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Supplier: Palomar Technologies, Inc
Description: residual vacuum MEMS packages. Turbomolecular pump enables vacuum to 10-7 Torr or lower. The in situ Getter Activation maintains long-term low vacuum within package. The precise heat and cool controls allow for accurate control of thermal cycles. It automated linear
- Type: Factory / Free Standing
- Vacuum / Pressure Range: High Vacuum (< 10-3, >10-8 torr)
- Features: Integral Process Controller, MEMS, Other
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Supplier: Merit Sensor Systems
Description: The J Series is ideal for high-volume, low-pressure applications. Features Pressure 1 to 300 psi (0.07 to 21 bar; 7 to 2100 KPa) Temperature -40 to 150 °C Configuration Absolute, gage, differential or vacuum Media Clean, dry air and non-corrosive gases Shipping Wafers on tape, waffle pack
- Working Pressure Range: 1 to 300 psi
- Operating Temperature: -40 to 302 F
- Pressure Measurement: Absolute, Differential, Gauge
- Features: Gas, MEMS, Vacuum
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Supplier: Merit Sensor Systems
Description: The 7000 Series is ideal for high-volume, medium-pressure, small-package OEM applications. Features Pressure 15 to 500 psi (1 to 34.5 bar; 103 to 3,447 KPa) Temperature -40 to 150 °C Configuration Absolute, gage, differential, or vacuum Media Clean, dry air and non-corrosive gases Shipping
- Working Pressure Range: 15 to 500 psi
- Operating Temperature: -40 to 302 F
- Pressure Measurement: Absolute, Differential, Gauge
- Features: Gas, MEMS, Vacuum
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Supplier: Merit Sensor Systems
Description: Are you looking for a MEMS sensing element for a low- to medium-pressure application? Our D Series has been designed with a small footprint (1.4 x 1.4 mm), making it a low-cost option for pressures from 1 to 21 bar. Features Pressure 15 to 300 psi / 1 to 20.7 bar / 103 to 2,068 kPa
- Working Pressure Range: 15 to 300 psi
- Operating Temperature: -40 to 302 F
- Pressure Measurement: Absolute, Differential, Gauge
- Features: Gas, MEMS, Vacuum
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Supplier: Merit Sensor Systems
Description: The AP301 Series is ideal for high-volume, medium-pressure OEM applications. Features Pressure 100 to 1,000 psi (6.9 to 68.9 bar; 689 to 6,895 KPa) Temperature -40 to 150 °C Configuration Absolute, gage, differential, or vacuum Media Clean, dry air and non-corrosive gasses Shipping Wafers on
- Working Pressure Range: 100 to 1,000 psi
- Operating Temperature: -40 to 302 F
- Pressure Measurement: Absolute, Differential, Gauge
- Features: Gas, MEMS, Vacuum
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Supplier: SemiProbe
Description: SA-8VP Semiautomatic Vacuum Probing System The ONLY vacuum probing system designed to grow with your requirements and your business Easily customized to meet a variety of applications and budgets Ideal for MEMS, Sensors, Switches, Microbolometers, or any product that is
- Chamber / Component Type: Glovebox / Weld Chamber
- Vacuum / Pressure Range: High Vacuum (< 10-3, >10-8 torr)
- Features: Other
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Supplier: SemiProbe
Description: SA-8VP Semiautomatic Vacuum Probing System The ONLY vacuum probing system designed to grow with your requirements and your business Easily customized to meet a variety of applications and budgets Ideal for MEMS, Sensors, Switches, Microbolometers, or any product that is
- Maximum Wafer / Part Size: 200 mm
- Measurements: Area Mapping, Electrical Test - Parametric / In-line
- Mounting / Loading: Manual Loading
- Technology: Optical / Imaging System
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Supplier: ATV Technologie GmbH
Description: processing < 20°C/sec. Oxygen < 1,0ppm with purified N2 HELIUM leak rate 5 x 10¯9 mbarl/sec. 100 step recipe Common Applications SRO-714/716 IGBT/DBC Power Semiconductors Sensors/IR Bolometer Detector MEMS Devices DIE Attachment High Power LED Hybrid Assembly Flip Chip Package Sealing
- Temperature Range: 450 F
- External: Bench / Cabinet
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Supplier: ATV Technologie GmbH
Description: IGBT/DBC Power Semiconductors Sensors MEMS Devices DIE Attachment High Power LED Hybrid Assembly Flip Chip Package Sealing
- Temperature Range: 450 to 700 F
- External: Bench / Cabinet
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Supplier: Newport MKS
Description: The 925-11020 Micro Pirani™ Vacuum Transducer with MEMS-based Micro Pirani™ Vacuum Sensor is a thermal conductivity vacuum gauge based on a unique, MEMS-based (Micro-Electro-Mechanical Systems) vacuum sensor. This 925 transducer offers a wide
- Type: Gauge
- Features: Other
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Supplier: Angst+Pfister Sensors and Power
Description: The Series 85 is a miniature and robust pressure transducer with calibrated and temperature compensated output . It incorporates MEMS sensing chip which is specially designed for low pressure application where board-mount is not applicable. Multi-order compensation for correction of offset,
- Working Pressure Range: 0.036259425 to 101.52639 psi
- Accuracy: 0.5 ±% FS
- Operating Temperature: -4 to 185 F
- Pressure Measurement: Differential, Gauge, Vacuum
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Supplier: Newport MKS
Description: The 925-11010 Micro Pirani™ Vacuum Transducer with MEMS-based Micro Pirani™ Vacuum Sensor is a thermal conductivity vacuum gauge based on a unique, MEMS-based (Micro-Electro-Mechanical Systems) vacuum sensor. This 925 transducer offers a wide
- Type: Gauge
- Features: Other
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Supplier: Newport MKS
Description: The 925-21024 Micro Pirani™ Vacuum Transducer with MEMS-based Micro Pirani™ Vacuum Sensor is a thermal conductivity vacuum gauge with touchscreen display based on a unique, MEMS-based (Micro-Electro-Mechanical Systems) vacuum sensor. This 925
- Features: Digital, Other
- Pressure Measurement: Gauge
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Supplier: Newport MKS
Description: The 925-11030 Micro Pirani™ Vacuum Transducer with MEMS-based Micro Pirani™ Vacuum Sensor is a thermal conductivity vacuum gauge based on a unique, MEMS-based (Micro-Electro-Mechanical Systems) vacuum sensor. This 925 transducer offers a wide
- Type: Gauge
- Features: Other
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Supplier: ATV Technologie GmbH
Description: Process temperature up to 450°C Temperature ramp-up rate 3K/sec. Temperature cool-down rate 2K/sec. Excellent temperature uniformity IR Heating Small footprint (No footprint change up to 3 Process Chambers) Common Applications SRO i-Line IGBT/DBC Power Semiconductors Sensors MEMS
- Temperature Range: 450 F
- External: Bench / Cabinet
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Supplier: OMEGA Engineering, Inc.
Description: • FREE! SOFTWARE INCLUDED • Micro-Machined Silicon Sensor • 316L SS Wetted Parts • High Accuracy 0.08% BSL Typical; (0.14% Max) • NIST Traceable Calibration Included • Excellent Long Term Stability • USB 2.0 and Below Compatible • Standard USB Connector Termination • Shock and Vibration Rated
- Vacuum Range: 760 to 778.6826906 torr
- Accuracy: 0.08 ±% FS
- Operating Temperature: -40 to 185 F
- Pressure Measurement: Absolute, Gauge
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Supplier: OMEGA Engineering, Inc.
Description: • Excellent Total Accuracy and Interchangeability • Gage Pressure, Vacuum, and Compound Ranges Available • Rugged Compact Design • RFI/EMI Protection • Reverse Polarity Protection
- Working Pressure Range: 0 to 500 psi
- Vacuum Range: 760 to 1,520.2091475999994 torr
- Accuracy: 0.3 ±% FS
- Operating Temperature: -40 to 176 F
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Supplier: OMEGA Engineering, Inc.
Description: • Digitally Compensated for Low Total Accuracy and Interchangeability • Gage Pressure, Vacuum, and Compound Ranges Available • 1 to 5 Vdc 3 Wire Output • Rugged Compact Design • RFI/EMI Protection • Reverse Polarity Protection
- Working Pressure Range: 0 to 500 psi
- Vacuum Range: 760 to 1,520.2091475999994 torr
- Accuracy: 0.3 ±% FS
- Operating Temperature: -40 to 176 F
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Supplier: OMEGA Engineering, Inc.
Description: • Digitally Compensated for Low Total Accuracy and Interchangeability • Gage, Absolute, Vacuum and Compound Ranges Available • Rugged, Compact Design • RFI/EMI Protection • 316L Stainless Steel Wetted Parts • 1 to 5 Volt Output • PX481A Cable Style and PX481AD Connector Style
- Working Pressure Range: 0 to 3,000 psi
- Vacuum Range: 760 to 1,520.2091475999994 torr
- Accuracy: 0.3 ±% FS
- Operating Temperature: -40 to 176 F
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Description: 4-20 mAmp output 1/4" NPT male pressure port Mini Hirshmann electrical connector 12-30 VDC power
- Working Pressure Range: 15,000 psi
- Accuracy: 0.25 ±% FS
- Pressure Measurement: Absolute, Gauge, Sealed
- Features: Analog Meter, Digital, Gas, Liquid, MEMS, Vacuum
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Supplier: TSI Incorporated
Description: Pressure Range 0–80 psig inlet pressure Max. Carrier Gas Flow Rate* N2 50 standard L/min Max. Liquid Flow* TEOS equivalent 6,000 g/hr Max. Liquid Flow* DI Water 600 g/hr System Pressure Limit 120 psig Compressed Air 90 to 110 psi Temperature Range 40°C to 200°C Vaporizer Body Vacuum tight
- Process: Chemical Vapor Deposition (CVD), Physical Vapor Deposition (PVD)
- Features: Other
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Supplier: TSI Incorporated
Description: recommended Gas Inlet Pressure Range 0–80 psig inlet pressure Max. Carrier Gas Flow Rate* N2 15 standard L/min Max. Liquid Flow* TEOS equivalent 300 g/hr Max. Liquid Flow* DI Water 30 g/hr System Pressure Limit 120 psig Temperature Range 40°C to 200°C Vaporizer Body Vacuum tight chamber with
- Process: Chemical Vapor Deposition (CVD), Physical Vapor Deposition (PVD)
- Features: Other
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Supplier: TSI Incorporated
Description: Pressure Range 0–80 psig inlet pressure Max. Carrier Gas Flow Rate* N2 15 standard L/min Max. Liquid Flow* TEOS equivalent 900 g/hr Max. Liquid Flow* DI Water 90 g/hr System Pressure Limit 120 psig Temperature Range 40°C to 200°C Vaporizer Body Vacuum tight chamber with multi-stage heat
- Process: Chemical Vapor Deposition (CVD), Physical Vapor Deposition (PVD)
- Features: Other
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Supplier: TSI Incorporated
Description: Max. Carrier Gas Flow Rate* N2 20 standard L/min Max. Liquid Flow* TEOS equivalent 600 g/hr Max. Liquid Flow* DI Water 60 g/hr System Pressure Limit 120 psig Temperature Range 40°C to 200°C Vaporizer Body Vacuum tight chamber with multi-stage heat exchanger, SS 316 construction Temperature
- Process: Chemical Vapor Deposition (CVD), Physical Vapor Deposition (PVD)
- Features: Other
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Supplier: American Sensor Technologies, Inc. - AST
Description: The AST2000 is an ASIC-compensated, high quality, stainless steel media isolated pressure sensor designed for use in the measurement of liquids and gases. Intended for high volume applications requiring excellent performance, the AST2000 succeeds by offering high competitive pricing.
- Working Pressure Range: 0 to 1,000 psi
- Accuracy: 0.5 ±% FS
- Operating Temperature: 14 to 158 F
- Pressure Connection Size: 0.125 to 0.4375 inch
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Supplier: American Sensor Technologies, Inc. - AST
Description: The AG200 is a media-isolated, digital pressure gauge that offers a 4-20mA output signal with a large LCD display. Utilizing Krystal Bond Technology, the AG200 provides the same quality and performance as AST's sensors, but through a local readout with a backlight feature. The AG200 also has
- Accuracy: 0.5 ±% FS
- Operating Temperature: 14 to 158 F
- Working Pressure Range: -14.7 to 250 psi
- Pressure Connection Size: 0.125 to 0.25 inch
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Supplier: Sunstone Engineering
Description: Seam sealers are used for lid placement and seam sealing applications to encase electronic components such as crystal devices, MEMS, sensors, optical devices, and other optoelectronic packaging applications. Similar to our other welding products, our seam sealer systems deliver an
- Features: Other
- Applications: Semiconductor Manufacturing
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Supplier: Vaisala
Description: For life science and high technology cleanroom applications A high performance instrument designed primarily for life science and high technology cleanroom applications, the PDT102 features a robust MEMS silicon sensor technology that provides superior accuracy, sensitivity, stability
- Working Pressure Range: 0.725184196785985 psi
- Vacuum Range: 0.37503187770975455 torr
- Accuracy: 0.25 ±% FS
- Operating Temperature: -20.2 to 158 F
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Featured Products Top
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At the 2025 World Robot Conference in Beijing, XJCSENSOR introduced a breakthrough MEMS Force Torque Sensor designed for next-generation robotic systems. As robots advance toward delicate manipulation, dexterous (read more)
Browse Force and Load Sensors Datasheets for XJCSENSOR Technology Co., Ltd. -
Automation in Manufacturing: Fully automated production lines, integrating micro-fused MEMS and AI, make high-performance sensors scalable and cost-efficient. (read more)
Browse Force and Load Sensors Datasheets for XJCSENSOR Technology Co., Ltd. -
The 8MPP2 low-pressure sensor utilizes Sensata’s field-proven automotive Micro-Electro-Mechanical-Systems (MEMS) technology that outputs fully conditioned pressure values via the digital I²C bus. The 8MPP2 features best-in-class performance including high accuracy, low power (read more)
Browse Pressure Sensors Datasheets for Sensata Technologies -
other Hydrogen (H2) gas sensing applications where cost or size may be an issue, look at the Robust Thin Film, Electrochemical and MEMS Solutions available. (read more)
Browse Gas Sensors Datasheets for Electro Optical Components, Inc. -
Dexter Research Center announces the availability of its new ST60 High Temperature Detectors. The specially constructed MEMS based thermopiles (read more)
Browse Noncontact Infrared Temperature Sensors Datasheets for Dexter Research Center, Inc. -
Sense the (EVS-GTR) pressure? Churod Sensing’s Gen II Battery Pressure Sensor combines the accuracy of its Gen I sensor with a cost-driven design. The Gen II is a MEMS-based, PCB-mounted solution (read more)
Browse Pressure Sensor Chips Datasheets for Churod Americas, Inc. -
Economic air pressure sensors is especially designed for racing car and track gas brake systems, it sets a new performance standard for low cost, high volume, commercial and industrial applications. Benefits (read more)
Browse Pressure Sensors Datasheets for Holykell Technology Company Limited -
MEMS, MOS and Catalytic H2 Sensors offer smaller options for monitoring the environment around Hydrogen applications. They also have a wide range of sensitivity. (read more)
Browse Gas Sensors Datasheets for Electro Optical Components, Inc. -
-operated and mobile sensor applications. The patented nanostructured radiation element technology makes these emitters high efficiency (up to 30% compared to 3 to 5% of MEMS). They offer up to 500% more output power than comparable technologies and (read more)
Browse Gas Sensors Datasheets for Electro Optical Components, Inc. -
. Photoacoustic NDIR Principle: MEMS-based sensor with no traditional optical path for compactness and dust resistance (read more)
Browse Gas Sensors Datasheets for Win Source Electronics
Conduct Research Top
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MSilica Nanoparticles Treated by Cold Atmospheric-Pressure Plasmas Improve the Dielectric Performance of Organic-Inorganic Nanocomposites
. The liquid-phase PDMS was made by mixing PDMS. monomers and a curing agent in a 10:1 ratio (Sylgard 184,. Dow Corning, Midland, MI, USA). Bubbles in the liquid. PDMS were removed by exposing the mixture to a. vacuum for 1 h. PDMS liquid was poured onto the silicon. master, cured for 45 min at 1001C
More Information Top
Indicates content that may require registration and/or purchase.
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Micro capacitive vacuum sensor based on MEMS
Studies on MEMS vacuum sensor based on field emission of silicon tips array.
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A MEMS-based vacuum sensor with a PLL frequency-to-voltage converter
THE MEMS VACUUM SENSOR .
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Integrated radioactive thin films for sensing systems
MEMS vacuum sensors have been developed [2-5], which either use thermal conductivity measurement, or utilize diaphragm deflection.
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Radioactively powered pressure transducer with RF pulse output
MEMS vacuum sensors have been developedl2- 51, which eitheruse thermal conductivitymeasurement,or utilize diaphragm deflection.
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Modelling of thermopile-based MEMS sensors using analytical and numerical techniques
Lazi , Z. Djuri , M. Mati , “ Vacuum MEMS Sensor Based on Thermopiles – Simple Model and Experimental Results”, in Proc. 26th Int. Conf. on Microelectronics MIEL 2008, Vol 2, Niš, Serbia, 2008, May 11-14, pp. 367-370 .
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Within-tier cooling and thermal isolation technologies for heterogeneous 3D ICs
[14] D. Randjelovic et al., “ Vacuum MEMS Sensor Based on Thermopiles – Simple Model and Experimental Results,” in Proc. of International Conference on Microelectronics, 2008.
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Helium sensing using multipurpose thermopile-based MEMS devices
Lazić, Z. Djurić, M. Matić, “ Vacuum MEMS Sensor Based on Thermopiles – Simple Model and Experimental Results”, in Proc. 26th Int. Conf. on Microelectronics MIEL 2008, Vol 2, Niš, Serbia, 2008, May 11-14, pp. 367-370.
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Contents
Vacuum MEMS Sensor Based on Thermopiles - Simple Model and Experimental Results D. Randjelovi , V. Jovanov, Ž.
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Products :: Medical Design Briefs
MEMS Pirani Vacuum Sensors .
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Home :: Medical Design Briefs
MEMS Pirani Vacuum Sensors .