TABLE OF CONTENTS 
Library of Congress Cataloging-in-Publication Data
A catalog record for this book is available from the U.S. Library of Congress.
British Library Cataloguing in Publication Data
Beeby, Stephen.MEMS mechanical sensors.- (Artech House MEMS library)
621.3'81
Cover design by Igor Valdman
2004 ARTECH HOUSE, INC.
685 Canton Street
Norwood, MA 02062
All rights reserved. Printed and bound in the United States of America. No part of this book may be reproduced or utilized in any form or by any means, electronic or mechanical, including photocopying, recording, or by any information storage and retrieval system, without permission in writing from the publisher.
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International Standard Book Number: 1-58053-536-4
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About the Authors
Stephen Beeby is a senior research fellow in the School of Electronics and Computer Science at the University of Southampton, United Kingdom. He holds a B.Eng. (Hons.) in mechanical engineering from the University of Portsmouth, United Kingdom, and a Ph.D. in mechanical engineering from the University of Southampton.
Graham Ensell is a senior...
