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Supplier: Siargo Ltd.
Description: FS4000 series mass flow sensors are designed for general purpose flow monitor and control applications, that are made with Siargo's world leading proprietary MEMS mass flow sensors and the smart electronic control system. The sensors directly measure
- Operating Temperature: 14 to 131 F
- Process Media Type: Gas
- Features: In-line
- Interface Options: Serial / Digital
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Supplier: Aratas America LLC
Description: A gas flow sensor is capable of "measuring mass flow" independent of temperature and pressure. High Accuracy: ±3%RD (25-100%F.S.) is realized by linear temperature correction using ASIC technology. High Sensitivity:Omron’s unique MEMS technology allows detection of
- Process Media Type: Gas
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Supplier: Angst+Pfister Sensors and Power
Description: The PFLOW3000 series of mass flow sensors are made with the micromachined (MEMS) sensing elements that offer an innovative thermal sensing principle with excellent linearity and removal of gas sensitivity of some common gases.
- Gas Volumetric Flow Rate: 0.00007062933345 to 1.765536723163842 SCFM
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Supplier: Siargo Ltd.
Description: MF5000 series mass flow meters are specially designed for small pipe flow monitor and control. This series can measure gas flow in a pipe diameter as small as 0.5 mm, but not over 19 mm. Thanks to the self-flow conditioning feature of the MEMS
- Pipe Diameter: 0.3149608 inch
- Operating Temperature: -4 to 149 F
- Operating Pressure: 435.110518071591 psi
- Process Media Type: Gas
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Supplier: Siargo Ltd.
Description: The insertion mass flow meter series are manufactured using Siargo's proprietary MEMS mass flow sensors and control electronics. They can be applied for large pipe (DN>100mm) gas monitor and measurement.
- Pipe Diameter: 3.93701 to 62.99216 inch
- Operating Temperature: -4 to 140 F
- Operating Pressure: 362.5920983929925 psi
- Electrical Output: Analog Current, Analog Voltage, Frequency
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Supplier: Honeywell Sensing & IoT
Description: Honeywell Zephyr™ HAF Series sensors provide an analog interface for reading airflow over specified full-scale flow and compensated temperature ranges. The thermally isolated heater and temperature sensing elements help these sensors provide a fast response to air or gas
- Air Volume Flow Rate Range: 0 to 0.02648600004375 SCFM
- Operating Temperature: -4 to 158 F
- Measurement Type: Air Volumetric Flow
- Mounting: Fixtured or Permanent
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Supplier: Honeywell Sensing & IoT
Description: Honeywell Zephyr™ HAF Series sensors provide an analog interface for reading airflow over specified full-scale flow and compensated temperature ranges. The thermally isolated heater and temperature sensing elements help these sensors provide a fast response to air or gas
- Air Volume Flow Rate Range: 0 to 0.007062933345 SCFM
- Operating Temperature: -4 to 158 F
- Measurement Type: Air Volumetric Flow
- Mounting: Fixtured or Permanent
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Supplier: Honeywell Sensing & IoT
Description: Honeywell Zephyr™ HAF Series sensors provide an analog interface for reading airflow over specified full-scale flow and compensated temperature ranges. The thermally isolated heater and temperature sensing elements help these sensors provide a fast response to air or gas
- Air Volume Flow Rate Range: 0 to 0.007062933345 SCFM
- Operating Temperature: -4 to 158 F
- Measurement Type: Air Volumetric Flow
- Mounting: Fixtured or Permanent
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Supplier: Honeywell Sensing & IoT
Description: Honeywell Zephyr™ HAF Series sensors provide an analog interface for reading airflow over specified full-scale flow and compensated temperature ranges. The thermally isolated heater and temperature sensing elements help these sensors provide a fast response to air or gas
- Air Volume Flow Rate Range: 0 to 0.007062933345 SCFM
- Operating Temperature: -4 to 158 F
- Measurement Type: Air Volumetric Flow
- Mounting: Fixtured or Permanent
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Supplier: Bronkhorst USA
Description: IQ+FLOW Chip-sensor based Mass Flow Meters/Controllers for gases Equipment manufacturers are looking for compact solutions to monitor or control the gas flow or pressure in their system. Previously, conventional mass flow and pressure meters and controllers
- Gas Volumetric Flow Rate: 0.00000706214689265537 to 0.176553672316384 SCFM
- Mass Flow Rate: 0.0000005506 to 0.013765 lbs/min
- Operating Temperature: 41 to 122 F
- Operating Pressure: 0 to 2,175.5655 psi
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Supplier: Clippard
Description: Precise, linear flow control within a closed-loop system with ultra high resolution and repeatability. The Cordis flow controller utilizes an extremely fast-reacting mems technology sensor upstream from a proportional valve, with the option of a DR-2 regulator for
- Accuracy: 2 ±% FS
- Control Signal: Analog Voltage, Current Loop, Serial / Digital
- Media: Gas / Air
- Control: PID Control
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Supplier: Sierra Instruments, Inc.
Description: free of charge High-precision MEMS (Micro-Electro Mechanical Systems) technology utilizing an advanced ultra-stable CMOS (Complementary Metal Oxide Semiconductor) sensor Battery-operated, compact design -to accommodate drop-in replacement for any rotameter in the market Mass
- Pipe Diameter: 0.25 to 0.5 inch
- Gas Volumetric Flow Rate: 0 to 17.65536723163842 SCFM
- Operating Temperature: 32 to 122 F
- Operating Pressure: 3 to 160 psi
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Supplier: Sierra Instruments, Inc.
Description: RedySmart thermal mass flow meters and mass flow controllers with ultra-stable no-drift CMOS (Complementary Metal Oxide Semiconductor) sensor are ideal for BioPharm OEMs with its modular design, cabling system, compact footprint, easy integration into a multi-unit gas
- Pipe Diameter: 0.125 to 0.5 inch
- Gas Volumetric Flow Rate: 0 to 17.65536723163842 SCFM
- Operating Temperature: 32 to 122 F
- Operating Pressure: 3 to 160 psi
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Supplier: Brooks Instrument
Description: change gas types frequently or need to re-range while preserving gas measurement and control accuracy. It enables a new level of process flexibility combined with unprecedented flow measurement and control performance. Features Programmable multi-gas/multi-range
- Media Temperature Range: 41 to 122 F
- Operating Pressure: 150 psi
- Mass Flow Rate: 0.000008259 to 0.13765 lbs/min
- Operating Temperature: 41 to 122 F
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Supplier: Brooks Instrument
Description: The faster your thermal mass flow controllers and meters respond, the more efficient and productive your processes can be. That’s the key advantage of the 4800 Series controllers and meters: An advanced MEMS-based thermal sensor, combined with a proprietary PID algorithm to
- Media Temperature Range: 41 to 122 F
- Operating Pressure: 150 psi
- Mass Flow Rate: 0.00013765 to 0.11012 lbs/min
- Operating Temperature: 41 to 122 F
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Supplier: Bronkhorst USA
Description: IQ+FLOW® Chip-sensor based Pressure Meters / Controllers Equipment manufacturers are looking for compact solutions to monitor or control the gas flow or pressure in their system. Previously, conventional Mass Flow and Pressure Meters and Controllers have needed a
- Working Pressure Range: 0.3 to 15 psi
- Accuracy: 0.5 ±% FS
- Operating Temperature: 41 to 122 F
- Measurement Type: Absolute, Gauge
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Supplier: Quantachrome Instruments
Description: inputs (nitrogen or krypton as adsorbates and helium as carrier) or, optionally, premixed gases, are automatically mixed to the desired target concentrations using built-in mass flow controllers. The system includes novel MEMS-TCD sensors and all standard accessories needed for
- Total Surface Area Range: 0.01 m²
- Properties Analyzed: Adsorption / Desorption (Chemisorption/ Physisorption), Surface Area - Total
- Display & Special Features: Computer Interface / Networkable, Digital Readout, SPC Software / Capability
- Mounting / Loading Options: Laboratory / Batch
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Supplier: Merit Sensor Systems
Description: Benefits Excellent performance in both constant current and constant voltage applications Simple pressure attachment and electrical connection Designed for a soldered connection to wires, ribbon cable, or flex strip Typical Applications Medical inflation Water Pressure and flow management
- Working Pressure Range: 0 to 500 psi
- Operating Temperature: -40 to 185 F
- Media: Gas, Liquid
- Measurement Type: Gauge
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Supplier: Merit Sensor Systems
Description: Clean, dry air and non-corrosive gases Shipping Tape and reel Flexibility Custom calibration upon request Typical Applications Industrial Filters (air flow via ΔΡ and air pressure) HVAC systems and control units Sensors and transmitters Medical CPAP Spirometers Ventilators Nebulizers
- Working Pressure Range: 0.15 to 30 psi
- Operating Temperature: -40 to 185 F
- Measurement Type: Absolute, Gauge
- Media: Gas, Liquid
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Supplier: Merit Sensor Systems
Description: Clean, dry air and non-corrosive gases Shipping Tape and reel Flexibility Custom calibration upon request Typical Applications Industrial Filters (air flow via ΔΡ and air pressure) HVAC systems and control units Sensors and transmitters Medical CPAP Spirometers Ventilators Nebulizers
- Working Pressure Range: 0.15 to 1 psi
- Operating Temperature: -40 to 185 F
- Measurement Type: Absolute, Gauge
- Media: Gas, Liquid
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Supplier: Richardson RFPD
Description: SM9000. SMI ULTRA-LOW PRESSURE DIGITAL SENSOR The SM9000 series are digital, ultra-low pressure sensors offeringstate-of-the-art MEMS pressure transducer technology and CMOSmixed signal processing technology to produce a digital, fullyconditioned, multi-order pressure and
- Measurement Type: Differential, Gauge
- Device Category: Sensor
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Supplier: ABB Measurement & Analytics
Description: Precise and dynamic direct mass flow measurement of gases for industrial standard applications. High-grade thermal sensor elements – superior long-term stability – effective sensor element protection frame with flow conditioning properties SmartSensor solution – Meter
- Pipe Diameter: 118 inch
- Operating Temperature: -58 to 158 F
- Operating Pressure: 580 psi
- Media Temperature: -4 to 572 F
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Supplier: TSI Incorporated
Description: Leak Integrity <1 x 10-9 scc/sec Helium Heater Power Requirements 120 VAC, 60 Hz, 300W Carrier Gas Inert gas recommended Gas Inlet Pressure Range 0–80 psig inlet pressure Max. Carrier Gas Flow Rate* N2 15 standard L/min Max. Liquid Flow* TEOS equivalent
- Process: Chemical Vapor Deposition (CVD), Physical Vapor Deposition (PVD)
- Features: Other
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Supplier: TSI Incorporated
Description: Pressure Range 0–80 psig inlet pressure Max. Carrier Gas Flow Rate* N2 50 standard L/min Max. Liquid Flow* TEOS equivalent 6,000 g/hr Max. Liquid Flow* DI Water 600 g/hr System Pressure Limit 120 psig Compressed Air 90 to 110 psi Temperature Range 40°C to 200°C Vaporizer
- Process: Chemical Vapor Deposition (CVD), Physical Vapor Deposition (PVD)
- Features: Other
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Supplier: TSI Incorporated
Description: nut Liquid Inlet 1/8 in. VCR female Vapor Outlet 1/2 in. VCR female Wetted Parts SS 316, Viton Leak Integrity <1 x 10-9 scc/sec Helium Heater Power Requirements 120 VAC, 60 Hz, 300W Carrier Gas Inert gas recommended Gas Inlet Pressure Range 0–80 psig inlet pressure Max. Carrier
- Process: Chemical Vapor Deposition (CVD), Physical Vapor Deposition (PVD)
- Features: Other
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Supplier: TSI Incorporated
Description: scc/sec Helium Heater Power Requirements 110 VAC, 60 Hz, 300W Carrier Gas Inert gas recommended Gas Inlet Pressure Range 0–80 psig inlet pressure Max Carrier Gas Flow* N2 15 standard L/min Max. Liquid Flow* TEOS equivalent 300 g/hr Max. Liquid Flow*
- Process: Chemical Vapor Deposition (CVD), Physical Vapor Deposition (PVD)
- Features: Other
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that are used to properly package the resulting biopharmaceuticals. Combining superior physics, high reliability and unparalleled flexibility, RedySmart stands apart from competitive offerings. The RedySmart thermal mass flow meters & mass controllers are MEMS-based (Micro (read more)
Browse Mass Flow Meters and Controllers Datasheets for Sierra Instruments, Inc. -
The new series from Angst+Pfister Sensors and Power is compact and well-suited for direct integration into a product, e.g. in medical devices. Internally, the sensor is based on a MEMS chip that works according to the calorimetric principle and can therefore detect not only the flow rate but (read more)
Browse Mass Flow Meters and Controllers Datasheets for Angst+Pfister Sensors and Power -
Clippard's Cordis CFC Series delivers precise, stable flow control by combining fast MEMs sensing with integrated proportional valve technology in a compact, easy-to-integrate package. • Fast-response MEMs sensors with <1 minute warm-up for quick startup (read more)
Browse Flow Controllers Datasheets for Clippard -
converter for precise signal conditioning and multiple output protocols (4-20mA, 0-10V, RS232/RS485, I2C). Options for gas-tight flow housing or cable-connected sensor heads make it adaptable for applications from gas safety to high-temp measurements. FCX-ML/MP Series: Compact modules with (read more)
Browse Gas Sensors Datasheets for Angst+Pfister Sensors and Power -
heaters as core elements on the sensors. The sensors are applicable in gas (operating temperature range of -20 °C to +400 °C) and liquid (operating temperature range of -50 °C to +180 °C) and can measure flow rates and direction from 0 m/s to 100 m/s. IST AG (read more)
Browse Flow Meters Datasheets for Innovative Sensor Technology IST USA Division -
IST’s New Micro Flow Sensor for Ultra Low Gas-Flow Applications Innovative Sensor Technology has developed a new MFS02 micro flow sensor that utilizes thin film technology to (read more)
Browse Flow Meters Datasheets for Innovative Sensor Technology IST USA Division -
Engineers in search of a reliable solution for wellhead gas flow measurement will find that the flexible Wafer-Cone® Flow Meter from McCrometer provides (read more)
Browse Flow Meters Datasheets for McCrometer, Inc. -
To meet specific application needs, a wide range of flow sensing technologies are now available for use in various industries. Commercially available MEMS flow sensors, for instance, are used for thermal mass flow sensing (calorimetric, energy dissipative, or thermal time-of-flight). In the past (read more)
Browse Mass Flow Meters and Controllers Datasheets for Angst+Pfister Sensors and Power -
The PFLOW5002 / PFLOWC5002 series of gas mass flow controllers can be used for general-purpose gas flow monitor and control applications. They are available in standard or manifold configuration for the mechanical connections. Additionally, it is compatible to Axetris Massflow Controller / Flow (read more)
Browse Mass Flow Meters and Controllers Datasheets for Angst+Pfister Sensors and Power -
flow rate and moisture content in various gases and liquids. This webinar will present the anemometric and calorimetric thermal mass flow measurement principles employed by IST AG's thin-film flow sensors. Viewers will also learn about the importance of selecting the right materials for (read more)
Browse Flow Meters Datasheets for Innovative Sensor Technology IST USA Division
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Micro Fluidic Flow and Pressure
The footprint of mass flow and pressure sensors can be substantially. reduced using MST/MEMS. Equipment manufacturers are looking for compact. solutions to monitor or control the gas flow or pressure. within their systems. As these systems are getting smaller. and smaller, the incorporated flow
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Analytical study of resistive MEM gas flow meters
Therefore, the designers of the MEMS gas flow sensors can decide about the position of the sensing elements depend- ing on the required linearity, gas velocity and sensor sen- sitivity, by employing Eq. (6).
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Humidity micro switch based on humidity-sensitive polymers
[13]Quednau, S., Dassinger, F., Schlaak, H.F., “Growth In-Place Integration of Metallic Nanowires into MEMS Gas Flow Sensors “, Sensors and Measuring Systems 2014, (2014).
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MEMSIC’s New Gas Flow Sensor Module to be Showcased at 2012 Sensors Expo
The MFA1100R design is a full electronic MEMS gas flow sensor module that can be directly equipped to a wired as well as wireless system including the MEMSIC eKo system.
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Scientific.Net: Materials Science
Application of the Streamlined Body for Properties Amplification of Thermoresistive MEMS Gas Flow Sensor .
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Simulation of a membrane-based gas flow sensor
Wang, Yu Hsiang, Chen, Chang Pen, Chang, Chih Ming, et al., MEMS based gas flow sensors , Microfluid Nanofluid, 2009, no. 6, pp. 333–346.
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Table of Contents
N\lon-Silicon MEMS Calorimetric Gas Flow Sensor .
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In-plane capacitive MEMS flow sensor for low-cost metering of flow velocity in natural gas pipelines
[1] Y.H. Wang, C.P. Chen, C.M. Chang, C.P. Lin, C.H. Lin, L.M. Fu, C.Y. Lee, “ MEMS -based gas flow sensors ”, J. Microfluid Nanofluid, Volume 6, pp 333-346, 2009.
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A Microcantilever-based Gas Flow Sensor for Flow Rate and Direction
Detection
Broadly speaking, MEMS -based gas flow sensors can be categorized as either thermal or non-thermal, depending upon their mode of operation.
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Air flow sensing using micro-wire-bonded hair-like hot-wire anemometry
[1] Wang Y-H, Chen C-P, Chang C-M, Lin C-P, Lin C, Fu L-M and Lee C-Y 2009 MEMS -based gas flow sensors Microfluid. Nanofluid.
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Electro-thermal analysis of an embedded boron diffused microheater for thruster applications
(2009) MEMS -based gas flow sensors .