Vacuum Compatible Linear Actuators

Products & Services

See also: Categories | Featured Products | More Information

Find Suppliers by Category Top


More Information Top

Lock Indicates content that may require registration and/or purchase. Powered by IHS Goldfire

  • Nikon EB stepper: its system design and preliminary performance
    Therefore linear motor actuators and vacuum compatible air guides with differential pumping are integrated into the stages to provide higher motion accuracy.12) In order to compensate the stage position errors by electron beam deflection, a subsystem called “Filter/Predictor” is used.
  • Precise positioning of a micro conveyor based on superconducting magnetic levitation
    [3] Y.K. Kim, M. Katsurai and H. Fujita, “A levitation- type linear synchronous micro actuator using the Meissner effect of high-T, Superconductors”, Sensors and … 1991 [4] Y. Maeda, K.Aihara and H.Fujita, “A Vacuum - compatible X-Y Micro actuator…
  • EUV Lithography
    The air pads support the weight of the stage with little friction, and linear motor actuators drive the stage with high acceleration and speed. .... When we use this concept for EUV scanners, we have to modify the system to be vacuum compatible —for example, to place air pads outside the vacuum chamber or to adopt air pads with air inlets surrounding the outlets.
  • http://krex.k-state.edu/dspace/bitstream/handle/2097/1636/VivekRao2009.pdf?sequence=1
    We used a vacuum compatible . .... iniature linear actuator which had 60 mm travel, controlled by RS-232 from the .
  • Cryogenic actuator testing for the SAFARI ground calibration setup
    Some commercial available cryogenic suitable piezoelectric actuators are discussed below. .... The ‘PiezoKnob’ is a linear translator from JPE (Janssen Precision Engineering) that is vacuum and cryogenic compatible , can handle loads up to 100N, and has a maximum linear displacement of 5mm.
  • Design and characterization of an UHV compatible artificial channel cut monochromator
    Chief among them is an UHV- compatible linear slide assembly comprising a precision slide from Alio Industries™, piezoelectric actuators from Nanomotion™, an encoder from Renishaw™, and an ACS Motion™ SPiiPlus stand-alone Ethernet servo controller. .... The combination delivers exceptionally precise closed-loop positioning in vacuum over extended length scales and velocity ranges.
  • Advanced actuation systems — State of the art: Fundamental and applied research
    “Flying carpet” - Planar actuator Positioning systems in high-precision machines often consist of stacked linear drives which are supported by air-bearings. .... To reduce the moving mass and to make the system vacuum compatible (without abrasion and friction), direct-driven magnetically levitated planar actuators are being investigated as alternatives to these stacked drives.
  • Remote micro/nanomanipulation for factory automation
    levitation-type linear synchronous microactuator using the meissner effect of high-T, superconduc- tors,” Sensors and Actuators , 199.1. .... Yoshihiko Maeda, Kazuyuki Aihara, and Hiroyuki Fujita, “A vacuum - compatible x-y microactua- tor using the levitational effect of a superconduc- tor,” Proceedings of the IMACS/SIC Interna- tional Symposium on Robotics, Mechatronics and Manufacturing Systems ’92, 1992.
  • Cryogenic tilt table
    It must also be vacuum compatible . .... Many actuators such as piezo-electric motors and linear solenoids were considered, but voice coils were chosen because of their linearity (easier control algorithm), long travel, high force, high bandwidth, and availability.
  • Precision, range, bandwidth, and other tradeoffs in hexapods with application to large ground-based telescopes
    Figure 6: Cryogenic and vacuum compatible positioning hexapod. .... The stepper motors in the linear actuators are oversized to virtually guarantee accurate rotary motion for each commanded step.