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Supplier: Palomar Technologies, Inc
Description: , which can load parts onto the wire bonder while it is bonding. High Vacuum Furnace Applications MEMS Package Sealing Infrared Sensor Package Sealing Crystal Oscillator Package Sealing Hermetic Package Sealing Wafer Level Packaging Void-Free Eutectic Die Attach Low Moisture
- Coating System Type: Factory / Free Standing
- Features: Integral Process Controller?
- Technology / Process: Other
- Vacuum / Pressure Range: High Vacuum (< 10-3, >10-8 torr)
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Supplier: Merit Sensor Systems
Description: Are you looking for a MEMS sensing element for a low- to medium-pressure application? Our D Series has been designed with a small footprint (1.4 x 1.4 mm), making it a low-cost option for pressures from 1 to 21 bar. Features Pressure 15 to 300 psi / 1 to 20.7 bar / 103 to 2,068 k
- Device Category: Sensor
- Media: Gas
- Operating Temperature: -40 to 302 F
- Pressure Reading: Absolute, Differential, Gauge, Vacuum
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Supplier: Merit Sensor Systems
Description: The J Series is ideal for high-volume, low-pressure applications. Features Pressure 1 to 300 psi (0.07 to 21 bar; 7 to 2100 KPa) Temperature -40 to 150 °C Configuration Absolute, gage, differential or vacuum Media Clean, dry air and non-corrosive gases Shipping Wafers on tape
- Device Category: Sensor
- Media: Gas
- Operating Temperature: -40 to 302 F
- Pressure Reading: Absolute, Differential, Gauge, Vacuum
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Supplier: Merit Sensor Systems
Description: The 3000 Series is ideal for high-volume, low-pressure OEM applications. Features Pressure 5 to 100 psi (0.34 to 6.9 bar; 34.5 to 689 KPa) Temperature -40 to 150 °C Configuration Absolute, gage, differential, or vacuum Media Clean, dry air and non-corrosive gases Shipping
- Device Category: Sensor
- Media: Gas
- Operating Temperature: -40 to 302 F
- Pressure Reading: Absolute, Differential, Gauge, Vacuum
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Supplier: Merit Sensor Systems
Description: The AP301 Series is ideal for high-volume, medium-pressure OEM applications. Features Pressure 100 to 1,000 psi (6.9 to 68.9 bar; 689 to 6,895 KPa) Temperature -40 to 150 °C Configuration Absolute, gage, differential, or vacuum Media Clean, dry air and non-corrosive gasses
- Device Category: Sensor
- Media: Gas
- Operating Temperature: -40 to 302 F
- Pressure Reading: Absolute, Differential, Gauge, Vacuum
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Supplier: Palomar Technologies, Inc
Description: , which can load parts onto the wire bonder while it is bonding. High Vacuum Furnace Applications MEMS Package Sealing Infrared Sensor Package Sealing Crystal Oscillator Package Sealing Hermetic Package Sealing Wafer Level Packaging Void-Free Eutectic Die Attach Low Moisture
- Application: Brazing / Soldering, Curing, Industrial, Other
- Computer Interface: Yes
- Configuration: Top Loading
- Controller Type: Programmable
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Supplier: Palomar Technologies, Inc
Description: thermal profiles up to 350°C Processes Void-Free Die Soldering. Void-free die and substrate solder attach is used to create a uniform thermal interface for high-reliability microelectronic devices. High Vacuum MEMS Package Sealing. Advanced MEMS devices
- Application: Brazing / Soldering, Curing, Industrial, Other
- Computer Interface: Yes
- Configuration: Top Loading
- Controller Type: Programmable
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Supplier: Palomar Technologies, Inc
Description: Overview The SST 518 Vacuum/Pressure furnace provides the right combination of performance and value for use in R&D labs to high mix/low volume production environments. Void-free, flux-free solder joints are reliably obtained through a carefully controlled and sequenced combination
- Application: Brazing / Soldering, Curing, Industrial, Other
- Configuration: Top Loading
- Controller Type: Programmable
- Height: 1067 mm
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Supplier: SemiProbe
Description: SA-8VP Semiautomatic Vacuum Probing System The ONLY vacuum probing system designed to grow with your requirements and your business Easily customized to meet a variety of applications and budgets Ideal for MEMS, Sensors, Switches, Microbolometers, or any product that is
- Chamber / Component Type: Glovebox / Weld Chamber
- Flange / Fitting Types: Other
- Vacuum / Pressure Range: High Vacuum (< 10-3, >10-8 torr)
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Supplier: TSI Incorporated
Description: ,000 g/hr Max. Liquid Flow* DI Water 300 g/hr System Pressure Limit 120 psig Compressed Air 90 to 110 psi Temperature Range 40°C to 200°C Vaporizer Body Vacuum tight chamber with multi-stage heat exchanger, SS 316 construction Temperature Sensor Type K thermocouple Specifications
- Coating System Type: Other
- Technology / Process: Chemical Vapor Deposition (CVD), Physical Vapor Deposition (PVD)
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Supplier: TSI Incorporated
Description: * N2 15 standard L/min Max. Liquid Flow* TEOS equivalent 1,200 g/hr Max. Liquid Flow* DI Water 120 g/hr System Pressure Limit 120 psig Compressed Air 90 to 110 psi Temperature Range 40°C to 200°C Vaporizer Body Vacuum tight chamber with multi-stage heat
- Coating System Type: Other
- Technology / Process: Chemical Vapor Deposition (CVD), Physical Vapor Deposition (PVD)
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Supplier: TSI Incorporated
Description: standard L/min Max. Liquid Flow* TEOS equivalent 300 g/hr Max. Liquid Flow* DI Water 30 g/hr System Pressure Limit 120 psig Compressed Air 90 to 110 psi Temperature Range 40°C to 200°C Vaporizer Body Vacuum tight chamber with multi-stage heat exchanger, SS 316
- Coating System Type: Other
- Technology / Process: Chemical Vapor Deposition (CVD), Physical Vapor Deposition (PVD)
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Supplier: TSI Incorporated
Description: Pressure Limit 120 psig Temperature Range 40°C to 200°C Vaporizer Body Vacuum tight chamber with multi-stage heat exchanger, SS 316 construction Temperature Sensor Type K thermocouple Specifications subject to change without notice * Liquid and gas flow ranges are affected by liquid
- Coating System Type: Other
- Technology / Process: Chemical Vapor Deposition (CVD), Physical Vapor Deposition (PVD)
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Supplier: Angst+Pfister Sensors and Power
Description: The Series 85 is a miniature and robust pressure transducer with calibrated and temperature compensated output . It incorporates MEMS sensing chip which is specially designed for low pressure application where board-mount is not applicable. Multi-order compensation for correction of offset
- Accuracy: 0.5000 ±% FS
- Operating Temperature: -4 to 185 F
- Pressure Reading: Differential, Gauge, Vacuum, Other
- Working Pressure Range: 0.0363 to 102 psi
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Supplier: ATV Technologie GmbH
Description: Common Applications SRO-714/716 IGBT/DBC Power Semiconductors Sensors/IR Bolometer Detector MEMS Devices DIE Attachment High Power LED Hybrid Assembly Flip Chip Package Sealing MMICs Transient liquid phase soldering/bonding Ag sintering Thermo compression bonding CPV, Laser bar
- Configuration: Bench / Cabinet
- Temperature Range: 450 F
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Supplier: OMEGA Engineering, Inc.
Description: • FREE! SOFTWARE INCLUDED • Micro-Machined Silicon Sensor • 316L SS Wetted Parts • High Accuracy 0.08% BSL Typical; (0.14% Max) • NIST Traceable Calibration Included • Excellent Long Term Stability • USB 2.0 and Below Compatible
- Accuracy: 0.0800 ±% FS
- Device Category: Transducer
- Electrical Output: Other
- Features: Temperature Compensation
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Supplier: ATV Technologie GmbH
Description: Oxygen < 1,0ppm with PURIFIED N2 100 steps/RECIPE program Common Applications SRO-700 IGBT/DBC Power Semiconductors Sensors MEMS Devices DIE Attachment High Power LED Hybrid Assembly Flip Chip Package Sealing
- Configuration: Bench / Cabinet
- Temperature Range: 450 to 700 F
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Supplier: OMEGA Engineering, Inc.
Description: • Excellent Total Accuracy and Interchangeability • Gage Pressure, Vacuum, and Compound Ranges Available • Rugged Compact Design • RFI/EMI Protection • Reverse Polarity Protection
- Accuracy: 0.3000 ±% FS
- Device Category: Transducer
- Electrical Output: Analog Voltage
- Features: Temperature Compensation
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Supplier: OMEGA Engineering, Inc.
Description: • Digitally Compensated for Low Total Accuracy and Interchangeability • Gage Pressure, Vacuum, and Compound Ranges Available • 1 to 5 Vdc 3 Wire Output • Rugged Compact Design • RFI/EMI Protection • Reverse Polarity Protection
- Accuracy: 0.3000 ±% FS
- Device Category: Transducer
- Electrical Output: Analog Voltage
- Features: Temperature Compensation
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Supplier: SemiProbe
Description: SA-8VP Semiautomatic Vacuum Probing System The ONLY vacuum probing system designed to grow with your requirements and your business Easily customized to meet a variety of applications and budgets Ideal for MEMS, Sensors, Switches, Microbolometers, or any product that is
- Components / Products Tested: Active Components / Semiconductors
- DUT Interfacing / Adapters: Performance Board / Probe Card
- Features: Specialty / Other
- Options / Module Types: Handler / Prober
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Supplier: OMEGA Engineering, Inc.
Description: • Digitally Compensated for Low Total Accuracy and Interchangeability • Gage, Absolute, Vacuum and Compound Ranges Available • Rugged, Compact Design • RFI/EMI Protection • 316L Stainless Steel Wetted Parts • 1 to 5 Volt Output • PX481A Cable Style and PX481AD Connector Style
- Accuracy: 0.3000 ±% FS
- Device Category: Transducer
- Electrical Output: Analog Voltage
- Features: Temperature Compensation
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Description: 4-20 mAmp output 1/4" NPT male pressure port Mini Hirshmann electrical connector 12-30 VDC power
- Accuracy: 0.2500 ±% FS
- Device Category: Transducer
- Display: Analog Meter, Digital
- Electrical Output: Analog Voltage
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Supplier: ATV Technologie GmbH
Description: IGBT/DBC Power Semiconductors Sensors MEMS Devices DIE Attachment High Power LED Hybrid Assembly Flip Chip Package Sealing
- Configuration: Bench / Cabinet
- Temperature Range: 450 F
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Supplier: Newport MKS
Description: The 925-21024 Micro Pirani™ Vacuum Transducer with MEMS-based Micro Pirani™ Vacuum Sensor is a thermal conductivity vacuum gauge with touchscreen display based on a unique, MEMS-based (Micro-Electro-Mecha nical Systems) vacuum sensor. This 925
- Sensor Technology: Other
- Type: Gauge
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Supplier: Newport MKS
Description: The 925-11020 Micro Pirani™ Vacuum Transducer with MEMS-based Micro Pirani™ Vacuum Sensor is a thermal conductivity vacuum gauge based on a unique, MEMS-based (Micro-Electro-Mecha nical Systems) vacuum sensor. This 925 transducer offers a wide
- Sensor Technology: Other
- Type: Gauge
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Supplier: American Sensor Technologies, Inc. - AST
Description: The AST2000 is an ASIC-compensated, high quality, stainless steel media isolated pressure sensor designed for use in the measurement of liquids and gases. Intended for high volume applications requiring excellent performance, the AST2000 succeeds by offering high competitive pricing.
- Accuracy: 0.5000 ±% FS
- Display: Digital
- Electrical Output: Analog Current
- Features: Temperature Compensation
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Supplier: Newport MKS
Description: The 925-11010 Micro Pirani™ Vacuum Transducer with MEMS-based Micro Pirani™ Vacuum Sensor is a thermal conductivity vacuum gauge based on a unique, MEMS-based (Micro-Electro-Mecha nical Systems) vacuum sensor. This 925 transducer offers a wide
- Sensor Technology: Other
- Type: Gauge
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Supplier: Newport MKS
Description: The 925-31030 Micro Pirani™ Vacuum Transducer with MEMS-based Micro Pirani™ Vacuum Sensor is a thermal conductivity vacuum gauge based on a unique, MEMS-based (Micro-Electro-Mecha nical Systems) vacuum sensor. This 925 transducer offers a wide
- Sensor Technology: Other
- Type: Gauge
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Supplier: American Sensor Technologies, Inc. - AST
Description: The AG200 is a media-isolated, digital pressure gauge that offers a 4-20mA output signal with a large LCD display. Utilizing Krystal Bond Technology, the AG200 provides the same quality and performance as AST's sensors, but through a local readout with a backlight feature. The AG200 also has
- Accuracy: 0.5000 ±% FS
- Features: Temperature Compensation
- Material to Measure: Liquid, Gas
- Mount / Connection Location: Bottom
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Supplier: Vaisala
Description: For life science and high technology cleanroom applications A high performance instrument designed primarily for life science and high technology cleanroom applications, the PDT102 features a robust MEMS silicon sensor technology that provides superior accuracy, sensitivity, stability
- Accuracy: 0.2500 ±% FS
- Electrical Output: Analog Voltage, Analog Current
- Features: Negative Pressure Output
- Media: Gas, Other
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Supplier: Sunstone Engineering
Description: Seam sealers are used for lid placement and seam sealing applications to encase electronic components such as crystal devices, MEMS, sensors, optical devices, and other optoelectronic packaging applications. Similar to our other welding products, our seam sealer systems deliver an
- Applications & Materials Processed: Semiconductor Manufacturing
- Coating System Type: Other
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Supplier: Ushio America, Inc.
Description: MEMS Crystal oscillators SAW filters RF devices Sensors Inkjet heads Diodes IGBT Power semiconductors Thyristors MOS-FETs LEDs Power amps MMICs BAW filters
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Supplier: Ushio America, Inc.
Description: lamp – Our own irradiation optical system boasting a high degree of uniformity FEATURES & BENEFITS High resolution The highest line-space resolution of 1 um (vacuum hard contact) is achieved. Proximity lithography achieves high line-space resolution of 3 um
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Supplier: Brooks Instrument
Description: Applications Solar cell chemical vapor deposition systems Life sciences bioreactors Vacuum processes Nanotechnology/MEMS fabrication Plasma, glass and web coating systems Excellent option for manifold/gas delivery systems
- Mass Flow Rate: 8.26E-6 to 0.1376 lbs/min
- Electrical Output: Analog Current, Analog Voltage
- Features: Controller Functions
- Flow Meter Type: Mass Flow Meter
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Supplier: Aerotech, Inc.
Description: sensors in a vacuum and angular testing of inertial sensors such as gyros, MEMS and accelerometers. The AMG LP gimbal design incorporates recent Aerotech rotary stage design improvements to provide high performance at an affordable price. The finest quality motors,
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Supplier: Aerotech, Inc.
Description: testing of space-based sensors in a vacuum and angular testing of inertial sensors such as gyros, MEMS, accelerometers and inertial reference units. The AMG gimbal design incorporates recent Aerotech rotary stage design improvements to provide high performance at an
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At the 2025 World Robot Conference in Beijing, XJCSENSOR introduced a breakthrough MEMS Force Torque Sensor designed for next-generation robotic systems. As robots advance toward delicate manipulation, dexterous (read more)
Browse Force and Load Sensors Datasheets for XJCSENSOR Technology Co., Ltd. -
Traditional six-axis sensors relied on manual strain gauge placement, resulting in high costs and inconsistent quality. XJCSENSOR introduced micro-fused MEMS strain gauge technology, automating key production steps to cut cycle time by over 50%, reduce costs, and enhance reliability. The glue (read more)
Browse Six-axis Force and Torque Sensors Datasheets for XJCSENSOR Technology Co., Ltd. -
Automation in Manufacturing: Fully automated production lines, integrating micro-fused MEMS and AI, make high-performance sensors scalable and cost-efficient. (read more)
Browse Force and Load Sensors Datasheets for XJCSENSOR Technology Co., Ltd. -
The 8MPP2 low-pressure sensor utilizes Sensata’s field-proven automotive Micro-Electro-Mechanical-Systems (MEMS) technology that outputs fully conditioned pressure values via the digital I²C bus. The 8MPP2 features best-in-class performance including high accuracy, low power (read more)
Browse Pressure Sensors Datasheets for Sensata Technologies -
other Hydrogen (H2) gas sensing applications where cost or size may be an issue, look at the Robust Thin Film, Electrochemical and MEMS Solutions available. (read more)
Browse Gas Sensors Datasheets for Electro Optical Components, Inc. -
Dexter Research Center announces the availability of its new ST60 High Temperature Detectors. The specially constructed MEMS based thermopiles (read more)
Browse Noncontact Infrared Temperature Sensors Datasheets for Dexter Research Center, Inc. -
Sense the (EVS-GTR) pressure? Churod Sensing’s Gen II Battery Pressure Sensor combines the accuracy of its Gen I sensor with a cost-driven design. The Gen II is a MEMS-based, PCB-mounted solution (read more)
Browse Pressure Sensor Chips Datasheets for Churod Americas, Inc. -
Economic air pressure sensors is especially designed for racing car and track gas brake systems, it sets a new performance standard for low cost, high volume, commercial and industrial applications. Benefits (read more)
Browse Pressure Sensors Datasheets for Holykell Technology Company Limited -
MEMS, MOS and Catalytic H2 Sensors offer smaller options for monitoring the environment around Hydrogen applications. They also have a wide range of sensitivity. (read more)
Browse Gas Sensors Datasheets for Electro Optical Components, Inc. -
-operated and mobile sensor applications. The patented nanostructured radiation element technology makes these emitters high efficiency (up to 30% compared to 3 to 5% of MEMS). They offer up to 500% more output power than comparable technologies and (read more)
Browse Gas Sensors Datasheets for Electro Optical Components, Inc.
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MSilica Nanoparticles Treated by Cold Atmospheric-Pressure Plasmas Improve the Dielectric Performance of Organic-Inorganic Nanocomposites
. The liquid-phase PDMS was made by mixing PDMS. monomers and a curing agent in a 10:1 ratio (Sylgard 184,. Dow Corning, Midland, MI, USA). Bubbles in the liquid. PDMS were removed by exposing the mixture to a. vacuum for 1 h. PDMS liquid was poured onto the silicon. master, cured for 45 min at 1001C
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Micro capacitive vacuum sensor based on MEMS
Studies on MEMS vacuum sensor based on field emission of silicon tips array.
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A MEMS-based vacuum sensor with a PLL frequency-to-voltage converter
THE MEMS VACUUM SENSOR .
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Integrated radioactive thin films for sensing systems
MEMS vacuum sensors have been developed [2-5], which either use thermal conductivity measurement, or utilize diaphragm deflection.
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Radioactively powered pressure transducer with RF pulse output
MEMS vacuum sensors have been developedl2- 51, which eitheruse thermal conductivitymeasurement,or utilize diaphragm deflection.
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Modelling of thermopile-based MEMS sensors using analytical and numerical techniques
Lazi , Z. Djuri , M. Mati , “ Vacuum MEMS Sensor Based on Thermopiles – Simple Model and Experimental Results”, in Proc. 26th Int. Conf. on Microelectronics MIEL 2008, Vol 2, Niš, Serbia, 2008, May 11-14, pp. 367-370 .
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Within-tier cooling and thermal isolation technologies for heterogeneous 3D ICs
[14] D. Randjelovic et al., “ Vacuum MEMS Sensor Based on Thermopiles – Simple Model and Experimental Results,” in Proc. of International Conference on Microelectronics, 2008.
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Helium sensing using multipurpose thermopile-based MEMS devices
Lazić, Z. Djurić, M. Matić, “ Vacuum MEMS Sensor Based on Thermopiles – Simple Model and Experimental Results”, in Proc. 26th Int. Conf. on Microelectronics MIEL 2008, Vol 2, Niš, Serbia, 2008, May 11-14, pp. 367-370.
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Contents
Vacuum MEMS Sensor Based on Thermopiles - Simple Model and Experimental Results D. Randjelovi , V. Jovanov, Ž.
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Products :: Medical Design Briefs
MEMS Pirani Vacuum Sensors .
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Home :: Medical Design Briefs
MEMS Pirani Vacuum Sensors .