TABLE OF CONTENTS The first reports of the deposits known today as plasma polymers appeared in the second half of the 19 th century [1], [2]. Several papers treating these films and related to plasma polymerization processes were published in the 1930s [3] [4] [5] [6] and more attention was paid to the subject in the 1950s [9] [10]. K nig and Helwig [7] deliberately deposited films that would be described nowadays as hydrocarbon plasma polymers. Basically, they used a glass bell-jar with parallel plate electrodes (made of Al) that were powered by singly rectified 50 Hz voltage up to 2 kV. Their "pulsing" DC glow discharge was operated in benzene vapours and films were deposited on various substrates resting on the anode. Films up to 1 ?m thick on glass were yellowish in transmitted light and their density was about 1.4 g/cm 3 and electrical conductivity was 10 ?9 ? ?1 cm ?1. After annealing these films started to change at 100 C and at 400 C turned fully into carbonaceous films. The use of these films for carbon foils was proposed. Brokes and K nig [8] deposited films not only from benzene but also from methane and presented their absorption IR spectra. The absorption IR spectra, and the absorption in the visible region of light of plasma polymerized benzene films deposited at the increased...
