TABLE OF CONTENTS The ULSl technology has brought about a great demand for understanding and controlling of the mechanical properties as well as electromigration in thin films, e. g., see Kraft and Arzt (1998) Nix (1997) Koch (1994) and references therein. Some new materials are synthesized as thin films, where the elasticity study may give an insight into their properties. For example, although cementite, Fe 3C, is a classic material, its Young's modulus has not been measured because no bulk specimens of Fe 3C have been available. Very recently, a single phase Fe 3C can be synthesized as films several hundred nm thick (Yumoto, et al., 1996a. 1996b) and its Young's modulus is determined by means of the recently developed elasticity methods (Li, et al., 1998; Mizubayashi, et al., 1999a). The present section is devoted to the vibrating reed method oriented to thin film measurements and its application to Ag nm films, Al nm films and Ag/Pd multilayer films.
Figure 9.1 (a) is a schematic of a silicon reed substrate which has been cut out from a FZ-Si single crystal and polished into a vibrating reed with a thick end for clamping (Mizubayashi, et al., 1992, 1999b). The surface 1 scheduled for deposition of a thin film specimen is a mirror surface, and the surface 2 for deposition of an electrode is a smooth surface with small undulations. Homogeneity...
