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Supplier: Edwards Vacuum
Description: Features include compact size for easy installation, a linear output, and a replaceable sensor tube. The new gauges are compatible with all Edwards TIC instrument controllers and other active gauge controllers and displays. They are also CSA, C/US approved as well as fully RoHS
- Vacuum Range: 750.2847579999996 to 0.0007502847580170165 torr
- Accuracy: 15 ±% FS
- Operating Temperature: 41 to 140 F
- Signal Output: Analog Voltage
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Supplier: Busch Vacuum Solutions
Description: The Digital Transmitter DPH 400 is the latest generation of micro-controller-based vacuum gauges combining an ionization sensor after the Bayard-Alpert principle with a robust spiral coil filament Pirani to provide a full range pressure measurement from atmosphere to 5 ∙ 10-10
- Vacuum Range: 0.00000000037593537172142515 to 750.2847579999996 torr
- Operating Temperature: 41 to 140 F
- Signal Output: Analog Voltage, RS232 / RS485
- Display Type: Digital
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Supplier: Busch Vacuum Solutions
Description: The Analog Transmitter GTP 100 C is a corrosion resistant Pirani vacuum gauge ideal for challenging applications. Equipped with a reliable and robust spiral coil filament, this transmitter provides a wide range of pressure measurement from atmosphere to 5 ∙ 10-4 mbar. Platinum /
- Vacuum Range: 0.00037514237900850825 to 750.2847579999996 torr
- Operating Temperature: 41 to 140 F
- Signal Output: Analog Voltage
- Media: Gas
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Supplier: Busch Vacuum Solutions
Description: The mobile gauge TPP 900 is a battery operated handheld solution combining a piezoresistive sensor with a robust spiral coil filament Pirani sensor. This vacuum gauge provides a full and accurate range of pressure measurement from 1200 to 1 ∙ 10-4 mbar. Excellent
- Vacuum Range: 0.00037514237900850825 to 900.3417095999995 torr
- Accuracy: 0.3 ±% FS
- Operating Temperature: 41 to 122 F
- Display Type: Digital
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Supplier: Busch Vacuum Solutions
Description: The mobile gauge TTP 900 is a battery operated handheld solution with an external detachable Pirani sensor. Equipped with a robust spiral coil filament, this vacuum gauge provides a wide range of pressure measurement from 100 to 1 ∙ 10-3 mbar. Excellent measurement
- Vacuum Range: 0.0007502847580170165 to 75.02847579999992 torr
- Operating Temperature: 41 to 122 F
- Display Type: Digital
- Media: Gas
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Supplier: Accuris
Description: Vacuum Technology - Vacuum Gauges - Specifications, calibration and measurement uncertainties for Pirani gauges
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Supplier: Newport MKS
Description: The 275203 Convection-enhanced Pirani Vacuum Gauge provides reliable measurement from 10-4 Torr to atmosphere using a gold plated tungsten sensor, and features a size NW16 ISO-KF fitting. Convectron® gauges from MKS have been the world-standard convection-enhanced
- Type: Gauge
- Features: Other
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Supplier: VACUUBRAND, Inc.
Description: The DCP 3000 is an electronic vacuum gauge for rough and fine vacuum. Simultaneous connection of up to eight external vacuum sensors (four VSK 3000 and four VSP 3000) allows flexible measuring on the spot. A large illuminated display shows the measuring values of all
- Vacuum Range: 0.0001000000006634138 to 750 torr
- Accuracy: 10 ±% FS
- Operating Temperature: 50 to 104 F
- Display Type: Analog Meter, Digital
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Supplier: CSA Group
Description: ISO 19685:2017 identifies parameters of Pirani gauges, their calibration procedure, and describes measurement uncertainties to be considered when operating these gauges. ISO 19685:2017 applies to Pirani vacuum gauges operating over a pressure range of 0,01
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Supplier: Newport MKS
Description: The 275071 Convection-enhanced Pirani Vacuum Gauge provides reliable measurement from 10-4 Torr to atmosphere using a gold plated tungsten sensor, and features a 1/8 inch NPT fitting. Convectron® gauges from MKS have been the world-standard convection-enhanced
- Type: Gauge
- Features: Other
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Supplier: Newport MKS
Description: The 275185 Convection-enhanced Pirani Vacuum Gauge provides reliable measurement from 10-4 Torr to atmosphere using a gold plated tungsten sensor, and features a 1/4 inch female VCR fitting. Convectron® gauges from MKS have been the world-standard convection-enhanced
- Type: Gauge
- Features: Other
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Supplier: Accuris
Description: Vacuum technology \x97 Vacuum gauges \x97 Specifications, calibration and measurement uncertainties for Pirani gauges
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Supplier: Newport MKS
Description: process control. The Convectron® gauge is a convection-enhanced Pirani design vacuum gauge that features individually calibrated gauges, temperature compensation and convection technology for increased accuracy and repeatable vacuum measurements over seven
- Device Category: Controller
- Display Type: Digital
- Pressure Measurement: Gauge
- Features: Other
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Vacuum Gauges and Instruments - Vacuum Research Pirani Sensor, 1 to 1200 mTorr, NW-16 -- GO-68808-38Supplier: Cole-Parmer
Description: the Pirani-type gauge tube enhances stability, as does the unique temperature compensation network. Diaphragm sensor gauges 68808-42 to -46 read vacuum from 1 to 1500 Torr. This compact gauge features a pure silicon diaphragm that can measure liquid or gas pressure
- Signal Output: Analog Voltage
- Display Type: Digital
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Supplier: Cole-Parmer
Description: the Pirani-type gauge tube enhances stability, as does the unique temperature compensation network. Diaphragm sensor gauges 68808-42 to -46 read vacuum from 1 to 1500 Torr. This compact gauge features a pure silicon diaphragm that can measure liquid or gas pressure
- Signal Output: Analog Voltage
- Display Type: Digital
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Supplier: Cole-Parmer
Description: the Pirani-type gauge tube enhances stability, as does the unique temperature compensation network. Diaphragm sensor gauges 68808-42 to -46 read vacuum from 1 to 1500 Torr. This compact gauge features a pure silicon diaphragm that can measure liquid or gas pressure
- Signal Output: Analog Voltage
- Display Type: Digital
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Supplier: Cole-Parmer
Description: Vacuum Gauges/Controllers
- Display Type: Digital
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Supplier: Thyracont Vacuum Instruments GmbH
Description: Absolute Pressure 100 mbar to 1 x 10-3 mbar (=hPa), 75 Torr to 1 x 10-3 Torr VD84 digital Pirani vacuum meter with external, exchangeable sensor head VSP841/2 reads absolute pressure in the fine vacuum range. It is equipped with USB interface and can be used as data logger (up
- Vacuum Range: 0.004999999999962765 to 74.99999999999969 torr
- Operating Temperature: 41 to 122 F
- Display Type: Digital
- Features: Gauge, Other, Vacuum
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Supplier: Radwell International
Description: ULVAC, GP-2A, PIRANI VACUUM GAUGE CONTROL, 100VAC. FREE 2 YEAR RADWELL WARRANTY
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Supplier: Thyracont Vacuum Instruments GmbH
Description: Absolute Pressure 1200 - 5 x 10-4 mbar (=hPa), 900 - 5 x 10-4 Torr VD85 digital vacuum meter reads pressure over 7 decades in the rough and fine vacuum range. Its sensor combination of piezo and Pirani guarantees high resolution and precision over the whole range. It is equipped
- Vacuum Range: 0.0005000000007001402 to 899.9999999999999 torr
- Operating Temperature: 41 to 122 F
- Features: Center Back, Gauge, Other, Vacuum
- Display Type: Digital
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Supplier: Carbolite Gero Limited
Description: Maximum operating temperatures of 1500ºC. Carbolite HVT vacuum tube furnaces provide vacuum levels better than 1 x 10-5 mbar. These turn-key systems include two stage sliding vane rotary pump, water cooled oil diffusion pump, high vacuum baffle valve, roughing/backing valves,
- Process Temperature: 0 to 1,500 C
- Width / Tube O.D.: 75.00000000000001 mm
- Length (Chamber / Tube): 450 mm
- Features: Application Software, Computer Interface, Horizontal, Inert, Other, Over-Temperature Protection, Thermocouple Calibration, Vacuum
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See the latest addition to the Agilent active gauges family - the new FRG-705/707: full-range Pirani inverted magnetron gauges. These gauges combine Pirani and inverted magnetron technologies to deliver accurate measurement from atmosphere down to 7.6 × 10-10 Torr, all in a single (read more)
Browse Vacuum Gauges and Instruments Datasheets for Agilent Technologies - Vacuum Products -
Semiconductor fabs utilize a wide range of process gases and chemicals, which can be corrosive or reactive. Vacuum gauges must be compatible with these substances to avoid contamination. Our solution: Compared to traditional technologies like Pirani (read more)
Browse Pressure Sensors Datasheets for Endress + Hauser – Sensors & Components
More Information Top
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Design and fabrication of high performance wafer-level vacuum packaging based on glass–silicon–glass bonding techniques
In addition, a high-performance micro- Pirani vacuum gauge was integrated into the package for monitoring the pressure and the leak rate further.
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A novel low pressure sensor with fin-structures
Abstract—A fin type silicon-based Pirani vacuum gauge and its measurement methodology are first introduced.
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Fabrication and Characterization of a Wafer-Level MEMS Vacuum Package With Vertical Feedthroughs
[15] J. Mitchell, G. R. Lahiji, and K. Najafi, “An improved performance poly Si Pirani vacuum gauge using heat distributing structural supports,” in Proc. IEEE Int. Conf. MEMS, 2005, pp. 291–294.
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Robust hermetic packaging techniques for MEMS integrated microsystems.
B. C. S. Chou, J.-S. Shie, and Y.-M. Chen, "Highly sensitive Pirani vacuum gauge ," International Conference on Solid State Sensors and Actuators, and Eurosensors IX, Proceedings, vol.
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Tube-shaped Pirani gauge for in situ hermeticity monitoring of SiN thin-film encapsulation
… of diffusion pathways in polysilicon encapsulation for MEMS devices 21st IEEE Int. Conf. on Micro Electro Mechanical Systems pp 104–7 [15] Mitchell J, Lahiji G R and Najafi K 2008 An improved performance poly-Si Pirani vacuum gauge using heat-distributing structural …
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A LTCC microsystem vacuum package substrate with embedded cooling microchannel and Pirani gauge
Microchannel Fabrication Process in LTCC Ceramics , Microelectronics Reliability 48 (2008), pp. 866 871 [6] F.T Zhang, Z. Tang, J. yu, R.C Jin,“A micro- Pirani vacuum gauge based on micro-hotplate technology”, Sensors and actuators A, 126 (2006), pp.300 …
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Wafer-level vacuum package with vertical feedthroughs
Mitchell, er ol.,“A high-sensitivity Pirani vacuum gauge using heat distributing links,”MEMS 2005 [I21 J.
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A doubly anchored surface micromachined Pirani gauge for vacuum package characterization
Shie. etal., "High Performance Pirani Vacuum Gauge ,"JVSTA, vol.
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