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  • MICRO: Archive: Back Issue TOC
    forms materials unit; Oxford gets Thermo VG; Edlon inks plastics pact with 3P Meeting process and equipment challenges in MEMS deep silicon-etch processes Photomask cleaning tool, wafer transfer/loadlock system, cordless vacuum wafer wand, enclosed adjustable-speed drives, pressure regulator
  • Air spring key to robot handler
    . This is especially helpful when loading bags in which loose materials have settled. Plant air inflates the air spring, with an output from the robot actuating a solenoid valve. A vacuum generator evacuates the air to retract the spring. A triple-redundant system ensures air pressure does not exceed 20 psi

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