Fabrication of GaAs Devices

| Acronym | Chapter | Meaning |
|---|---|---|
| 2DEG | 1 | two-dimensional electron gas |
| AES | 3 | Auger electron spectroscopy |
| ALE | 2 | atomic layer epitaxy |
| AR | 3 | anti-reflection |
| AUD | 3 | advanced unified defect (model) |
| BJT | 1, 9 | bipolar junction transistor |
| BOE | 8 | buffered-oxide etch |
| CAIBE | 5 | chemically assisted ion-beam etching |
| CBM | 3 | conduction band minimum |
| CMOS | 1, 3, 8, 10 | complementary metal oxide semiconductor |
| CRT | 2 | cathode-ray tube |
| C-V | 2, 3, 7 | current-voltage |
| CZ | 1 | Czochralski |
| DBR | 10 | distributed Bragg reflector |
| DC | 2, 3, 5, 7 9 | direct current |
| DEB | 3, 4, 10 | distributed feedback |
| DH | 1 | double heterostructure |
| DHBT | 9 | double heterojunction bipolar transistor |
| DI | 3, 4 | de-ionised |
| DIGS | 3 | disorder-induced gap state (model) |
| DLTS | 2 | deep level transient spectroscopy |
| EBIC | 2 | electron-beam-induced current |
| ECR | 3, 5, 8, 9 | electron-cyclotron resonance |
| EDS | 2 | energy-dispersive spectrometer |
| EDX | 3, 9 | energy-dispersive X-ray analysis |
| EMP | 2 | electron microprobe (analysis) |
| EW | 1 | electronic warfare |
| EWF | 3 | effective work function (model) |
| FET | 1 4, 6 9 | field effect transistor |
| FIB | 2, 5 | focused ion beam |
| FWHM | 2 | full width at half maximum |
| GMR | 3 | giant magnetoresistance |
| GOI | 10 | GaAs-on-insulator |
| HBT | 1 6, 8, 9 | heterojunction bipolar transistor |
| HDP | 3 | high-density plasma |
| HDPE | 5 | high-density-plasma etching |
| HEMT | 1, 2, 5, 7, 8 | high electron mobility transistor |
| IBAE | 5 | ion-beam-assisted etching |
| IBE | 5 | ion-beam etching |
| IC | 1 | integrated circuit |
| ICP | 3, 5, 9 | inductively coupled plasma |
| IMPATT | 1 | impact avalanche and transit time |
| IR | 6, 7 | infrared |
| JFET | 1 | junction field effect transistor |
| LCR | 2 | inductance, capacitance, resistance |
| LD | 1, 9 | laser diode |
| LDD | 7, 8 | lightly... |