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  • Power Handling of AIN vs. Al203
    Thermal conductivity of a ceramic substrate is an important element when considering the differences between AlN (aluminum nitride) and Al2O3 (alumina). A brief explanation and basic equations follow. The thermal conductivities of each of the ceramics are: [1] Kn = 170-190 (W/m °C) AlN [2] Ka = ~25
  • MICRO: BEOL Equipment
    Gerald Beyer and Mieke Van Bavel, Research into deposition processes discusses the properties of atomic layer deposition TiN and tungsten-carbon-nitride films on different substrate materials in integrated stacks. nterconnects have been, are, and will continue to be a limiting factor

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