High Purity Gas Gas Pressure Regulators

Last Updated: April 1, 2025

Description

High purity gas pressure regulators are designed to provide diffusion resistance and facilitate easy cleanup. These regulators are specifically constructed to minimize or eliminate inboard diffusion through the use of metal diaphragms and high-purity seats and seals. This ensures that the gases being regulated maintain their purity and integrity throughout the process.

Working Principle

High purity gas pressure regulators operate by using a diaphragm and a spring mechanism to control the pressure of the gas. The diaphragm acts as a sensor, detecting changes in pressure, while the spring provides the necessary force to adjust the valve position. When the inlet pressure increases, the diaphragm moves, compressing the spring and causing the valve to close slightly, thus reducing the outlet pressure. Conversely, if the outlet pressure drops, the spring pushes the diaphragm back, opening the valve to increase the pressure. This balance ensures a stable and controlled gas flow, which is crucial for maintaining the purity of the gas.

Applications

High purity gas pressure regulators are used in applications where maintaining the purity of the gas is critical. Specific examples include:

  • Portable analytical instruments that require precise gas control to ensure accurate measurements.
  • Hydrogen fuel cells, where the purity of hydrogen is essential for efficient energy conversion.
  • Medical devices that rely on high purity gases for patient safety and effective operation.

Advantages over other Gas Pressure Regulators

High purity gas pressure regulators offer several advantages over general-purpose regulators. They are specifically designed to prevent contamination and maintain gas purity, which is not a primary focus of general-purpose regulators. The use of metal diaphragms and high-purity seals reduces the risk of inboard diffusion, making them ideal for applications where gas purity is paramount.

Limitations

One limitation of high purity gas pressure regulators is their sensitivity to physical damage due to the delicate nature of the metal diaphragms used. This makes them less suitable for environments where they might be exposed to mechanical stress or impact.

Considerations

When selecting high purity gas pressure regulators, several factors should be considered:

  • Initial Costs: These regulators may have higher initial costs due to their specialized construction and materials.
  • Operating Expense: The need for maintaining high purity may lead to higher operating expenses, especially if frequent calibration or maintenance is required.
  • Durability: While they are designed for high purity, the delicate components may require careful handling to avoid damage.
  • Accuracy: High purity regulators are designed to provide precise control, which is essential for applications requiring exact gas mixtures.
  • Replacement and Maintenance Costs: Regular maintenance may be necessary to ensure continued performance, and replacement parts may be more expensive due to the specialized nature of the components.
29 Results
EVR Series Equilibar Vacuum Regulator
from Equilibar, LLC.

Equilibar introduces a new type of vacuum regulator with more than 5X the flow stability of traditional spring regulators. That means that your vacuum process can remain stable even as gas flow rate changes over wide ranges. Can be used with manual set-point adjustment or computer automation. Is... [See More]

  • Media: Gas; High Purity; LP Gas; Natural Gas; Sour Gas; Specialty Corrosive
  • Valve Size: 0.25 to 4.00
  • Regulator: Vacuum / Absolute
  • Controlled Pressure Range: 0.00 to 14.74
PREST-O-LITE® Pressure Regulators -- R-22
from ESAB Welding and Cutting Products

Light-duty regulators outperform many regulators twice their size and weight for oxy-fuel gas applications. They are ideal for maintenance and repair shops requiring occasional welding and cutting operations. Features. New and improved. Small and lightweight, yet rugged and dependable. Outperform... [See More]

  • Media: Gas; High Purity; Acetylene, Oxygen
  • Maximum Pressure: 15.00 to 75.00
  • Regulator: Single Stage Cylinder Regulator
  • Connection Description: Threaded; Outlet Connection: A, B Size; 1/4 Flared 37 Deg
Multigas Digital Gas Back Pressure/Flow Controller -- GSB-1/2"-Alu
from Vogtlin Massflow USA

The new electronic red-y smart pressure controllers combine the reliable technology our of thermal mass flow controllers with electronic pressure control.The devices automatically control a predefined process pressure and at the same time measure and/or limit the flow rate.On-the-fly switching... [See More]

  • Media: Gas; High Purity; Natural Gas
  • Valve Size: 0.50
  • Regulator: Back Pressure; Pressure Reducing; Vacuum / Absolute; Pressure and Flow Regulator
  • Maximum Pressure: 0.00 to 160.00
Absolute Pressure Regulator -- 44-4700 Series
from Emerson Automation Solutions – TESCOM Regulators, Valves & Systems

TESCOM ™ 44-4700 Series is an extremely sensitive, high purity, backpressure regulator for specialty, flammable and industrial gases for low pressure and sub-atmospheric pressure control. Diffusion-resistant metal diaphragm seal ensures gas purity and leak integrity. Ideal for use in... [See More]

  • Media: Gas; High Purity; Specialty Corrosive
  • Valve Size: 0.25
  • Regulator: Back Pressure; Vacuum / Absolute
  • Maximum Pressure: 150.00
FD Series Fully Drainable Hygienic Back Pressure Regulator
from Equilibar, LLC.

Precision Back Pressure Regulator for Hygienic Service. For gas, liquid and mixed phase processes. Wide Range of working Pressures and Flows. Rugged 316 stainless steel Bar Stock Design with no Welded Fittings. Hygienic: No Crevices, <32Ra Finish. 3 Piece Low Dead Volume Design. Ports are the... [See More]

  • Media: Gas; High Purity; LP Gas; Natural Gas; Sour Gas; Specialty Corrosive
  • Valve Size: 0.50
  • Regulator: Back Pressure
  • Controlled Pressure Range: 0.00 to 150.00
PREST-O-LITE® Pressure Regulators -- R-411
from ESAB Welding and Cutting Products

This small, lightweight regulator is rugged and dependable and will outperform regulators twice its size. Patented explosion protection is built in on oxygen models. Features. New and improved. Small and lightweight, yet rugged and dependable. Outperform regulators twice their size. Fine mesh inlet... [See More]

  • Media: Gas; High Purity
  • Maximum Pressure: 15.00 to 75.00
  • Regulator: Light Duty Single Stage "B" Regulator; Light Duty Single Stage "MC" Regulator; Light Duty Series Regulator
  • Connection Description: Threaded
Multigas Digital Gas Back Pressure/Flow Controller -- GSB-1/2"-SS
from Vogtlin Massflow USA

The new electronic red-y smart pressure controllers combine the reliable technology our of thermal mass flow controllers with electronic pressure control.The devices automatically control a predefined process pressure and at the same time measure and/or limit the flow rate.On-the-fly switching... [See More]

  • Media: Gas; High Purity; Natural Gas
  • Valve Size: 0.50
  • Regulator: Back Pressure; Pressure Reducing; Vacuum / Absolute; Pressure and Flow Regulator
  • Maximum Pressure: 0.00 to 160.00
Backpressure Regulator -- 26-1700F Series
from Emerson Automation Solutions – TESCOM Regulators, Valves & Systems

TESCOM ™ 26-1700F Series backpressure regulators come with welded flanges according to EN 1092 and are suitable for gas or liquid service. Ideal for use in pilot plants in chemical industry and in reactor or vessel applications. [See More]

  • Media: Gas; High Purity; Specialty Corrosive
  • Valve Size: 0.25
  • Regulator: Back Pressure
  • Controlled Pressure Range: 5.00 to 500.00
GS Series Gas Service Back Pressure Regulator
from Equilibar, LLC.

Precision Back Pressure Regulator. For gas & mixed phase processes. Rugged Bar Stock Design. Available in ¼ inch through 1 inch sizes. SS316 standard with Hastelloy C optional. Diaphragms available in PTFE, Hastelloy, SS316, and polyimide. The GS series is specifically designed for a... [See More]

  • Media: Gas; High Purity; LP Gas; Natural Gas; Sour Gas; Specialty Corrosive
  • Valve Size: 0.12 to 1.00
  • Regulator: Back Pressure
  • Controlled Pressure Range: 0.00 to 2500.00
Multigas Digital Gas Back Pressure/Flow Controller -- GSB-1/4"-Alu
from Vogtlin Massflow USA

The new electronic red-y smart pressure controllers combine the reliable technology our of thermal mass flow controllers with electronic pressure control.The devices automatically control a predefined process pressure and at the same time measure and/or limit the flow rate.On-the-fly switching... [See More]

  • Media: Gas; High Purity; Natural Gas
  • Valve Size: 0.25
  • Regulator: Back Pressure; Pressure Reducing; Vacuum / Absolute; Pressure and Flow Regulator
  • Maximum Pressure: 0.00 to 160.00
Central Gas Supply Unit -- Compact Panel
from Emerson Automation Solutions – TESCOM Regulators, Valves & Systems

TESCOM ™ Compact Panel is a central gas supply unit for the pressure control of analytical gases in laboratory facilities. Depending on the requirements, these units switch over to a spare cylinder to enable an uninterrupted gas supply. The use of contact gauges allows the monitoring of empty... [See More]

  • Media: Gas; High Purity; Specialty Corrosive
  • Valve Size: 0.25
  • Regulator: Pressure Reducing
  • Controlled Pressure Range: 44.00 to 508.00
H10P Series 10,000psi Precision Back Pressure Regulator
from Equilibar, LLC.

Equilibar's Research Series back pressure regulator offer precision performance for high pressure applications up to 5000 psig. These regulators provide stable inlet pressure across widely varying flow rates, for liquid, gas, and mixed phase fluids. We can provide diaphragms of Stainless Steel 316,... [See More]

  • Media: Gas; High Purity; LP Gas; Natural Gas; Sour Gas; Specialty Corrosive
  • Valve Size: 0.12
  • Regulator: Back Pressure
  • Controlled Pressure Range: 0.00 to 10000.00
Multigas Digital Gas Back Pressure/Flow Controller -- GSB-1/4"-SS
from Vogtlin Massflow USA

The new electronic red-y smart pressure controllers combine the reliable technology our of thermal mass flow controllers with electronic pressure control.The devices automatically control a predefined process pressure and at the same time measure and/or limit the flow rate.On-the-fly switching... [See More]

  • Media: Gas; High Purity; Natural Gas
  • Valve Size: 0.25
  • Regulator: Back Pressure; Pressure Reducing; Vacuum / Absolute; Pressure and Flow Regulator
  • Maximum Pressure: 0.00 to 160.00
Cylinder Pressure Regulator -- Labo-F and Doppelregulus
from Emerson Automation Solutions – TESCOM Regulators, Valves & Systems

TESCOM ™ Labo-F and Doppelregulus are cylinder pressure regulators for applications with medium flow requirements (Labo) or low outlet pressures (Doppelregulus). [See More]

  • Media: Gas; High Purity
  • Valve Size: 0.24
  • Regulator: Pressure Reducing
  • Controlled Pressure Range: 22.00 to 290.00
HT1 Series High Temperature Back Presure Regulator
from Equilibar, LLC.

New Beta HT Series Extends Temperature to 450C. Equilibar has just made its HT Series back pressure regulators available for beta release to select customers. These regulators utilize a graphite seal for temperatures to 450C and pressures to 5000 psig. The Grafoil GTA seal is nuclear grade purity... [See More]

  • Media: Gas; High Purity; LP Gas; Natural Gas; Sour Gas; Specialty Corrosive
  • Valve Size: 0.12
  • Regulator: Back Pressure
  • Controlled Pressure Range: 0.00 to 5000.00
Multigas Digital Gas Pressure/Mass Flow Controller -- GSP-1/2"-Alu
from Vogtlin Massflow USA

The new electronic red-y smart pressure controllers combine the reliable technology our of thermal mass flow controllers with electronic pressure control.The devices automatically control a predefined process pressure and at the same time measure and/or limit the flow rate.On-the-fly switching... [See More]

  • Media: Gas; High Purity; Natural Gas
  • Valve Size: 0.50
  • Regulator: Back Pressure; Pressure Reducing; Vacuum / Absolute; Pressure and Flow Regulator
  • Maximum Pressure: 0.00 to 160.00
Cylinder Pressure Regulator -- Wega Mini
from Emerson Automation Solutions – TESCOM Regulators, Valves & Systems

TESCOM ™ Wega Mini cylinder pressure regulator is designed for gas purities up to 6.0 and offers a lightweight & compact integrated relief valve design. Ideal for use in lecture bottle and mobile applications. [See More]

  • Media: Gas; High Purity; Specialty Corrosive
  • Valve Size: 0.24
  • Regulator: Pressure Reducing
  • Controlled Pressure Range: 0.00 to 2900.00
Instrument Series Back Pressure Regulator ZF Zero Flow Model
from Equilibar, LLC.

Standard Pressure Range: 0.02 (.5 ” WC) to 1500 psig. Ultra Low to Zero flow performance. Standard Cv from 1E-11 to 0.01. Standard 316L Stainless Steel Body; Hastelloy C and PTFE also available. NPT, VCR/VCO type and Valco (low dead volume) ends available. Wide Variety of Diaphragms Including... [See More]

  • Media: Gas; High Purity; LP Gas; Natural Gas; Sour Gas; Specialty Corrosive
  • Valve Size: 0.12
  • Regulator: Back Pressure
  • Controlled Pressure Range: 0.00 to 3000.00
Multigas Digital Gas Pressure/Mass Flow Controller -- GSP-1/2"-SS
from Vogtlin Massflow USA

The new electronic red-y smart pressure controllers combine the reliable technology our of thermal mass flow controllers with electronic pressure control.The devices automatically control a predefined process pressure and at the same time measure and/or limit the flow rate.On-the-fly switching... [See More]

  • Media: Gas; High Purity; Natural Gas
  • Valve Size: 0.50
  • Regulator: Back Pressure; Pressure Reducing; Vacuum / Absolute; Pressure and Flow Regulator
  • Maximum Pressure: 0.00 to 160.00
Cylinder Pressure Regulator -- Wega Series
from Emerson Automation Solutions – TESCOM Regulators, Valves & Systems

TESCOM ™ Wega 1 single-stage and Wega 2 dual-stage cylinder pressure regulators are designed for gas purities up to 6.0 and offer relief valve integrated into body for low internal gas volume. Both versions are lightweight and compact. Ideal for use in reducing high pressure gases in storage... [See More]

  • Media: Gas; High Purity
  • Valve Size: 0.24
  • Regulator: Pressure Reducing; Duel Stage (optional feature)
  • Controlled Pressure Range: 0.00 to 2900.00
NLB Series Back Pressure Regulator
from Equilibar, LLC.

Precision Back Pressure Regulator. For liquid, gas & mixed phase processes. SS316 Rugged Bar Stock Design. Unique Chatter Suppression Feature in liquid only applications. High Precision and sensitivity. PTFE, stainless steel, and Hastelloy diaphragms available. The NL series back pressure... [See More]

  • Media: Gas; High Purity; LP Gas; Natural Gas; Sour Gas; Specialty Corrosive
  • Valve Size: 1.00 to 4.00
  • Regulator: Back Pressure
  • Controlled Pressure Range: 0.00 to 500.00
Multigas Digital Gas Pressure/Mass Flow Controller -- GSP-1/4"-Alu
from Vogtlin Massflow USA

The new electronic red-y smart pressure controllers combine the reliable technology our of thermal mass flow controllers with electronic pressure control.The devices automatically control a predefined process pressure and at the same time measure and/or limit the flow rate.On-the-fly switching... [See More]

  • Media: Gas; High Purity; Natural Gas
  • Valve Size: 0.25
  • Regulator: Back Pressure; Pressure Reducing; Vacuum / Absolute; Pressure and Flow Regulator
  • Maximum Pressure: 0.00 to 160.00
ER5100 Series Electropneumatic Actuator Regulator -- ER5100 Series
from Emerson Automation Solutions – TESCOM Regulators, Valves & Systems

ER5100 Series consists of the ER5000 Series controller and a 44-4000 Series pressure reducing regulator integrated together. Inlet pressures are up to 4500 psig / 310 bar with two different outlet ranges of 400 and 900 psig / 27.6 and 62.1 bar. The ER5100 Series may be ordered with a Cv = 0.7 or a... [See More]

  • Media: Gas; High Purity
  • Maximum Pressure: 400.00 to 900.00
  • Regulator: Pressure Reducing
  • Connection Description: Threaded
Multigas Digital Gas Pressure/Mass Flow Controller -- GSP-1/4"-SS
from Vogtlin Massflow USA

The new electronic red-y smart pressure controllers combine the reliable technology our of thermal mass flow controllers with electronic pressure control.The devices automatically control a predefined process pressure and at the same time measure and/or limit the flow rate.On-the-fly switching... [See More]

  • Media: Gas; High Purity; Natural Gas
  • Valve Size: 0.25
  • Regulator: Back Pressure; Pressure Reducing; Vacuum / Absolute; Pressure and Flow Regulator
  • Maximum Pressure: 0.00 to 160.00
High Flow Single-Stage High Purity Regulator -- SG3 Series Regulator
from Emerson Automation Solutions – TESCOM Regulators, Valves & Systems

TESCOM ™ SG3 Series is a compact, lightweight, high purity single-stage regulator for specialty, flammable and industrial gas flows of 5-200 SCFM / 141-5600 SLPM. Sensitive, extra long-life metal diaphragm ensures gas purity and integrity. Exceptionally low decaying inlet characteristic... [See More]

  • Media: Gas; High Purity; Specialty Corrosive
  • Valve Size: 0.50
  • Regulator: Pressure Reducing
  • Controlled Pressure Range: 14.50 to 249.46
High Pressure Panel Regulator
from Emerson Automation Solutions – TESCOM Regulators, Valves & Systems

High Pressure Panel is a central gas supply unit for the pressure control of analytical gases in laboratory facilities. The use of contact gauges allows the monitoring of the filling pressure of gas cylinders. This product is ideal for high pressure central gas supply for the distribution of gases... [See More]

  • Media: Gas; High Purity
  • Maximum Pressure: 2900.00 to 4350.00
  • Regulator: Pressure Reducing
  • Connection Description: Threaded
High Purity High Flow Single Stage Regulator -- PH-3200 Series
from Emerson Automation Solutions – TESCOM Regulators, Valves & Systems

TESCOM ™ PH-3200 Series high purity high flow single stage regulator offers a compact, USP Class VI and BPE compliant design suitable for biotech and pharm gas flows of 5-50 SCFM [141-1415 SLPM]. Diffusion-resistant metal-to-metal diaphragm seal ensures gas purity and integrity. Ideal for use... [See More]

  • Media: Gas; High Purity
  • Valve Size: 0.50 to 0.75
  • Regulator: Pressure Reducing
  • Controlled Pressure Range: 0.00 to 100.00
High Purity Single Stage Regulator -- PH-2200 Series
from Emerson Automation Solutions – TESCOM Regulators, Valves & Systems

TESCOM ™ PH-2200 Series high purity single stage regulator offers a compact, USP Class VI and BPE compliant design suitable for specialty, corrosive, and pyrophoric gases of <5 SCFM [141 SLPM]. Diffusion-resistant metal diaphragm seal ensures gas purity and integrity. Ideal for use in... [See More]

  • Media: Gas; High Purity
  • Valve Size: 0.38 to 0.50
  • Regulator: Pressure Reducing
  • Controlled Pressure Range: 0.00 to 100.00
High Purity Single Stage Regulator -- PH-2600 Series
from Emerson Automation Solutions – TESCOM Regulators, Valves & Systems

TESCOM ™ PH-2600 Series high purity single stage regulator offers a compact, USP Class VI and BPE compliant design suitable for specialty, corrosive, and pyrophoric gases flows of <10 SCFM [283 SLPM]. Diffusion-resistant metal diaphragm seal ensures gas purity and integrity. Ideal for use... [See More]

  • Media: Gas; High Purity
  • Valve Size: 0.38 to 0.50
  • Regulator: Pressure Reducing
  • Controlled Pressure Range: 0.00 to 100.00