Products & Services
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Supplier: RobotWorx
Description: The six-axis SV3CR robot is designed for use in a Class 1 cleanroom environment and is suitable for wafer handling and interbay applications. It can also be used for wafer cassette handling, disk substrate, media handling, and flat panel display
- Number of Axes: 6 #
- Load Capacity: 3 kg
- Reach: 677 mm
- Robot Type: Articulated Robot
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Supplier: RobotWorx
Description: payload and longer reach.bsp; This robot can easily be repositioned for inverse kinematics. By using the Motoman CR20, a flexible handling system can be achieved under high-level clean conditions.bsp; It is ISO Class 3 and is capable of wafer cassette handling and large
- Number of Axes: 6 #
- Load Capacity: 20 kg
- Reach: 1,658 mm
- Robot Type: Articulated Robot
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Supplier: RobotWorx
Description: The Motoman CR3 Clean Robot is a six-axis vertically articulated robot made for cleanroom applications. The CR3 is Class 1 approved for the highest clean environmental conditions according to Federal standards. It has a wide freedom of movement for handling work.bsp; With 6
- Number of Axes: 6 #
- Load Capacity: 3 kg
- Reach: 694 mm
- Robot Type: Articulated Robot
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Supplier: CoorsTek
Description: End effectors, also referred to as semiconductor handling "blades", are the robot's hand to handle and move semiconductor wafers between positions. So end effectors must be dimensionally precise and thermally stable, while having a smooth, abrasion-resistant surface to safely
- Features: Alumina / Aluminum Oxide, Carbide Materials, Silica / Silicate Materials, Specialty Ceramic
- Specialty Ceramic Type: Aluminum Nitride, Quartz, Silicon Carbide, Yttria
- Applications: Chemical / Materials Processing, Wear Parts / Tooling
- Shape / Form: Wafer Carrier / Holder
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Supplier: PTB Sales, Inc.
Description: Ask for current prices. Visit Genmark Automation for more information on these Axcelis tool wafer handling robots.
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Supplier: PTB Sales, Inc.
Description: Ask for current prices. Visit Genmark Automation for more information on these Axcelis tool wafer handling robots.
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Supplier: 3X Ceramic Parts Company Limited
Description: Alumina Ceramic Robot Arm F Type CNC machined The ceramic robot arm provided by our company is mainly divided into clamping type, bearing type and vacuum adsorption type. The sizes are 2 ", 4", 6 ", 8", 12 ", and non-standard sizes can be customized. The F-type left and right vacuum
- Density: 3.8999975386044725 g/cc
- Compressive / Crushing Strength: 377,095.7823287122 psi
- Material Type: Alumina / Aluminum Oxide
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Supplier: Brooks Automation, Inc.
Description: PAVS6 is designed for use in cleanroom environments, making it ideal for handling delicate and sensitive components in the semiconductor and electronics industries. It is typically used in applications such as wafer handling, material transfer, and other similar tasks in the
- Number of Axes: 6 #
- Load Capacity: 7 kg
- Reach: 770 mm
- Industry / Application: Assembly, Inspection, Material Handling (e.g., Loading/Unloading, Palletizing)
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Supplier: Brooks Automation, Inc.
Description: assembly, and inspection. The PP100 is designed for use in cleanroom environments, making it ideal for handling delicate and sensitive components in the semiconductor and electronics industries. It is typically used in applications such as wafer handling, material transfer, and
- Number of Axes: 6 #
- Load Capacity: 2 kg
- Reach: 663 mm
- Industry / Application: Assembly, Inspection, Material Handling (e.g., Loading/Unloading, Palletizing)
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Supplier: TSI Incorporated
Description: This fully automated particle deposition system deposits PSL and SiO2 spheres as small as 20 nm. Calibrate and qualify your defect inspection tools with ease, confidence, and efficiency by producing high volumes of high-quality custom 300 mm and 200 mm calibration standards. Robotic wafer
- Maximum Wafer / Part Size: 200 to 300.00000000000006 mm
- Applications: CVD / PVD Films, Semiconductor Wafers
- Mounting / Loading: Floor Mounted / Stand-alone
- Features: Other
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Supplier: TSI Incorporated
Description: This fully automated particle deposition system deposits PSL and SiO2 spheres as small as 10 nm. Calibrate and qualify your defect inspection tools with ease, confidence, and efficiency by producing high volumes of high-quality custom 300 mm and 200 mm calibration standards. Robotic wafer
- Maximum Wafer / Part Size: 200 to 300.00000000000006 mm
- Applications: CVD / PVD Films, Semiconductor Wafers
- Mounting / Loading: Floor Mounted / Stand-alone
- Features: Other
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Supplier: Radwell International
Description: DISCONTINUED BY MANUFACTURER, SERVO POSITIONING CONTROLLER, WAFER HANDLING ROBOT CONTROLLER, 90-132 VAC, 47-66 HZ, 15 AMP/ 250 V. FREE 2 YEAR RADWELL WARRANTY
- Continuous Output Current: 15 amps
- Supply Voltage (AC): 132 volts
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Supplier: SemiProbe
Description: semiautomatic 150 mm system that meets their precise specifications and requirements. The Probe System for Life (PS4L) family of wafer probing systems is designed based on SemiProbe's patented adaptive architecture. Unlike traditional probe systems, all foundation modules - bases, stages,
- Maximum Wafer / Part Size: 150.00000000000003 mm
- Measurements: Electrical Test - Parametric / In-line
- Mounting / Loading: Manual Loading
- Technology: Optical / Imaging System
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Supplier: Precision Polymer Engineering Ltd.
Description: High purity, Perlast® and Kimura® materials are widely used in wafer handling applications as end-effector pads because they provide optimized friction to maintain wafer positional accuracy, and prevent particulation due to their wholly organic nature. PPE are experts in
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Supplier: Renbrandt, Inc.
Description: These couplings are especially designed for precision instruments. encoder drives. robotics. aircraft equipment. radar. laser. optical/mechanical devices. computers. precision remote controls. UNEQUALED PERFORMANCE. Some of the features are: Zero backlash. Low inertia. Handles offset and angular
- Bore Diameter: 0.09 to 0.185 inch
- Coupling Diameter: 0.75 inch
- Rated Torque: 1.875 In-lbs
- Rated Speed: 5,000 rpm
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Supplier: Filmetrics, Inc.
Description: notch finding, automatic on-board baselining, an enclosed measurement stage with motion interlock, an industrial computer with pre-installed software, and cassette-to-cassette robotic wafer handling. The different F60-c instruments are distinguished primarily by thickness and
- Measurements: Area Mapping
- Applications: CVD / PVD Films, Semiconductor Wafers
- Mounting / Loading: In-situ / System Mounted
- Form Factor: Monitor / Instrument
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Supplier: Filmetrics, Inc.
Description: baselining, an enclosed measurement stage with motion interlock, an industrial computer with pre-installed software, and the option to upgrade to fully robotic wafer handling. The different F60-t instruments are distinguished primarily by thickness and wavelength range. Generally
- Measurements: Area Mapping
- Applications: CVD / PVD Films, Semiconductor Wafers
- Mounting / Loading: In-situ / System Mounted
- Form Factor: Monitor / Instrument
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Supplier: Broadcom Inc.
Description: servo and stepper motor feedback systems, robotic arms and wafer-handling machines. Avago also offers a wide range of accessories to complement its encoder products. These accessories include cables, connectors, code wheels and alignment tools. The company offers the industry encoder
- Operating Temperature: -40 to 185 F
- Features: Digital, Incremental, Optical, Signal Quadrature
- Sensor Technology: Linear Encoder
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Supplier: Shenzhen Jewellok Technology Co., Ltd.
Description: dispense exact volumes of chemicals. They are essential for applications requiring precise recipe control, such as photoresist coating or wafer cleaning. By automating the dispense cycle, CDUs eliminate the variability and safety risks associated with manual handling. Semi & Fully
- Body Material: Stainless Steel
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Featured Products Top
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PPE are experts in providing low contact force solutions for your wafer handling requirements. The PPE range of materials includes elastomers with both low and high coefficients of friction, to allow tailoring of wafer retention force. High purity elastomer materials, such as PPE (read more)
Browse Rubber and Elastomer Molding Services Datasheets for Precision Polymer Engineering Ltd. -
features help engineers maintain process stability and yield. For advanced wafer handling or precision automation, contact us for custom ceramic solutions. Our (read more)
Browse Industrial Ceramic Materials Datasheets for Fountyl Technologies Pte. Ltd. -
Beyond semiconductor wafer handling, these high-performance end effectors are ideal for precision machining, medical robotics demanding biocompatibility, and chemical processing equipment operating in (read more)
Browse Aluminum Oxide and Alumina Ceramics Datasheets for Fountyl Technologies Pte. Ltd. -
INSACO Offers Wafer Carriers With or Without Multiple Holes INSACO, Inc has become recognized as a worldwide leader in custom machined ceramic and sapphire parts for the semiconductor industry. Through this experience (read more)
Browse Glass Fabrication Services Datasheets for Insaco, Inc. -
Watch>> - Sapphire for GaAs, Indium Phosphide, & Other Semiconductors Sapphire Wafer Carriers (read more)
Browse Wafer Cassettes Datasheets for Insaco, Inc. -
Watch>> - Sapphire for GaAs, Indium Phosphide, & Other Semiconductors Sapphire Wafer Carriers (read more)
Browse Wafer Cassettes Datasheets for Insaco, Inc. -
High-Precision Alumina Ceramic End Effector Tailored for Semiconductor Wafer Handling This end effector is made from premium alumina ceramic, combining exceptional wear and (read more)
Browse Aluminum Oxide and Alumina Ceramics Datasheets for Fountyl Technologies Pte. Ltd. -
Product Overview Used in semiconductor wafer transfer robots, sorters, and inspection equipment for handling wafers in cleanroom and vacuum environments. Fountyl ceramic end effectors are manufactured from high-purity alumina (Al2O3 99.5%) and silicon carbide (SiC 99 (read more)
Browse Industrial Ceramic Materials Datasheets for Fountyl Technologies Pte. Ltd. -
Semiconductor Manufacturing: Precision wafer handling, pick-and-place, and assembly Reliable Performance for Engineers XJCSENSOR multi-axis force sensors help engineers achieve accurate motion control, optimize automation (read more)
Browse Six-axis Force and Torque Sensors Datasheets for XJCSENSOR Technology Co., Ltd. -
Every wafer in a semiconductor fab is handled — picked, placed, transferred — by a robot end effector. It is the single point of contact between the automation system and the product. For decades, aluminum has been the standard material. But as wafer sizes grew and critical (read more)
Browse Industrial Ceramic Materials Datasheets for Fountyl Technologies Pte. Ltd.
Conduct Research Top
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Impact of Thermal Limits on Motor Performance
For semiconductor equipment, motors are essential components, and are used in various systems such as indexing (theta) tables and wafer-handling robots. Motor torque is extremely important, but to get higher torque, you need to apply higher current. As current increases, motor winding temperature
More Information Top
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Intelligent Robotics and Applications
In the paper “A Study of Magnetic Fluid Rotary Seals for Wafer Handling Robot ” [12], we analyzed the relationship of the seal pressure differential and the tooth parameters.
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Intelligent Robotics and Applications
Decoupling Control Based on Dynamic Model of 4-DOF Wafer Handling Robot . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
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Wafer eccentricity estimation with disturbance caused by alignment notch
Index Terms—Alignment notch, wafer handling robot , semiconductor manufacturing, Dynamic wafer handling, robot calibration .
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机械工程学报
Key words: magnetic fluid, seals, coaxial twin-shaft, magnetic field, wafer handling robot .
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Wafer admission control for clustered photolithography tools
The output of the algorithm is suggested wafer entry times to the tool and is intended to be used by the wafer handling robot as a guideline.
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Scientific.Net: Materials Science
Home > Wafer Handling Robot .
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http://repositories.lib.utexas.edu/bitstream/handle/2152/21566/COSTUROS-DISSERTATION-2013.pdf?sequence=1
DC-bias to assess system degradation on a wafer handling robot .
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A Study of Topology Optimization Design for the Wafer Handling Robot Arm
• A Study of Topology Optimization Design for the Wafer Handling Robot Arm p.471 .
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Adept Technology Announces New Wafer Handling Robots for Semiconductor Automation Industry
Adept Technology Announces New Wafer Handling Robots for Semiconductor Automation Industry .
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A review of scheduling theory and methods for semiconductor manufacturing cluster tools
Cluster tools, which combine several single-wafer process- ing modules with wafer handling robots in a closed envi- ronment, have been increasingly used for most wafer fabri- cation processes.
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