets requiring high resolution and accuracy for absolute, gauge or differential pressure measurements. The ESCP-BMS1 is a MEMS capacitive pressure sensor with state-of-the-art
- Accuracy: 0.1500 ±% FS
- Device Category: Sensor
- Electrical Output: Other
- Features: Temperature Compensation
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Supplier: American Sensor Technologies, Inc. - AST
Description: The Model 5000 offers wet/wet differential pressure measurement of both liquids and gases compatible with stainless steel, but without the use of fluid-filled cavities. This eliminates the risk of system contamination and at the same time offers all of the benefits associated with AST's
- Accuracy: 0.3000 ±% FS
- Device Category: Sensor, Transducer
- Electrical Output: Analog Voltage
- Features: Temperature Compensation
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Supplier: ES Systems S.A.
Description: ES Systems has developed ESRF-HF, a family of insertion gas flow transmitters, based on the hot-film anemometer principle for mass gas flow measurements. The ESRF-HF is a family of mass flow transmitters which enable fast and accurate measurements of gas flow over a wide
- Mass Flow Rate: 4.13 lbs/min
- Electrical Output: Analog Current
- Flow Meter Type: Mass Flow Meter
- Operating Pressure: 160 psi
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Supplier: OMEGA Engineering, Inc.
Description: OMEGA’s PX480A Series transducers, designed for general industrial and commercial requirements, offer excellent performance in a wide range of applications. They are based on proven micro-machined silicon technology, providing high reliability, long-term stability, and low cost
- Accuracy: 0.3000 ±% FS
- Device Category: Transducer
- Electrical Output: Analog Voltage
- Features: Temperature Compensation
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Supplier: Dexter Magnetic Technologies, Inc.
Description: signal processing to get the property of interest. They provide reliable data without physical contact even in adverse conditions such as dirt, vibration, moisture, hazardous gas and oil, etc. The most widely used magnetic sensors are variable reluctance, Hall Effect and Reed Switch
- Magnet Type: Magnetic Assembly
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Supplier: Angst+Pfister Sensors and Power
Description: The Series 86 is a miniature and robust pressure transducer with calibrated and temperature compensated output. It incorporates MEMS or ceramic sensing element which is specially designed for space tight environment where conventional transducer is not applicable. Multi-order compensation
- Accuracy: 1 ±% FS
- Operating Temperature: -4 to 185 F
- Pressure Reading: Absolute, Gauge, Other
- Working Pressure Range: 1.45 to 725 psi
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Supplier: RS Components, Ltd.
Description: MEMS-based low-pressure differential/gauge sensors measure the difference in pressure between sources when pressure is applied to both sides of the sensor (differential) and atmospheric pressure (gauged). Pressure Reading Type = Gauge Minimum Pressure Reading = 0kPa Maximum
- Accuracy: 1.5 ±% FS
- Device Category: Sensor
- Electrical Output: Analog Voltage, Other
- Media: Gas, Other
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Supplier: RS Components, Ltd.
Description: MEMS-based low-pressure differential/gauge sensors measure the difference in pressure between sources when pressure is applied to both sides of the sensor (differential) and atmospheric pressure (gauged). Pressure Reading Type = Gauge Minimum Pressure Reading = 0kPa Maximum
- Accuracy: 5 ±% FS
- Device Category: Sensor
- Electrical Output: Analog Voltage, Other
- Media: Gas, Other
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Supplier: RS Components, Ltd.
Description: MEMS-based low-pressure differential/gauge sensors measure the difference in pressure between sources when pressure is applied to both sides of the sensor (differential) and atmospheric pressure (gauged). Pressure Reading Type = Gauge Minimum Pressure Reading = 0kPa Maximum
- Accuracy: 1 ±% FS
- Device Category: Sensor
- Electrical Output: Analog Voltage
- Media: Gas, Other
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Supplier: RS Components, Ltd.
Description: MEMS-based low-pressure differential/gauge sensors measure the difference in pressure between sources when pressure is applied to both sides of the sensor (differential) and atmospheric pressure (gauged). Pressure Reading Type = Gauge Minimum Pressure Reading = 0kPa Maximum
- Accuracy: 2.46 ±% FS
- Device Category: Sensor
- Electrical Output: Analog Voltage, Other
- Media: Gas, Other
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Supplier: Honeywell Sensing & IoT
Description: Honeywell Zephyr™ HAF Series sensors provide a digital interface for reading airflow over specified full-scale flow and compensated temperature ranges. The thermally isolated heater and temperature sensing elements help these sensors provide a fast response to air or gas flow
- Air Volume Flow Rate Range: 0.0 to 0.5297 SCFM
- Air Volumetric Flow: Yes
- Mounting: Fixtured or Permanent
- Operating Temperature: -4 to 158 F
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Supplier: Honeywell Sensing & IoT
Description: Honeywell Zephyr™ HAF Series sensors provide a digital interface for reading airflow over specified full-scale flow and compensated temperature ranges. The thermally isolated heater and temperature sensing elements help these sensors provide a fast response to air or gas flow
- Air Volume Flow Rate Range: 0.0 to 0.7062 SCFM
- Air Volumetric Flow: Yes
- Mounting: Fixtured or Permanent
- Operating Temperature: -4 to 158 F
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Supplier: Honeywell Sensing & IoT
Description: Honeywell Zephyr™ HAF Series sensors provide a digital interface for reading airflow over specified full-scale flow and compensated temperature ranges. The thermally isolated heater and temperature sensing elements help these sensors provide a fast response to air or gas flow
- Air Volume Flow Rate Range: 0.0 to 0.0071 SCFM
- Air Volumetric Flow: Yes
- Mounting: Fixtured or Permanent
- Operating Temperature: -4 to 158 F
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Supplier: Honeywell Sensing & IoT
Description: Honeywell Zephyr™ HAF Series sensors provide a digital interface for reading airflow over specified full-scale flow and compensated temperature ranges. The thermally isolated heater and temperature sensing elements help these sensors provide a fast response to air or gas flow
- Air Volume Flow Rate Range: 0.0 to 7.06 SCFM
- Air Volumetric Flow: Yes
- Mounting: Fixtured or Permanent
- Operating Temperature: -4 to 158 F
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Supplier: ABB Measurement & Analytics
Description: Precise and dynamic direct mass flow measurement of gases for OEM applications. High-grade thermal sensor elements – superior long-term stability – effective sensor element protection frame with flow conditioning properties SmartSensor solution
- Mass Flow Rate: 0.6615 to 11760 lbs/min
- End Fittings: Socket Weld / Union
- Media Temperature: -13 to 302 F
- Mounting Type: In-line
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Supplier: ABB Measurement & Analytics
Description: Precise and dynamic direct mass flow measurement of gases for industrial standard applications. High-grade thermal sensor elements – superior long-term stability – effective sensor element protection frame with flow conditioning properties SmartSensor
- End Fittings: Flanged
- Media Temperature: -4 to 572 F
- Mounting Type: In-line
- Operating Pressure: 580 psi
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Supplier: Sitron
Description: . Single crystal silicon pressure sensor locates on the top of the metal body and stay away from meidium interface to realizes mechanical isolation and thermal isolation. Glass sintering sensor wire realizes high strength electrical insulation of metal base and improves the
- Accuracy: 0.0500 to 0.0750 ±% FS
- Display: Digital
- Electrical Output: Analog Current, HART® Protocol
- Media: Gas
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Supplier: Sitron
Description: . Single crystal silicon pressure sensor locates on the top of the metal body and stay away from meidium interface to realizes mechanical isolation and thermal isolation. Glass sintering sensor wire realizes high strength electrical insulation of metal base and improves the
- Accuracy: 0.0500 to 0.0750 ±% FS
- Electrical Output: Analog Current, HART® Protocol
- Media: Liquid, Gas
- Operating Temperature: -40 to 185 F
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Supplier: Bronkhorst USA
Description: IQ+FLOW Chip-sensor based Mass Flow Meters/Controllers for gases Equipment manufacturers are looking for compact solutions to monitor or control the gas flow or pressure in their system. Previously, conventional mass flow and pressure meters and controllers have needed a
- Gas Volumetric Flow Rate: 7.06E-6 to 0.1766 SCFM
- Mass Flow Rate: 5.51E-7 to 0.0138 lbs/min
- Electrical Output: Analog Current, Analog Voltage
- End Fittings: Compression, Threaded
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Supplier: Bronkhorst USA
Description: IQ+FLOW® Chip-sensor based Pressure Meters / Controllers Equipment manufacturers are looking for compact solutions to monitor or control the gas flow or pressure in their system. Previously, conventional Mass Flow and Pressure Meters and Controllers have needed
- Accuracy: 0.5000 ±% FS
- Device Category: Transducer
- Electrical Output: Analog Voltage, Analog Current, RS232 / RS485, Other
- Features: Alarm Indicator
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Supplier: Brooks Instrument
Description: the number of gas and range-specific controllers they inventory Excellent process gas accuracy backed by superior metrology systems and calibration based on global standards Corrosion-resistant sensor provides unmatched long-term stability ensuring maximum yield and
- Accuracy: 1 ±% FS
- Control Signal Output: Analog Voltage, Current Loop, Serial / Digital, Network / Fieldbus Output
- Media: Gas / Air
- Number of Control Outputs: 1 outputs
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Supplier: Bronkhorst USA
Description: IQ+FLOW Chip-sensor based Mass Flow Meters/Controllers for gases Equipment manufacturers are looking for compact solutions to monitor or control the gas flow or pressure in their system. Previously, conventional mass flow and pressure meters and controllers have needed a
- Accuracy: 0.8000 ±% FS
- Control Signal Output: Current Loop
- Control Technique: PID Control
- Controller Inputs: DC Voltage Input
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Supplier: Newport MKS
Description: The 925-21024 Micro Pirani™ Vacuum Transducer with MEMS-based Micro Pirani™ Vacuum Sensor is a thermal conductivity vacuum gauge with touchscreen display based on a unique, MEMS-based (Micro-Electro-Mecha nical Systems) vacuum sensor. This 925 transducer offers a
- Display: Digital
- Sensor Technology: Other
- Type: Gauge
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Supplier: Newport MKS
Description: The 925-11020 Micro Pirani™ Vacuum Transducer with MEMS-based Micro Pirani™ Vacuum Sensor is a thermal conductivity vacuum gauge based on a unique, MEMS-based (Micro-Electro-Mecha nical Systems) vacuum sensor. This 925 transducer offers a wide measurement range
- Sensor Technology: Other
- Type: Gauge
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Supplier: Newport MKS
Description: The 925-11010 Micro Pirani™ Vacuum Transducer with MEMS-based Micro Pirani™ Vacuum Sensor is a thermal conductivity vacuum gauge based on a unique, MEMS-based (Micro-Electro-Mecha nical Systems) vacuum sensor. This 925 transducer offers a wide measurement range
- Sensor Technology: Other
- Type: Gauge
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Supplier: Newport MKS
Description: The 925-31030 Micro Pirani™ Vacuum Transducer with MEMS-based Micro Pirani™ Vacuum Sensor is a thermal conductivity vacuum gauge based on a unique, MEMS-based (Micro-Electro-Mecha nical Systems) vacuum sensor. This 925 transducer offers a wide measurement range
- Sensor Technology: Other
- Type: Gauge
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Featured Products Top
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. Photoacoustic NDIR Principle: MEMS-based sensor with no traditional optical path for compactness and dust resistance (read more)
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Vibration MEMS Foundry: Smart Sensors for Predictive Maintenance Tronics' MAGELAN Vibration MEMS Foundry empowers predictive maintenance and vibration monitoring applications with high-performance custom MEMS sensors. Our SOI-based platform integrates advanced etching (read more)
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The new series from Angst+Pfister Sensors and Power is compact and well-suited for direct integration into a product, e.g. in medical devices. Internally, the sensor is based on a MEMS chip that works according to the calorimetric principle and can therefore detect not only the flow rate but (read more)
Browse Mass Flow Meters and Controllers Datasheets for Angst+Pfister Sensors and Power -
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A diffusion-based detector, with the gas type and sensitivity range determined by installing an application-specific Model SA2 Smart Sensor module. Equipped with a full color digital display, at startup, the detector automatically identifies the gas type, sensitivity (read more)
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Conduct Research Top
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MEMS Capacitive vs Piezoresistive Pressure Sensors - What are Their Differences?
industry, automation, hydraulics, as well as aeronautics. The majority of the pressure sensors currently installed in the field are based on MEMS technology and utilize either piezoresistive or capacitive measurement principle. In this article, we will be discussing their main differences and we
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GasLab Adds NevadaNano Flammable, Methane, and Refrigerant Gas Sensors
of microelectro mechanical systems (MEMS)-based sensor modules for gas analysis. Using Molecular Property Spectrometer TM (MPS TM) technology, these sensors are essentially a "lab on a chip." Each sensor is capable of not only measuring the target gas, but internally compensating for temperature, barometric
More Information Top
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Enhanced Sensing Characteristics in MEMS-based Formaldehyde Gas Sensor
The methods of detection for formaldehyde gas may divide into three main categories: GC/MS, optical, and MEMS based gas sensor .
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Experimental investigation, modeling, and simulations for MEMS-based gas sensor used for monitoring process chambers in semiconductor manufacturing
Experimental investigation, modeling, and simulations for MEMS based gas sensor used for monitoring process chambers in semiconductor manufacturing .
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A MEMS based acetone sensor incorporating ZnO nanowires synthesized by wet oxidation of Zn film
Several papers have been published on MEMS based gas sensors using either a bridge or a diaphragm structure [20–22].
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Design and simulation of a Micro Hotplate for MEMS based integrated gas sensing system
MEMS based gas sensors showed a very important role in the past decade.
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Enhanced sensing characteristics in MEMS-based formaldehyde gas sensors
The methods of detection for formaldehyde gas may be divided into three main categories: GC/MS, optical detec- tion devices, and MEMS based gas sensors .
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Technological Journey Towards Reliable Microheater Development for MEMS Gas Sensors: A Review
Since the first review in this field by Simon et al. [5] almost a decade ago, the MEMS based gas sensor platform has been investigated extensively by the worldwide researchers and was proved to be a potential replacement for ceramic substrate technology…
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Nanocrystalline mesoporous SMO thin films prepared by sol gel process for MEMS-based hydrogen sensor
The MEMS based gas sensor cell is sketched in Figure 1, and the fabrication process is shown in Figure 2.
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Sensitivity, selectivity and stability of tin oxide nanostructures on large area arrays of
microhotplates
Industries such as Microchemical Systems and Applied Sensors have been developed that sell MEMS based gas sensors including microhotplates today.
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Development of micromachined nanocrystalline mesoporous SnO/sub 2/ gas sensor for electronic nose
The MEMS based gas sensor cell is sketched in Figure 1.
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Low cost packaging for gas sensors
This paper focuses on the packaging needs of a MEMS based gas sensor .