Thin Wafer Check Valves

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  • Designing, simulation and realization of in-plane operating micro valves, using new etching techniques
    In monocrystalline 100 wafers this process can be exploited to etch thin plates oriented along {111} crystallographic planes, which can serve as building blocks of micro devices such as passive check valves .
  • Author index with titles
    … T, Honda N, Ruther P, Gaspar J and Paul O: Seamless interpretation of the strength and fatigue lifetime of polycrystalline silicon thin films 095023 Kang C … … self-priming, high performance, check valve diaphragm micropump made from SOI wafers 125021 Kang K T …
  • A review of microvalves
    Oosterbroek et al [177] reported a new method to fabricate duckbill-like flap microvalves with thin {1 1 1} crystallographic planes on a 1 0 0 silicon wafer by an anisotropic wet etching techniques. The duckbill check valves with dimensions of 1 mm long, 5 µm thick and 300 µm high showed a forward-to-backward flow ratio of about 4.6 at 30 kPa.
  • New design methodologies in (111)-oriented silicon wafers
    Different examples and design "tricks" have been demonstrated such as thin plan-parallel beams, stacked membranes, in-plane deflecting membranes, mask bridges and check valve suspensions. We believe the possibilities of <1 1 1> wafers in micro system technology are underestimated but this …
  • A Parylene micro check valve
    From the back, the underneath thin silicon diaphragm is etched away by BrF3 to expose the photoresist … Following wafer dicing, the micro check valve diaphragm is released after photoresist etching in acetone at room temperature,followedby alcohol and DI water rinse.
  • Passive flow regulators for drug delivery and hydrocephalus treatment
    pillar plate at the bottom, the membrane plate has now ideally no cavity (obtained using a thin wafer , see Figure 7) and the cover plate made of pillars in a cavity in front of the through holes of the membrane. Figure 7: Schematic cross-section of a check - valve .
  • A planar PDMS micropump based on in-contact low-leakage check valves
    Furthermore, a special clamping replica molding technique[10] was exploited to realize the through-opening thin PDMS functional layer that includes the in-contact check valves . The fabrication started with making the SU-8 molding master on a silicon wafer (Fig. 2(a)).
  • Detecting Defects at Sub-Micron Levels
    Today's transistors, for instance, are roughly one-quarter of a micron wide and as thin as one-hundredth of a micron, and minuscule particles from a machine's corroded valves and cylinders can short-circuit them. Current detection techniques, which involve spot- checking the surfaces of silicon wafers by seeing whether light is reflected by particles, detect particles only as small as two-tenths of a micron.
  • Etching methodologies in 〈111〉-oriented silicon wafers
    Different examples and design “tricks” have been demonstrated such as thin plan-parallel beams, stacked membranes, in-plane deflecting membranes, mask bridges, and check valve sus- pensions. wafers in microsystem technology are underestimated, but this wafer type offers much potential for constructing high-quality …
  • Thin-film shape-memory alloy actuated micropumps
    The check valves were fabricated by depositing aluminum on thin silicon diaphragms (fabricated as before). Polyimide is spun on the surface of the wafer and exposed to UV light through a darkfield …