Materials Science in Microelectronics: The Effects of Structure on Properties in Thin Films, Volume II, Second Edition

References

1. (a) H.J. Wollenberger, in Physical Metallurgy, 3rd edition, eds. R.W. Cahn and P. Haasen, North-Holland, Amsterdam, 1983, p. 1146; (b) J.R. Lloyd and S. Nakahara, J. Appl. Phys. 48, 5092( 1978); (c) From C.E. Botez et al., MRS Symp. Proc. 749, W8.1.1( 2003).

2. (a) S.M. Rossnagel and J.J. Cuomo, Thin Solid Film. 171, 143( 1989); (b) D.L. Dexter, Phys. Rev. 86, 770( 1952).

3. J.W.C. de Vries, Thin Solid Film. 167, 25( 1988).

4. J.W.C. de Vries, Thin Solid Film. 150, 201, 209( 1987); J. Phys. F 17, 1945( 1987).

5. J.R. Sambles, K.C. Elson and D.J. Jarvis, Phil. Trans. Roy. Soc. Lond. Ser. A 304, 365( 1982); J.R. Sambles, Thin Solid Film. 106, 321( 1983).

6. P. Ziemann and E. Kay, J. Vac. Sci. Tech. A1, 512( 1983).

7. A.F Mayadas, M. Shatzkes and J.F Janak, Appl. Phys. Lett. 14, 345( 1969).

8. E. Conwell and V.F Weisskopf, Phys. Rev. 77, 388( 1950).

9. W. Shockley, in Electrons and Holes in Semiconductors, D. VanNostrand, New York, 1950.

10. M.Y. Ghannam, in Advanced Silicon and Semiconducting Silicon-Alloy Based Materials and Devices, eds. J.F.A. Nijs et al., IOP Publishing, Bristol, 1994, p. 413.

11. D.L. Dexter and F Seitz, Phys. Rev. 86, 964( 1952

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